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    • 1. 发明授权
    • Apparatus for preparing a photoelectromotive force member having a
concentric triplicate conduit for generating active species and
precursor
    • 用于制备具有用于产生活性物质和前体的同心三重管道的光电动势部件的装置
    • US4798167A
    • 1989-01-17
    • US44778
    • 1987-05-01
    • Shunichi IshiharaKeishi SaitoShunri OdaIsamu Shimizu
    • Shunichi IshiharaKeishi SaitoShunri OdaIsamu Shimizu
    • H01L31/04H01L21/20H01L31/075H01L31/20C23C16/50
    • H01L31/202H01L31/075Y02E10/548Y02P70/521Y10S148/169
    • An apparatus for the preparation of a photoelectric conversion layer for a photoelectromotive force member includes:(a) a film-forming chamber having an inner space in which a substrate holder for a substrate is provided;(b) an exhaust pipe connected to the film-forming chamber and through a main valve to an exhaust pump;(c) a concentric triplicate conduit connected through a nozzle to the film-forming chamber. The concentric triplicate conduit includes:(i) an outer passage for introducing a gaseous raw material and formed by a circumferential wall and an inner wall having a plurality of gas liberation holes;(ii) a middle passage for applying microwave energy to said raw material gas to generate an active species and having a mixing region at the downstream side before the nozzle means, and(iii) a central passage situated horizontally within said middle passage (ii) for introducing a gaseous precursor and for transporting the gaseous precursor toward the film-forming chamber and being open at its end positioned in the mixing region leaving a desired distance to the nozzle means; said middle passage (ii) being formed by the inner wall of the outer passage and a circumferential wall of the central psssage (iii).Also included are:(d) a feed pipe for introducing said raw material to said outer passage (i);(e) a microwave power source for generating said microwave energy; and(f) a feed pipe for introducing said gaseous precursor to said central passage (iii).
    • 一种用于制备光电动势部件的光电转换层的装置包括:(a)具有内部空间的成膜室,在该内部空间中设置有用于基板的基板保持器; (b)排气管,其连接到成膜室并通过主阀到排气泵; (c)通过喷嘴连接到成膜室的同心三重导管。 同心三重管道包括:(i)用于引入气态原料并由圆周壁形成的外部通道和具有多个气体释放孔的内壁; (ii)用于向所述原料气体施加微波能量以产生活性物质并且在喷嘴装置之前的下游侧具有混合区域的中间通道,以及(iii)水平地位于所述中间通道(ii)内的中心通道, 用于引入气态前体和用于将气态前驱体输送到成膜室,并且在其位于混合区域的端部处开口,留下到喷嘴装置的期望距离; 所述中间通道(ii)由所述外部通道的内壁和所述中央通道(iii)的周壁形成。 还包括:(d)用于将所述原料引入所述外通道(i)的进料管; (e)用于产生所述微波能量的微波功率源; 和(f)用于将所述气态前体引入所述中心通道(iii)的进料管。
    • 3. 发明授权
    • Process for preparing a functional deposited film
    • 制备功能沉积膜的方法
    • US4803093A
    • 1989-02-07
    • US843236
    • 1986-03-24
    • Shunichi IshiharaKeishi SaitoShunri OdaIsamu Shimizu
    • Shunichi IshiharaKeishi SaitoShunri OdaIsamu Shimizu
    • C23C16/24C08J5/18C23C16/00C23C16/44C23C16/455H01L21/205H01L31/04B05D3/06
    • H01L21/02422H01L21/02532H01L21/02576H01L21/02579H01L21/0262
    • Process for preparing a functional film deposited on a substrate having practically applicable characteristics which is usable as a photoconductive member in semiconductor device, image input line sensor, image pickup device on the like by generating an active species by subjecting a gaseous substance capable of being activated to generate said active species to the action of activating energy in an active species generating and transporting space leading to a film forming space containing the substrate;simultaneously generating a precursor by subjecting a gaseous substance capable of generating said precursor to the action of activating energy in a precursor generating and transporting space located separately from and within the active species generating and transporting space and open in a downstream region of that space; andintroducing the resulting active species and precursor into the film forming space to chemically react to form the functional deposited film on the substrate in the absence of plasma.
    • 用于制备沉积在基板上的功能膜的方法,其具有可用作半导体器件中的感光体的实际应用特性,图像输入线传感器,图像拾取装置等,通过使能够活化的气态物质产生活性物质 以产生所述活性物质以产生和传输空间的活化能的作用,所述活性物质通向含有所述基底的成膜空间; 通过使能够产生所述前体的气态物质在产生和传输空间的活化物质生成和传输空间内的前体产生和传输空间中活化能量的作用同时产生前体,并在该空间的下游区域中开放; 并将所得活性物质和前体引入成膜空间中以在不存在等离子体的情况下在基板上形成功能性沉积膜。
    • 6. 发明授权
    • Method of forming deposited film and method of forming photovoltaic element
    • 形成沉积膜的方法和形成光伏元件的方法
    • US07700165B2
    • 2010-04-20
    • US11627066
    • 2007-01-25
    • Yasuyoshi TakaiMasafumi SanoKeishi Saito
    • Yasuyoshi TakaiMasafumi SanoKeishi Saito
    • H05H1/24
    • C23C16/24C23C16/45523C23C16/545Y02E10/545Y02E10/548
    • Provided is a deposited film containing microcrystalline silicon by plasma CVD, which includes changing at least one of conditions selected from a high frequency power density, a bias voltage with respect to an interelectrode distance, a bias current with respect to an electrode area, a high frequency power with respect to a source gas flow rate, a ratio of a diluting gas flow rate to a source gas flow rate, a substrate temperature, a pressure, and an interelectrode distance, between conditions for forming a deposited film of a microcrystalline region and conditions for forming a deposited film of an amorphous region; and forming a deposited film under conditions within a predetermined range in the vicinity of boundary conditions under which the crystal system of the deposited film substantially changes between a amorphous state and a microcrystalline state.
    • 提供了通过等离子体CVD包含微晶硅的沉积膜,其包括改变选自高频功率密度,相对于电极间距离的偏置电压,相对于电极面积的偏置电流,高电平 用于形成微晶区域的沉积膜的条件和相对于源气体流量的稀释气体流量的比率,稀释气体流量与源气体流量的比率,基板温度,压力和电极间距离 形成非晶区沉积膜的条件; 以及在沉积膜的晶体系统在非晶态和微晶态之间基本上变化的边界条件附近的预定范围内的条件下形成沉积膜。
    • 9. 发明授权
    • Stacked photovoltaic element
    • 堆叠光电元件
    • US06483021B2
    • 2002-11-19
    • US09257259
    • 1999-02-25
    • Keishi Saito
    • Keishi Saito
    • H01L3100
    • H01L31/03685H01L31/03687H01L31/076H01L31/206Y02E10/545Y02E10/548Y02P70/521
    • The present invention provides a stacked photovoltaic element formed by stacking, on a substrate, at least a pin junction constituent element having a microcrystalline semiconductor in an i-type semiconductor layer and a pin junction constituent element having an amorphous semiconductor in an i-type semiconductor layer, wherein a current is controlled by the pin junction constituent element having the microcrystalline semiconductor in the i-type semiconductor layer, thereby obtaining a stacked photovoltaic element with a high photoelectric conversion efficiency and a reduced variation in the photoelectric conversion efficiency for a long light irradiation time.
    • 本发明提供一种层叠的光电元件,其通过在i型半导体中在至少具有微晶半导体的i型半导体层中的至少一个pin结构成元件和具有非晶半导体的pin结构成元件 层,其中电流由在i型半导体层中具有微晶半导体的pin结构成元件控制,从而获得具有高光电转换效率的叠层光伏元件和对于长光的光电转换效率的变化减小 照射时间。