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    • 5. 发明申请
    • MULTIPLE CAMERA WAFER INSPECTION
    • 多相机摄像机检测
    • US20160116419A1
    • 2016-04-28
    • US14526484
    • 2014-10-28
    • Sri Rama Prasanna Pavani
    • Sri Rama Prasanna Pavani
    • G01N21/88H04N7/18G01N21/95
    • H04N7/181G01N21/9501
    • A system and method for inspecting a surface, comprising: illuminating said surface with an electromagnetic radiation to generate scattered radiation, having a plurality of scattering angles, from features of said surface; collecting said scattered radiation from said surface at two or more positions, with radiation collected at each position forming an image of a plurality of points on said surface by collecting a portion of said scattered radiation propagating in a subset of said scattering angles; detecting images of surface at two or more said positions; and combining information from two or more said images of surface to generate a global information set, having information from a plurality of said scattering angles collected by two or more said imaging modules, whereby said features of said surface are detected in said images of surface and in said global information set.
    • 一种用于检查表面的系统和方法,包括:用电磁辐射照射所述表面,从所述表面的特征产生具有多个散射角的散射辐射; 在两个或更多个位置收集来自所述表面的散射辐射,其中在每个位置处收集的辐射通过收集在所述散射角的子集中传播的所述散射辐射的一部分来形成所述表面上的多个点的图像; 在两个或更多个所述位置检测表面的图像; 以及组合来自两个或更多个所述表面的所述图像的信息以产生全局信息集合,其具有由两个或更多个所述成像模块收集的多个所述散射角度的信息,由此在所述表面图像中检测所述表面的所述特征, 在全球信息集中。
    • 10. 发明授权
    • Certified wafer inspection
    • US09324541B1
    • 2016-04-26
    • US14547111
    • 2014-11-18
    • Sri Rama Prasanna Pavani
    • Sri Rama Prasanna Pavani
    • G06K9/00H01J37/26H01J37/20H01J37/22
    • H01J37/263H01J37/28H01J2237/221H01L22/12H01L22/20
    • A method for certifying an inspection system using a calibrated surface, comprising: acquiring a calibrated list from said calibrated surface, with said calibrated list comprising information about features located on said calibrated surface; inspecting said calibrated surface with said inspection system to generate an estimated list, with said estimated list comprising information about features located on said calibrated surface; generating a matched list by searching for the presence of one or more calibrated features in said estimated list, wherein said calibrated features are listed in said calibrated list; computing an estimated characteristic parameter from said matched list, wherein said estimated characteristic parameter quantifies features in said matched list having a unifying characteristic; and comparing said estimated characteristic parameter with a calibrated characteristic parameter, wherein said calibrated characteristic parameter quantifies features in said calibrated list having said unifying characteristic, whereby the ability of said inspection system to detect features with one or more characteristics is certified. A system and method for imaging a surface to generate an adaptive resolution image, comprising: determining a weakly scattering feature, wherein said weakly scattering feature produces a weak image response to be resolved by said adaptive resolution image; determining a coarse spot size such that said weakly scattering feature is detected in an image captured with said coarse spot size; capturing a coarse image of region with said coarse spot size, wherein said coarse image of region comprises one or more pixels corresponding to a predetermined region of said surface; classifying said coarse image of region into a coarse image of feature and a coarse image of surface, wherein a feature is detected in said coarse image of feature and a feature is not detected in said coarse image of surface; estimating a feature position from said coarse image of feature, wherein said feature position is the location of feature on said surface; capturing a fine image of feature at said feature position, wherein said fine image of feature is captured with a fine spot size having a smaller spot size than said coarse spot size; and combining said fine image of feature and said coarse image of surface to generate said adaptive resolution image, whereby feature regions are captured with finer resolution than featureless surface regions in said adaptive resolution image.