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    • 1. 发明授权
    • Thin-film forming method and thin-film forming apparatus
    • 薄膜形成方法和薄膜形成装置
    • US06447652B1
    • 2002-09-10
    • US09463004
    • 2000-04-05
    • Shunji AmanoHiroshi HayashiRyoichi Hiratsuka
    • Shunji AmanoHiroshi HayashiRyoichi Hiratsuka
    • C23C1434
    • C23C16/52C23C14/547C23C14/562G01N21/65G01N21/8422G01N2021/656G11B5/72G11B5/8408
    • A Raman spectrum of a thin film which must be formed is measured in a thin-film forming step for forming the thin film on a member to be processed in an atmosphere, the pressure of which has been reduced. Moreover, the conditions under which the thin film is formed are controlled in accordance with a result of measurement of the Raman spectrum. At this time, the measurement of the Raman spectrum is continuously performed in an in-line manner while the thin film is being continuously formed on the elongated-sheet-like member to be processed. The measurement of the Raman spectrum is performed while the focal point of a probe of a Raman spectrometer is being controlled with respect to the member to be processed or while the output of a laser beam from the Raman spectrometer is being controlled. The thin film which must be. formed is, for example, a protective film of a magnetic recording medium. The protective film is, for example, a hard carbon film (a DLC film).
    • 必须形成的薄膜的拉曼光谱是在薄膜形成步骤中测量的,该薄膜形成步骤用于在压力被降低的气氛中在待加工的构件上形成薄膜。 此外,根据拉曼光谱的测量结果来控制形成薄膜的条件。 此时,在被处理的细长片状构件上连续地形成薄膜的同时,以直线方式连续进行拉曼光谱的测定。 当拉曼光谱仪的探针的焦点相对于待加工的构件被控制或者来自拉曼光谱仪的激光束的输出被控制时,进行拉曼光谱的测量。 薄膜一定是。 形成例如是磁记录介质的保护膜。 保护膜例如是硬质碳膜(DLC膜)。
    • 10. 发明授权
    • Magnetic recording medium
    • 磁记录介质
    • US07531251B2
    • 2009-05-12
    • US11329668
    • 2006-01-11
    • Ichiro KanagawaKazuhiko SuzukiRyoichi HiratsukaHidetoshi Honda
    • Ichiro KanagawaKazuhiko SuzukiRyoichi HiratsukaHidetoshi Honda
    • G11B5/66
    • G11B5/738G11B5/70G11B5/72G11B5/7305
    • A magnetic recording medium includes a nonmagnetic support having a thickness less than 7 μm and a width of 8 mm; a ferromagnetic metal layer disposed on a surface of the nonmagnetic support; and a reinforcing layer disposed on the other surface of the nonmagnetic support. The magnetic recording medium has a flexural rigidity EI of 5.9×10−8 to 1.3×10−7 N·m (6.0×10−4 to 1.3×10−3 g·cm). The flexural rigidity EI is determined by the following equation: EI=(π/4−2/π)·W·a3/d·b×9.8×10−5 (wherein W is a load that causes an annular test piece having a radius of a cm and a width of b cm which is prepared by cutting a magnetic sheet formed of the magnetic recording medium to undergo a radial displacement d of 0.2πa).
    • 磁记录介质包括厚度小于7μm,宽度为8mm的非磁性载体; 设置在所述非磁性载体的表面上的铁磁金属层; 以及设置在非磁性载体的另一个表面上的加强层。 磁记录介质的抗弯刚度EI为5.9×10 -8〜1.3×10 -7 N.m(6.0×10 -4〜1.3×10 -3 g·cm)。 弯曲刚度EI由以下等式确定:<?in-line-formula description =“In-line formula”end =“lead”?> EI =(pi / 4-2 / pi).Wa3 / d .bx9.8x10-5 <?in-line-formula description =“In-line Formulas”end =“tail”?>(其中W是使半径为cm,宽度为 bcm,其通过切割由磁记录介质形成的磁片来进行径向位移d为0.2pia)。