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    • 5. 发明申请
    • MASK ADJUSTMENT UNIT, MASK DEVICE, AND APPARATUS AND METHOD FOR PRODUCING MASK
    • 掩模调整单元,掩蔽装置,以及用于生产掩模的装置和方法
    • US20150068456A1
    • 2015-03-12
    • US14388568
    • 2013-01-31
    • Sony Corporation
    • Kentaro KuriyamaTomohiro Kubo
    • B05B15/04B23Q1/03
    • B05B12/29B23Q1/03C23C14/042Y10T29/49998
    • [Object] To provide techniques such as a mask adjustment unit capable of appropriately adjusting the position of a mask pattern.[Solving Means] A mask adjustment unit according to the present technology includes a base body, a movable member, and an adjustment mechanism. The movable member supports a side of an outer edge portion of a mask main body and is movably provided on the base body, the mask main body having the outer edge portion. The adjustment mechanism applies, to the mask body via the movable member, both pulling tension force from the outer edge portion of the mask main body to outside of the mask main body and pressing force pressing from the outer edge portion to inside of the mask main body, the mask body being supported by the movable member.
    • 提供能够适当调整掩模图案的位置的掩模调整单元等技术。 解决方案根据本技术的面罩调节单元包括基体,可动构件和调节机构。 可动构件支撑荫罩主体的外缘部的一侧,并且可移动地设置在基体上,荫罩主体具有外缘部。 调节机构通过可动部件向面体主体施加从荫罩主体的外缘部到面罩主体的外侧的拉力,以及从外缘部到面罩主体内侧的按压力 所述面罩主体由所述可动构件支撑。