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1. 发明授权

US5883715A Laser vibrometer for vibration measurements 失效
标题翻译：激光测振仪进行振动测量
公开(公告)号：US5883715A
公开(公告)日：1999-03-16
申请号：US793140
申请日：1997-02-19
申请人： Siegbert Steinlechner , Pawel Drabarek , Michael Van Keulen
发明人： Siegbert Steinlechner , Pawel Drabarek , Michael Van Keulen
IPC分类号： G01H9/00 , G01B9/02
CPC分类号： G01H9/00
摘要： A laser diode (1) of a laser vibrometer emits light which is guided onto a polarization beam splitter (3) by a lens 2. A portion of the beam is guided through directly to an imaging lens (4) and a second portion is deflected onto a mirror (5). Quarter-wave plates (6) and (7) are arranged between the polarization beam splitter and respectively the lens or the mirror. The beam which is reflected on the mirror is guided completely through the polarization beam splitter onto a photodetector unit (8). The beam reflected by the object (9) to be measured, which swings in the direction (14), is also deflected to the photodetector unit. The output signal of the photodetector unit, the interference signal generated from the superposition of the two reflected beams, is supplied to an electronic evaluation equipment (10). The latter is also supplied with a signal of a current modulator (11) which, on the other hand, supplies the laser diode with modulated injection current via line (12). The distance between the imaging lens and the object to be measured forms an optical detour (13) which is considerably lengthened compared to the reference arm.
摘要翻译： PCT No.PCT / DE96 / 00576 Sec。 371日期1997年2月19日 102（e）日期1997年2月19日PCT 1996年3月21日PCT公布。公开号WO97 / 01082 日期1997年1月9日激光振动计的激光二极管（1）发射由透镜2引导到偏振分束器（3）上的光。光束的一部分被直接引导到成像透镜（4）和第二部分偏转到反射镜（5）上。四分之一波片（6）和（7）分别布置在偏振光束分离器和透镜或镜子之间。在镜子上反射的光束完全通过偏振分束器被引导到光电检测器单元（8）上。被测量物体（9）反射的光束（14）在方向（14）上摆动也被偏转到光电探测器单元。光电检测器单元的输出信号（由两个反射光束的叠加产生的干涉信号）被提供给电子评估设备（10）。后者还提供有电流调制器（11）的信号，另一方面，电流调制器（11）通过管线（12）向激光二极管提供调制的注入电流。成像透镜和被测量物体之间的距离形成与参考臂相比显着延长的光学绕行线（13）。

2. 发明授权

US07339679B2 Interferometric measuring device utilizing a slanted probe filter 有权
标题翻译：采用倾斜式探头过滤器的干涉测量装置
公开(公告)号：US07339679B2
公开(公告)日：2008-03-04
申请号：US10529424
申请日：2003-03-28
申请人： Pawel Drabarek , Dominique Breider , Marc-Henri Duvoisin , Dominique Marchal
发明人： Pawel Drabarek , Dominique Breider , Marc-Henri Duvoisin , Dominique Marchal
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/02002 , G01B9/0205 , G01B9/02057 , G01B9/02064 , G01B9/0209 , G01B2290/45
摘要： An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference. A construction for reliable measurements even in tight hollow spaces provides that the partially transmitting region is formed by a slanting exit face of a probe fiber at an exit angle as to the optical probe axis and a likewise slanting entrance face, of a fiber section following on the object side, as to the optical probe axis at an entrance angle, a wedge-shaped gap being formed between the exit and entrance surfaces.
摘要翻译：一种干涉测量装置，用于记录具有调制干涉仪的测量对象表面的形状，粗糙度或间隔距离，所述调制干涉仪由辐射源提供短的相干辐射，其具有与调制干涉仪在空间上分离的测量探针;以及通过导光光纤装置耦合到其上，其中组合的光束分量在部分透射区域中的共同臂中分成测量和参考光束，并且具有接收器和评估装置，用于将所提供的辐射转换成电信号并用于基于相位差来评估信号。即使在紧密的中空空间中也能进行可靠测量的结构，可以确定部分透射区域由探针光纤的倾斜出口面以光纤轴线的出射角和相同的倾斜入口面形成，物体侧，对于入射角的光学探针轴，在出射表面和入射表面之间形成楔形间隙。

3. 发明申请

US20070291274A1 Interferometric Measuring System 审中-公开
标题翻译：干涉测量系统
公开(公告)号：US20070291274A1
公开(公告)日：2007-12-20
申请号：US10591502
申请日：2005-01-07
申请人： Pawel Drabarek
发明人： Pawel Drabarek
IPC分类号： G01B9/02
CPC分类号： G01B9/02065 , G01B9/02007 , G01B9/02027 , G01B9/0209 , G01B11/2441 , G01D5/35383
摘要： The present invention relates to an interferometric measuring system for measuring, for example, shape deviation, position, surface properties, vibrations, of an object, the measuring system including a transmitting element having a modulation interferometer and a radiation source for short-coherent radiation, as well as a measuring probe system connected thereto for supplying the radiation via a common optical path, and further including a receiving element for analyzing the measuring radiation returning from the measuring probe system, said receiving element being combined with the transmitting element in a transmitter/receiver unit. A reduction in complexity and cost combined with enhanced application possibilities is achieved in that the measuring probe system includes a plurality of measuring probes coupled to the common optical path via respective optical paths, and in that a switching device is disposed at a coupling point between the common optical path and the respective optical paths to the measuring probes, said switching device allowing the different measuring probes to be individually brought into a bidirectionally transmitting connection with the transmitter/receiver unit for the radiation supplied by the modulation interferometer, on the one hand, and the measuring radiation, on the other hand.
摘要翻译：本发明涉及一种用于测量物体的形状偏差，位置，表面特性，振动的干涉测量系统，该测量系统包括具有调制干涉仪的发射元件和用于短相干辐射的辐射源，以及与其连接的测量探针系统，用于经由公共光路提供辐射，并且还包括用于分析从测量探针系统返回的测量辐射的接收元件，所述接收元件与发射元件组合在发射器/ 接收单元。实现复杂性和成本的降低以及增强的应用可能性的实现，其中测量探针系统包括经由相应的光路耦合到公共光路的多个测量探针，并且开关装置设置在耦合点公共光路和到测量探针的各个光路，所述开关装置一方面允许不同的测量探针与调制干涉仪提供的辐射的发射器/接收器单元分别进行双向传输连接，另一方面测量辐射。

4. 发明申请

US20070229840A1 Interferometric measuring device 失效
标题翻译：干涉测量仪
公开(公告)号：US20070229840A1
公开(公告)日：2007-10-04
申请号：US11731052
申请日：2007-03-30
申请人： Pawel Drabarek , Stefan Franz , Matthias Fleischer
发明人： Pawel Drabarek , Stefan Franz , Matthias Fleischer
IPC分类号： G01B9/02
CPC分类号： G01B9/0209 , G01B9/02065 , G01B2290/20
摘要： An interferometric measuring device includes a short-coherent radiation source and a system composed of a modulation interferometer having a first and a second modulation interferometer beam path and a downstream reference interferometer, the radiation being split in the reference interferometer into a first beam path and a second beam path. If a dispersive optical component is situated in at least one beam path of the reference interferometer, a different optical path length becomes effective for radiation of a different wavelength in the beam path having the dispersive optical component. Therefore, if one measuring probe is replaced with another one having a modified optical path length, the modulation interferometer may be adjusted and the reference interferometer may remain unchanged. The reference interferometer may thus be used over an extended adjustment path of the modulation interferometer without optical components having to be replaced for adjusting the different path difference of measuring probes in the reference interferometer.
摘要翻译：干涉测量装置包括短相干辐射源和由具有第一和第二调制干涉仪光束路径和下游参考干涉仪的调制干涉仪组成的系统，所述辐射在参考干涉仪中分裂为第一光束路径和第二光束路径。如果色散光学部件位于参考干涉仪的至少一个光束路径中，则具有分散光学部件的光束路径中不同光程长度对于不同波长的辐射是有效的。因此，如果一个测量探针被具有修改的光程长度的另一个测量探头所替代，则可以调整调制干涉仪并且参考干涉仪可以保持不变。因此，参考干涉仪可以在调制干涉仪的扩展调整路径上使用，而不需要替换光学组件来调整参考干涉仪中的测量探针的不同路径差。

5. 发明授权

US06297884B1 Interferometric instrument provided with an arrangement for producing a frequency shift between two interfering beam components 失效
标题翻译：具有用于在两个干扰光束分量之间产生频移的装置的干涉仪
公开(公告)号：US06297884B1
公开(公告)日：2001-10-02
申请号：US09083312
申请日：1998-05-22
申请人： Pawel Drabarek
发明人： Pawel Drabarek
IPC分类号： G01B902
CPC分类号： G01B9/02028 , G01B9/02002 , G01B9/02044 , G01B9/0209 , G01B11/303
摘要： An interferometric instrument that includes a radiation generating unit for emitting briefly coherent radiation is used for sensing the surfaces of a test object by determining an interference maximum. Precise determination of the interference maximum, and therefore precise sensing of the test object, are achieved by providing, in the optical path of the first beam component and/or in the optical path of the second beam component, an arrangement which produces a frequency shift between the two interfering beam components and by providing a beam splitting arrangement, located in front of the photodetector arrangement in the optical path of the interfered radiation upstream from the photodetector device, which can be used to split the beams into at least two spectral components and supply them to the photodetector arrangement either directly or via additional elements on the photodetectors assigned to the components.
摘要翻译：包括用于发射短暂相干辐射的辐射发生单元的干涉仪被用于通过确定干扰最大值来感测测试对象的表面。通过在第一光束分量的光路和/或第二光束分量的光路中提供产生频移的装置来实现干扰最大值的精确确定，并因此确定测试对象的精确感测在两个干扰光束分量之间并且通过提供一个分束装置，该光束分离装置位于光电检测器装置上游的干涉辐射的光路中的光电检测器装置的前面，该光路可用于将光束分成至少两个光谱分量，直接或通过分配给组件的光电检测器上的附加元件将它们提供给光电检测器装置。

6. 发明授权

US06295132B1 Interferometric measuring device having parallelly-displacing arrangement and compensating grating in the reference path 失效
标题翻译：干涉测量装置在参考路径中具有平行位移布置和补偿光栅
公开(公告)号：US06295132B1
公开(公告)日：2001-09-25
申请号：US09424613
申请日：2000-03-31
申请人： Pawel Drabarek
发明人： Pawel Drabarek
IPC分类号： G01B902
CPC分类号： G01B9/0209 , G01B9/02058 , G01B2290/40 , G01J9/02
摘要： An interferometric measuring device for measuring shapes of rough surfaces of an object to be measured. The measuring device has a radiation generator that emits a short-coherent radiation; a beam splitter for forming a reference beam that is directed toward a device having a reflecting element for periodically changing the light path, and a measuring beam which is directed toward the object to be measured; a superposition element at which the measuring beam coming from the object to be measured and the reference beam coming from the device are made to interfere; and a photodetector that receives the interfered radiation. In a simple design, a high measuring accuracy is achieved in that the device for changing the light path has a parallelly-displacing arrangement arranged in the beam path, and, fixedly arranged behind it, the reflecting element, and that a compensating grating is arranged in the beam path of the reference beam upstream of the parallelly-displacing arrangement. The reference beam is diffracted at the grating both prior and subsequent to passing through the parallelly-displacing arrangement.
摘要翻译：一种用于测量待测物体的粗糙表面的形状的干涉测量装置。测量装置具有发射短相干辐射的辐射发生器; 用于形成参考光束的分束器，所述参考光束指向具有用于周期性地改变光路的反射元件的装置，以及指向待测量物体的测量光束; 来自待测物体的测量光束和来自设备的参考光束的叠加元件被干扰; 以及接收干扰辐射的光电检测器。在简单的设计中，实现了高的测量精度，即用于改变光路的装置具有布置在光束路径中并且固定地布置在其中的平行位移布置的反射元件，并且布置补偿光栅在平行移位装置的上游的参考光束的光束路径中。参考光束在通过平行置换装置之前和之后在光栅处衍射。

7. 发明授权

US5141317A Method of optoelectronically measuring distances and angles 失效
标题翻译：光电测量距离和角度的方法
公开(公告)号：US5141317A
公开(公告)日：1992-08-25
申请号：US623920
申请日：1990-12-24
申请人： Heins-Erdam Bollhagen , Pawel Drabarek
发明人： Heins-Erdam Bollhagen , Pawel Drabarek
IPC分类号： G01B11/00 , G01D5/38 , G01P3/36
CPC分类号： G01D5/38 , G01P3/366
摘要： A method for optoelectronically measuring distances and/or angles is suggested. A first and second beam (13, 14 and 61, 63) are directed onto the surface 12 of an object 10 to be measured at pregiven angles (.alpha. and (.beta.) which are diffracted at a common point of incidence on the surface 12. In one embodiment, the two beams (13, 14 and 61, 63) have different frequencies. In another embodiment, the frequency of the two beams (13, 14 and 61, 63) changes simultaneously and one of the two beams (13, 61; 14, 63) has a phase modulation. The phase change of the signal supplied by the sensor 18 is evaluated with reference to a reference signal.
摘要翻译： PCT No.PCT / DE89 / 00409 Sec。 371 1990年12月24日第24 102（e）1990年12月24日日期PCT提交1988年6月22日PCT公布。第WO89 / 12799号公报日期为1989年12月28日。建议使用光电测量距离和/或角度的方法。将第一和第二光束（13,14和61,63）以预定角度（α和（β））被引导到要测量的物体10的表面12上，所述角度（α和β）在表面12上的公共入射点处被衍射。在一个实施例中，两个光束（13,14和61,63）具有不同的频率，在另一实施例中，两个光束（13,14和61,63）的频率同时变化，两个光束（13， 61; 14,63）具有相位调制，参考参考信号来评估由传感器18提供的信号的相位变化。

8. 发明授权

US08913249B2 Optical system for illuminating a measured object and interferometric system for measuring surfaces of a measured object 有权
标题翻译：用于照射测量对象的光学系统和用于测量被测物体的表面的干涉测量系统
公开(公告)号：US08913249B2
公开(公告)日：2014-12-16
申请号：US12736658
申请日：2009-04-16
申请人： Matthias Fleischer , Pawel Drabarek
发明人： Matthias Fleischer , Pawel Drabarek
IPC分类号： G01B11/02 , G01B9/02
CPC分类号： G01B9/02021 , G01B9/02007 , G01B9/02028 , G01B9/0209
摘要： An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.
摘要翻译：一种用于使用光学系统测量被测物体的表面的干涉测量系统。光学系统具有分束器，其将第一光束路径中的测量光束引导并且借助于两个反射镜将第二光束路径中的光束测量到被测物体的表面上。由表面反射的光束形成的光束路径在具有相同光束方向的区域中至少部分重叠。以这种方式，所测量的物体的测量表面至少部分地成像在诸如图像记录器的检测器的相同照射的表面上。

9. 发明申请

US20110122414A1 OFFICIAL SYSTEM FOR ILLUMINATING A MEASURED OBJECT AND INTERFEROMETRIC SYSTEM FOR MEASURING SURFACES OF A MEASURED OBJECT 有权
标题翻译：用于测量测量对象表面的测量对象和干涉系统的官方系统
公开(公告)号：US20110122414A1
公开(公告)日：2011-05-26
申请号：US12736658
申请日：2009-04-16
申请人： Matthias Fleischer , Pawel Drabarek
发明人： Matthias Fleischer , Pawel Drabarek
IPC分类号： G01B9/02
CPC分类号： G01B9/02021 , G01B9/02007 , G01B9/02028 , G01B9/0209
摘要： An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.
摘要翻译：一种用于使用光学系统测量被测物体的表面的干涉测量系统。光学系统具有分束器，其将第一光束路径中的测量光束引导并且借助于两个反射镜将第二光束路径中的光束测量到被测物体的表面上。由表面反射的光束形成的光束路径在具有相同光束方向的区域中至少部分重叠。以这种方式，所测量的物体的测量表面至少部分地成像在诸如图像记录器的检测器的相同照射的表面上。

10. 发明申请

US20080144040A1 Optical fiber probe and method for manufacturing an optical fiber probe 有权
标题翻译：光纤探头及其制造方法
公开(公告)号：US20080144040A1
公开(公告)日：2008-06-19
申请号：US11974412
申请日：2007-10-11
申请人： Pawel Drabarek , David Rychtarik
发明人： Pawel Drabarek , David Rychtarik
IPC分类号： G02B6/10 , B29D11/00
CPC分类号： G01B9/0205 , G01B9/02057 , G02B6/3845
摘要： An optical fiber probe for an interferometric measuring device having a mechanical receptacle into which an optical fiber is inserted, having a fiber end piece which projects over the mechanical receptacle and contains optical components for guiding a measuring beam onto a measuring object, and having a reflection zone situated in the fiber for partial reflection of a light beam guided in the fiber. The reflection zone is situated in the fiber end piece. A method for manufacturing such an optical fiber probe. The fiber is separated at a predefined point, a partially reflecting coating is applied to at least one of the separation sites, and the two fiber parts are subsequently reconnected. The optical fiber probes may thus be manufactured with a long fiber end piece, which makes it possible to interferometrically measure deep cavities having a small diameter.
摘要翻译：一种用于干涉测量装置的光纤探针，其具有插入有光纤的机械插座，其具有突出在机械插座上的纤维端片，并包含用于将测量光束引导到测量对象上的光学部件，并具有反射区域位于光纤中，用于在光纤中引导的光束的部分反射。反射区位于光纤端部。一种制造这种光纤探针的方法。纤维在预定点被分离，将部分反射的涂层施加到至少一个分离位置，然后两个纤维部分重新连接。因此，光纤探针可以用长纤维端片制造，这使得可以对具有小直径的深空腔进行干涉测量。

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