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1. 发明授权

US07629111B2 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US07629111B2
公开(公告)日：2009-12-08
申请号：US10576249
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B41J2/16
CPC分类号： B41J2/1639 , B41J2/1603 , B41J2/1631 , B41J2002/14475 , G03F7/038
摘要： A method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.
摘要翻译：一种制造液体排出头的方法包括以下步骤：在其上布置能量产生元件的衬底上沉积用于形成流路的固体层，以产生用于排出液体的能量，在衬底上形成固体层，用于涂覆固体层的涂层，在固体层上形成的涂层中，通过光刻工艺形成用于排出液体的排出口，并除去固体层，形成连通的流路能量元件和排出口，由此用于涂层的材料含有可阳离子聚合的化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成与部分的边界的固体层的材料其中形成涂层的排出口包含甲基丙烯酸酐和甲基丙烯酸酯的共聚物。

2. 发明申请

US20080008971A1 Cationic Photopolymerizable Epoxy Resin Composition, Minute Structural Member Using the Same and Method for Manufacturing Minute Structural Member 失效
标题翻译：阳离子光聚合环氧树脂组合物，使用该组合物的分钟结构件和制造分钟结构件的方法
公开(公告)号：US20080008971A1
公开(公告)日：2008-01-10
申请号：US11568036
申请日：2005-06-24
申请人： Shoji Shiba , Maki Hatta , Etsuko Hino , Hiroe Ishikura
发明人： Shoji Shiba , Maki Hatta , Etsuko Hino , Hiroe Ishikura
IPC分类号： C08G59/68 , C08F2/46
CPC分类号： G03F7/038 , C08G59/18 , C08G59/40 , G03F7/0045 , G03F7/0046 , G03F7/40
摘要： A cationic photopolymerizable epoxy resin composition includes an epoxy resin, a cationic photopolymerization initiator, an inhibitor of cationic polymerization and a compound that has a fluoroalkyl group and also has a substituent at its terminal, with the substituent being allowed to cross-link react with the epoxy group of the epoxy resin. The cationic photopolymerizable epoxy resin composition further includes a thermal cationic polymerization catalyst.
摘要翻译：阳离子光聚合性环氧树脂组合物包括环氧树脂，阳离子光聚合引发剂，阳离子聚合抑制剂和具有氟烷基并且在其末端具有取代基的化合物，允许取代基与环氧树脂的环氧树脂。阳离子光聚合性环氧树脂组合物还包含热阳离子聚合催化剂。

3. 发明申请

US20060277755A1 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US20060277755A1
公开(公告)日：2006-12-14
申请号：US10565658
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： G03F7/038 , B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2002/14475 , Y10T29/49401
摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer are formed contains a copolymer of methacrylic acid and methacrylate ester.
摘要翻译：根据本发明，液体排出头的制造方法包括以下步骤：在其上布置能量产生元件以产生用于排出液体的能量的基板上形成用于形成流路的固体层; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且除去固体层以形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，与形成涂层的排出口的部分形成边界的固体层包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

4. 发明授权

US08227043B2 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US08227043B2
公开(公告)日：2012-07-24
申请号：US10565658
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B05D1/36 , B05D7/00
CPC分类号： G03F7/038 , B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2002/14475 , Y10T29/49401
摘要： A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.
摘要翻译：一种液体排出头的制造方法，其特征在于，包括以下步骤：在基板上形成固体层，所述基板上配置能量产生元件，以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。用于涂层的材料包含阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，并且与形成涂层的排出口的部分形成边界的固体层的材料包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

5. 发明授权

US07575851B2 Cationic photopolymerizable epoxy resin composition, minute structural member using the same and method for manufacturing minute structural member 失效
标题翻译：阳离子光聚合性环氧树脂组合物，使用该组合物的微小结构体和微小结构体的制造方法
公开(公告)号：US07575851B2
公开(公告)日：2009-08-18
申请号：US11568036
申请日：2005-06-24
申请人： Shoji Shiba , Maki Hatta , Etsuko Hino , Hiroe Ishikura
发明人： Shoji Shiba , Maki Hatta , Etsuko Hino , Hiroe Ishikura
IPC分类号： G03F7/038
CPC分类号： G03F7/038 , C08G59/18 , C08G59/40 , G03F7/0045 , G03F7/0046 , G03F7/40
摘要： A cationic photopolymerizable epoxy resin composition includes an epoxy resin, a cationic photopolymerization initiator, an inhibitor of cationic polymerization and a compound that has a fluoroalkyl group and also has a substituent at its terminal, with the substituent being allowed to cross-link react with the epoxy group of the epoxy resin. The cationic photopolymerizable epoxy resin composition further includes a thermal cationic polymerization catalyst.
摘要翻译：阳离子光聚合性环氧树脂组合物包括环氧树脂，阳离子光聚合引发剂，阳离子聚合抑制剂和具有氟烷基并且在其末端具有取代基的化合物，允许取代基与环氧树脂的环氧树脂。阳离子光聚合性环氧树脂组合物还包含热阳离子聚合催化剂。

6. 发明申请

US20070099121A1 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US20070099121A1
公开(公告)日：2007-05-03
申请号：US10576249
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： G03C5/00
CPC分类号： B41J2/1639 , B41J2/1603 , B41J2/1631 , B41J2002/14475 , G03F7/038
摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and a inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.
摘要翻译：根据本发明，一种液体排出头的制造方法包括以下步骤：在其上布置能量产生元件的基板上沉积形成流路的固体层，以产生用于排出液体的能量，在固体层安装的基板上，涂布固体层的涂层，通过光刻工艺形成用于排出液体的排出口，在固体层上形成的涂层中去除固体层形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子聚合化学化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成固体层的材料与形成涂层的排出口的部分的边界包含甲基丙烯酸酐的共聚物甲基丙烯酸酯和甲基丙烯酸酯。

7. 发明授权

US08017307B2 Method for manufacturing minute structure, method for manufacturing liquid discharge head, and liquid discharge head 有权
标题翻译：微细结构的制造方法，液体排出头的制造方法和排液头
公开(公告)号：US08017307B2
公开(公告)日：2011-09-13
申请号：US10568341
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
IPC分类号： G03F7/20
CPC分类号： B41J2/1603 , B41J2/1404 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1639 , B41J2/1645 , B41J2202/11 , G03F7/095 , Y10T29/49401
摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.
摘要翻译：微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

8. 发明申请

US20070011875A1 Method for manufacturing minute structure, method for manufacturing liquid discharge head, and liquid discharge head 有权
标题翻译：微细结构的制造方法，液体排出头的制造方法和排液头
公开(公告)号：US20070011875A1
公开(公告)日：2007-01-18
申请号：US10568341
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kani , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kani , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Hiroe Ishikura , Akihiko Okano
IPC分类号： B21D53/76
CPC分类号： B41J2/1603 , B41J2/1404 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1639 , B41J2/1645 , B41J2202/11 , G03F7/095 , Y10T29/49401
摘要： A method for manufacturing a minute structure comprises a step of forming an ionizing radiation decomposing type positive type resist layer including a methyl isopropenyl ketone as a first positive type photosensitive material layer, a step of forming an ionizing radiation decomposing type positive type resist layer including a photosensitive material of a copolymer as a second positive type photosensitive material layer to be sensitized by an ionizing radiation of a second wavelength range on the first positive type photosensitive material layer, a step of forming a desired pattern in the above-mentioned second positive type photosensitive material layer, and development using a developing solution, and then, a step of forming a desired pattern in the above-mentioned first positive type photosensitive material layer to form a convex shape pattern.
摘要翻译：微细结构体的制造方法包括形成电离辐射分解型正型抗蚀剂层的步骤，该电离辐射分解型正型抗蚀剂层包括甲基异丙烯基酮作为第一正型感光材料层，形成电离辐射分解型正型抗蚀剂层的步骤包括作为通过第一正型感光材料层上的第二波长范围的电离辐射致敏的作为第二正型感光材料层的共聚物的感光材料，在上述第二正型感光材料层中形成所需图案的步骤材料层和使用显影溶液的显影，然后，在上述第一正型感光材料层中形成所需图案以形成凸形图案的步骤。

9. 发明授权

US07389585B2 Method of manufacturing a liquid discharging head 失效
标题翻译：液体排放头的制造方法
公开(公告)号：US07389585B2
公开(公告)日：2008-06-24
申请号：US11285058
申请日：2005-11-23
申请人： Tamaki Sato , Maki Hatta , Kazuhiro Asai , Takumi Suzuki
发明人： Tamaki Sato , Maki Hatta , Kazuhiro Asai , Takumi Suzuki
IPC分类号： B21D53/76 , G03C5/56
CPC分类号： B41J2/1603 , B41J2/1639 , Y10T29/49401
摘要： A method for forming an ink jet recording head includes at least a step of forming an ink flow path pattern on a substrate by a photodecomposable positive type resist resin, a step of, once executing each of the steps of applying, exposing and baking thereon a nozzle-constituting resin layer which is a negative type resist containing an optical cation polymerization starting agent and having an epoxy resin as a chief component with respect to each of an ink flow path pattern and an ink discharge port pattern, collectively developing unexposed portions on the respective nozzle-constituting resin layers, and a step of removing the formed photodecomposable resin is minimized.
摘要翻译：形成喷墨记录头的方法至少包括通过可光分解的正型抗蚀剂树脂在基底上形成油墨流路图案的步骤，一旦执行在其上施加，曝光和烘烤的每个步骤喷墨构成树脂层，其是含有光学阳离子聚合起始剂并且具有环氧树脂作为墨水流路图案和墨水排出口图案中的每一个的主要成分的负型抗蚀剂，共同显影未曝光部分各个喷嘴构成树脂层，以及去除所形成的可光分解树脂的步骤。

10. 发明申请

US20060127813A1 Pattern forming method and method of manufacturing ink jet recording head 有权
标题翻译：图案形成方法和制造喷墨记录头的方法
公开(公告)号：US20060127813A1
公开(公告)日：2006-06-15
申请号：US11295553
申请日：2005-12-07
申请人： Norio Ohkuma , Hikaru Ueda , Maki Hatta , Masaki Ohsumi , Takayuki Ono
发明人： Norio Ohkuma , Hikaru Ueda , Maki Hatta , Masaki Ohsumi , Takayuki Ono
IPC分类号： B05D5/00
CPC分类号： G03F7/168 , B41J2/1603 , B41J2/1631 , B41J2/1645
摘要： The present invention has as its object to provide a pattern forming method which, even if a pattern is formed by photolithography, can keep the edge of the opening portion of the pattern in a sharp state and yet, can make the wall surface of the recess of the pattern into a tapered shape, and a method of manufacturing an ink jet recording head to which the aforedescribed method is applied. The pattern forming method is a pattern forming method having the step of forming on a substrate a coat resin layer containing a photopolymerizable resin, the step of applying a solution containing a photopolymerization starting agent onto the coat resin layer, and forming the distribution of the density of the photopolymerization starting agent in the direction of film thickness of the coat resin layer, and the step of applying light from above the coat resin layer through a mask having a pattern depicted thereon, and the step of developing the coat resin layer to which the light has been applied to thereby make it into a coat resin layer having the pattern, and this method is applied to the manufacture of an ink jet recording head.
摘要翻译：本发明的目的是提供一种图案形成方法，即使通过光刻形成图案，也可以将图案的开口部的边缘保持在尖锐状态，而且可以使凹部的壁面的图案形成锥形，以及制造应用了上述方法的喷墨记录头的方法。图案形成方法是具有在基板上形成包含光聚合性树脂的涂层树脂层的步骤的图案形成方法，将含有光聚合起始剂的溶液涂布在涂布树脂层上，形成密度分布的光聚合起始剂，并且通过具有图案的掩模从涂布树脂层上方施加光的工序，以及使涂膜树脂层的显影步骤已经施加了光，从而使其成为具有图案的涂层树脂层，并且该方法被应用于喷墨记录头的制造。

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