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1. 发明授权

US06995350B2 Near field optical probe having an internal near field generating and detecting device, and manufacturing method thereof 失效
标题翻译：具有内部近场产生和检测装置的近场光学探针及其制造方法
公开(公告)号：US06995350B2
公开(公告)日：2006-02-07
申请号：US10307438
申请日：2002-12-02
申请人： Shunsuke Fujita , Junichi Takahashi , Motoichi Ohtsu , Motonobu Kourogi
发明人： Shunsuke Fujita , Junichi Takahashi , Motoichi Ohtsu , Motonobu Kourogi
IPC分类号： H01J3/14
CPC分类号： G01Q60/22
摘要： In a near field optical probe, a through hole having an aperture is provided in a semiconductor photodetector including at least a first-conductive-type high-concentration impurity layer, a first-conductive-type low-concentration impurity layer and a second-conductivity impurity-introduced region.
摘要翻译：在近场光学探针中，具有孔径的通孔设置在至少包括第一导电型高浓度杂质层，第一导电型低浓度杂质层和第二导电型低浓度杂质层的半导体光电检测器中杂质引入区域。

2. 发明授权

US06541755B1 Near field optical probe and manufacturing method thereof 失效
标题翻译：近场光探针及其制造方法
公开(公告)号：US06541755B1
公开(公告)日：2003-04-01
申请号：US09448152
申请日：1999-11-24
申请人： Shunsuke Fujita , Motoichi Ohtsu , Motonobu Kourogi
发明人： Shunsuke Fujita , Motoichi Ohtsu , Motonobu Kourogi
IPC分类号： H01J314
CPC分类号： G01Q60/22
摘要： In a near field optical probe, a through hole having an aperture is provided in a semiconductor photodetector including at least a first-conductive-type high-concentration impurity layer, a first-conductive-type low-concentration impurity layer and a second-conductivity impurity-introduced region.
摘要翻译：在近场光学探针中，具有孔径的通孔设置在至少包括第一导电型高浓度杂质层，第一导电型低浓度杂质层和第二导电型低浓度杂质层的半导体光电检测器中杂质引入区域。

3. 发明授权

US06680900B1 Optical-pickup slider, manufacturing method thereof, probe and manufacturing method thereof, and probe array and manufacturing method thereof 失效
公开(公告)号：US06680900B1
公开(公告)日：2004-01-20
申请号：US09585428
申请日：2000-06-02
申请人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
发明人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
IPC分类号： G11B700
CPC分类号： G11B7/1387 , G01Q60/22 , G11B7/122 , G11B7/22 , G11B21/21 , Y10T29/49002 , Y10T29/4902 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： An optical-pickup slider is characterized in that a light-transmitting-property substrate is bonded to a surface of a layer having a tapered through hole, on which surface a larger opening of the tapered through hole exists. Thereby, it is possible to prevent the layer having an aperture from being destroyed. A method of manufacturing the optical-pickup slider comprises the steps of a) making a tapered through hole in a layer layered on a first substrate and having a thickness smaller than that of the first substrate; and, after bonding a light-transmitting-property substrate to a surface of the layer, removing the first substrate so as to expose an aperture at a tip of the tapered through hole.

4. 发明申请

US20060153058A1 Optical-pickup slider, manufacturing method thereof, probe and manufacturing method thereof, and probe array and manufacturing method thereof 失效
公开(公告)号：US20060153058A1
公开(公告)日：2006-07-13
申请号：US11294474
申请日：2005-12-06
申请人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
发明人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
IPC分类号： G11B15/64 , B29D11/00
CPC分类号： G11B7/1387 , G01Q60/22 , G11B7/122 , G11B7/22 , G11B21/21 , Y10T29/49002 , Y10T29/4902 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： An optical-pickup slider is characterized in that a light-transmitting-property substrate is bonded to a surface of a layer having a tapered through hole, on which surface a larger opening of the tapered through hole exists. Thereby, it is possible to prevent the layer having an aperture from being destroyed. A method of manufacturing the optical-pickup slider comprises the steps of a) making a tapered through hole in a layer layered on a first substrate and having a thickness smaller than that of the first substrate; and, after bonding a light-transmitting-property substrate to a surface of the layer, removing the first substrate so as to expose an aperture at a tip of the tapered through hole.

5. 发明授权

US07489616B2 Optical-pickup slide, manufacturing method thereof, probe and manufacturing method thereof, and probe array and manufacturing method thereof 失效
标题翻译：光拾取滑块及其制造方法，探头及其制造方法以及探针阵列及其制造方法
公开(公告)号：US07489616B2
公开(公告)日：2009-02-10
申请号：US11294474
申请日：2005-12-06
申请人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
发明人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
IPC分类号： G11B7/00 , G11B5/127
CPC分类号： G11B7/1387 , G01Q60/22 , G11B7/122 , G11B7/22 , G11B21/21 , Y10T29/49002 , Y10T29/4902 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： An optical-pickup slider is characterized in that a light-transmitting-property substrate is bonded to a surface of a layer having a tapered through hole, on which surface a larger opening of the tapered through hole exists. Thereby, it is possible to prevent the layer having an aperture from being destroyed. A method of manufacturing the optical-pickup slider comprises the steps of a) making a tapered through hole in a layer layered on a first substrate and having a thickness smaller than that of the first substrate; and, after bonding a light-transmitting-property substrate to a surface of the layer, removing the first substrate so as to expose an aperture at a tip of the tapered through hole.
摘要翻译：光拾取滑块的特征在于，透光性基板被结合到具有锥形通孔的表面上，在该表面上存在锥形通孔的较大开口。由此，可以防止具有孔径的层被破坏。一种制造光学拾取器滑块的方法包括以下步骤：a）在层叠在第一衬底上并具有小于第一衬底厚度的层中的锥形通孔; 并且在将透光性基板粘合到所述层的表面之后，移除所述第一基板以暴露所述锥形通孔的尖端处的孔。

6. 发明授权

US06993826B2 Method of manufacturing a probe array 失效
标题翻译：探针阵列的制造方法
公开(公告)号：US06993826B2
公开(公告)日：2006-02-07
申请号：US10720444
申请日：2003-11-25
申请人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
发明人： Junichi Takahashi , Motonobu Kourogi , Takashi Yatsui , Motoichi Ohtsu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B7/1387 , G01Q60/22 , G11B7/122 , G11B7/22 , G11B21/21 , Y10T29/49002 , Y10T29/4902 , Y10T29/49032 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048
摘要： An optical-pickup slider is characterized in that a light-transmitting-property substrate is bonded to a surface of a layer having a tapered through hole, on which surface a larger opening of the tapered through hole exists. Thereby, it is possible to prevent the layer having an aperture from being destroyed. A method of manufacturing the optical-pickup slider comprises the steps of a) making a tapered through hole in a layer layered on a first substrate and having a thickness smaller than that of the first substrate; and, after bonding a light-transmitting-property substrate to a surface of the layer, removing the first substrate so as to expose an aperture at a tip of the tapered through hole.
摘要翻译：光拾取滑块的特征在于，透光性基板被结合到具有锥形通孔的表面上，在该表面上存在锥形通孔的较大开口。由此，可以防止具有孔径的层被破坏。一种制造光学拾取器滑块的方法包括以下步骤：a）在层叠在第一衬底上并具有小于第一衬底厚度的层中的锥形通孔; 并且在将透光性基板粘合到所述层的表面之后，移除所述第一基板以暴露所述锥形通孔的尖端处的孔。

7. 发明授权

US06340813B1 Variable-aperture optical near-field probe 失效
标题翻译：可变孔径光学近场探头
公开(公告)号：US06340813B1
公开(公告)日：2002-01-22
申请号：US09496050
申请日：2000-02-02
申请人： Junji Tominaga , Takashi Nakano , Nobufumi Atoda , Motonobu Kourogi , Motoichi Ohtsu
发明人： Junji Tominaga , Takashi Nakano , Nobufumi Atoda , Motonobu Kourogi , Motoichi Ohtsu
IPC分类号： H01J314
CPC分类号： G01Q60/22
摘要： Disclosed is an improved optical near-field probe for optical near-field microscopy or optical near-field recording having an effective aperture diameter variable to comply with different applications. The improvement comprises attaching, to the aperture end opening of an optical fiber-based probe, a thin film made from a substance which is opaque but capable of being rendered transparent, such as antimony or photo-chromic compounds, by irradiation with light so that the center area only of the end opening becomes transparent and transmits the laser beam to serve as an effective aperture of a diameter variable depending on the intensity of the light.
摘要翻译：公开了一种用于光学近场显微镜或光学近场记录的改进的光学近场探测器，其具有有效孔径可变以符合不同的应用。改进之处在于，通过光照射将由不透明但能够变得透明的物质（例如锑或光铬化合物）制成的薄膜附着到基于光纤的探针的孔径端开口上，使得端部开口的中心区域变得透明，并且透射激光束以作为根据光的强度的直径变化的有效孔径。

8. 发明授权

US07586085B2 Photo-detection device and method 失效
标题翻译：光检测装置及方法
公开(公告)号：US07586085B2
公开(公告)日：2009-09-08
申请号：US10563626
申请日：2004-07-08
申请人： Motoichi Ohtsu , Motonobu Kourogi , Shuji Mononobe , Takashi Yatsui , Koji Yamamoto , Toshiyuki Inokuchi , Masato Takada
发明人： Motoichi Ohtsu , Motonobu Kourogi , Shuji Mononobe , Takashi Yatsui , Koji Yamamoto , Toshiyuki Inokuchi , Masato Takada
IPC分类号： H01J3/14 , H01J37/00
CPC分类号： G01Q60/22 , G01N21/55 , G02B21/002
摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.
摘要翻译：利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到朝向和远离用于测量的表面2a的方向。光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上用于测量2a，并且检测从光斑导出的光。

9. 发明授权

US07586084B2 Optical fiber probe, optical detection device, and optical detection method 失效
标题翻译：光纤探头，光学检测装置和光学检测方法
公开(公告)号：US07586084B2
公开(公告)日：2009-09-08
申请号：US11547032
申请日：2006-02-02
申请人： Izumi Itoh , Masato Takada , Taroh Terashi , Motoichi Ohtsu , Takashi Yatsui , Motonobu Kourogi
发明人： Izumi Itoh , Masato Takada , Taroh Terashi , Motoichi Ohtsu , Takashi Yatsui , Motonobu Kourogi
IPC分类号： G02B6/26
CPC分类号： G01Q60/22
摘要： An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.
摘要翻译：公开了一种光学检测装置图像，其允许使用高分辨率和高效率的近场光进行快速测量，但不需要光纤探针的位置对准。光学检测装置包括光纤探针，其具有用于传播光的芯，光纤探针形成在芯的前端; 移动控制单元，用于移动光纤探针以接近或离开样本; 以及检测单元，用于检测来自所述样品表面的光，其中在所述光学探针的所述芯的前端表面上，在用于发射传播光的外围侧上具有第一出射部分，以及用于渗出所述近端的第二出射部分第一出口部和第二出口部以同心方式形成，第一出口部的倾斜角度与第二出口部的倾斜角度不同。

10. 发明授权

US06493091B2 Interference detecting apparatus and tomography apparatus 有权
标题翻译：干涉检测装置及断层摄影装置
公开(公告)号：US06493091B2
公开(公告)日：2002-12-10
申请号：US09784000
申请日：2001-02-16
申请人： Motonobu Kourogi , Motoichi Ohtsu
发明人： Motonobu Kourogi , Motoichi Ohtsu
IPC分类号： G01B902
CPC分类号： G01B9/02008 , G01B9/02002 , G01N21/4795
摘要： Measurement of an internal structure of a sample is performed using interference of light within a short time. Through a first optical frequency comb generator 5 using a first signal having a frequency f1 and generating reference light having a sideband every interval of the frequency f1 and a second optical frequency comb generator 6 using a second signal having a frequency f2 and generating object light having a sideband every interval of the frequency f2, and sweeping of emission timing between the reference light and the object light, by changing a phase difference or frequency difference between the first signal and second signal, and detecting a change in light intensity of the interference light due to the interference, operation of detecting the interference position is made at a high speed.
摘要翻译：样品的内部结构的测量使用光在短时间内的干扰来进行。通过第一光频梳发生器5，使用具有频率f1的第一信号，并且产生具有频率f1的每个间隔的边带的参考光;以及使用具有频率f2的第二信号产生第二光频梳发生器6，并产生具有频带f2的每个间隔的边带，以及通过改变第一信号和第二信号之间的相位差或频率差来扫描参考光和对象光之间的发射定时，以及检测干涉光的光强度的变化由于干扰，高速地进行检测干扰位置的动作。

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