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1. 发明授权

US07598826B2 Piezoelectric thin film device having a drive section with a weighted portion 有权
标题翻译：具有具有加权部分的驱动部分的压电薄膜装置
公开(公告)号：US07598826B2
公开(公告)日：2009-10-06
申请号：US11681346
申请日：2007-03-02
申请人： Shoichiro Yamaguchi , Yukihisa Osugi , Tomoyoshi Tai , Masahiro Sakai
发明人： Shoichiro Yamaguchi , Yukihisa Osugi , Tomoyoshi Tai , Masahiro Sakai
IPC分类号： H03H9/13 , H03H9/15 , H03H9/54
CPC分类号： H03H9/02094 , H03H3/02 , H03H9/02118 , H03H9/13 , H03H9/132 , H03H9/173 , H03H9/587 , H03H2003/021
摘要： There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness.A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.
摘要翻译：提供了一种压电薄膜器件，其频率阻抗特性不容易受到伪影。薄膜体声波谐振器具有这样的构造，其中粘合层，下电极，压电薄膜和上电极依次层叠在支撑基板上。上电极的驱动部分和下电极的驱动部分彼此相对，压电薄膜夹在它们之间。相应的驱动部分具有细长的二维形状，其纵向方向的大小不小于其宽度方向上的大小的两倍，更期望的是四倍，并且进一步期望的十倍。

2. 发明申请

US20070210878A1 PIEZOELECTRIC THIN FILM DEVICE 有权
标题翻译：压电薄膜器件
公开(公告)号：US20070210878A1
公开(公告)日：2007-09-13
申请号：US11681346
申请日：2007-03-02
申请人： Shoichiro YAMAGUCHI , Yukihisa Osugi , Tomoyoshi Tai , Masahiro Sakai
发明人： Shoichiro YAMAGUCHI , Yukihisa Osugi , Tomoyoshi Tai , Masahiro Sakai
IPC分类号： H03H9/54
CPC分类号： H03H9/02094 , H03H3/02 , H03H9/02118 , H03H9/13 , H03H9/132 , H03H9/173 , H03H9/587 , H03H2003/021
摘要： There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness.A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.
摘要翻译：提供了一种压电薄膜器件，其频率阻抗特性不容易受到伪影。薄膜体声波谐振器具有这样的构造，其中粘合层，下电极，压电薄膜和上电极依次层叠在支撑基板上。上电极的驱动部分和下电极的驱动部分彼此相对，压电薄膜夹在它们之间。相应的驱动部分具有细长的二维形状，其纵向方向的大小不小于其宽度方向上的大小的两倍，更期望的是四倍，并且进一步期望的十倍。

3. 发明申请

US20070210877A1 PIEZOELECTRIC THIN FILM DEVICE 有权
标题翻译：压电薄膜器件
公开(公告)号：US20070210877A1
公开(公告)日：2007-09-13
申请号：US11681324
申请日：2007-03-02
申请人： Yukihisa Osugi , Shoichiro Yamaguchi , Tomoyoshi Tai
发明人： Yukihisa Osugi , Shoichiro Yamaguchi , Tomoyoshi Tai
IPC分类号： H03H9/54
CPC分类号： H03H9/02094 , H03H3/02 , H03H9/132 , H03H9/173 , H03H9/564 , H03H9/568 , H03H2003/021 , H03H2003/0457
摘要： An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness.In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.
摘要翻译：本发明的目的是提供一种压电薄膜器件，其包括单个或多个膜体声波谐振器，其中频率阻抗特性不容易受到虚假的影响。在膜体声波谐振器中，压电薄膜通过粘合剂层由支撑基板支撑。在压电薄膜的上表面和下表面上形成具有预定图案的上电极和下电极。此外，在压电薄膜的上表面上，叠加在上电极上形成用于向激励区域的外侧添加质量的附加膜。

4. 发明授权

US07609133B2 Piezoelectric thin film device having an additional film outside an excitation region 有权
标题翻译：在激发区域外具有附加膜的压电薄膜器件
公开(公告)号：US07609133B2
公开(公告)日：2009-10-27
申请号：US11681324
申请日：2007-03-02
申请人： Yukihisa Osugi , Shoichiro Yamaguchi , Tomoyoshi Tai
发明人： Yukihisa Osugi , Shoichiro Yamaguchi , Tomoyoshi Tai
IPC分类号： H03H9/15 , H03H9/54
CPC分类号： H03H9/02094 , H03H3/02 , H03H9/132 , H03H9/173 , H03H9/564 , H03H9/568 , H03H2003/021 , H03H2003/0457
摘要： An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.
摘要翻译：本发明的目的是提供一种压电薄膜器件，其包括单个或多个膜体声波谐振器，其中频率阻抗特性不容易受到虚假的影响。在膜体声波谐振器中，压电薄膜通过粘合剂层由支撑基板支撑。在压电薄膜的上表面和下表面上形成具有预定图案的上电极和下电极。此外，在压电薄膜的上表面上，叠加在上电极上形成用于向激励区域的外侧添加质量的附加膜。

5. 发明授权

US07965015B2 Lamb wave device 有权
标题翻译：兰波装置
公开(公告)号：US07965015B2
公开(公告)日：2011-06-21
申请号：US12618914
申请日：2009-11-16
申请人： Tomoyoshi Tai , Masahiro Sakai , Yukihisa Ohsugi
发明人： Tomoyoshi Tai , Masahiro Sakai , Yukihisa Ohsugi
IPC分类号： H01L41/08
CPC分类号： H03H9/02574 , H03H9/02228
摘要： There is provided a lamb wave device with small variations in frequency, the device including: a piezoelectric thin film; an IDT electrode which is provided on a main surface of the piezoelectric thin film; and a support structure which supports a laminate of the IDT electrode and the piezoelectric thin film, and is formed with a cavity that isolates the laminate, wherein a film thickness h of the piezoelectric thin film and a pitch p of a finger of the IDT electrode are selected such that a lamb wave is excited at a target frequency, the lamb wave making dispersibility of a sonic velocity v with respect to the film thickness h of the piezoelectric thin film small.
摘要翻译：提供了一种频率变化小的兰姆波装置，该装置包括：压电薄膜; 设置在压电薄膜的主表面上的IDT电极; 以及支撑结构，其支撑IDT电极和压电薄膜的层叠体，并且形成有隔离层压体的空腔，其中压电薄膜的膜厚度h和IDT电极的手指的间距p 被选择为使得在目标频率下激发羊羔波，相对于压电薄膜的膜厚度h的声速v的分散性较小。

6. 发明授权

US08436306B2 Pyroelectric element 有权
标题翻译：热电元件
公开(公告)号：US08436306B2
公开(公告)日：2013-05-07
申请号：US13638048
申请日：2011-10-20
申请人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
发明人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
IPC分类号： G01J5/00
CPC分类号： H01L37/02 , G01J5/0225 , G01J5/024 , G01J5/34 , H01L37/025
摘要： A pyroelectric element includes a pyroelectric substrate being a substrate of lithium tantalate single crystal having an X-axis, a Y-axis, and a Z-axis as crystal axes; front-side electrodes disposed on a front side of the pyroelectric substrate; and back-side electrodes paired with the front-side electrodes, respectively. The pyroelectric substrate is a Y-offcut plate obtained by cutting the lithium tantalate single crystal at an angle turned by a cut angle θ from the Y-axis toward the Z-axis about the X-axis that coincides with a direction along the electrode plane, and the cut angle θ is 30° to 60° or 120° to 150°. The pyroelectric substrate is preferably 10 μm or less in thickness, and is more preferably 5 μm to 10 μm in thickness.
摘要翻译：热电元件包括作为晶轴的具有X轴，Y轴和Z轴的钽酸锂单晶的衬底的热电衬底; 设置在所述热电基板的前侧的前侧电极; 和与前侧电极配对的背面电极。热电基板是通过以与沿着电极平面的方向一致的X轴方向从Y轴朝向Z轴的角度θ切割钽酸锂单晶而获得的Y断开板，切角θ为30°至60°或120°至150°。热电基板的厚度优选为10μm以下，更优选为5μm〜10μm。

7. 发明申请

US20130015353A1 Pyroelectric Element and Method for Manufacturing the Same 有权
标题翻译：热电元件及其制造方法
公开(公告)号：US20130015353A1
公开(公告)日：2013-01-17
申请号：US13637717
申请日：2012-02-16
申请人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
发明人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
IPC分类号： G01J5/10
CPC分类号： H01L37/02 , G01J5/0225 , G01J5/024 , G01J5/34 , H01L37/025
摘要： A pyroelectric element includes a pyroelectric substrate; a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion; and a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion. Since the pyroelectric substrate warps in a cavity-facing region opposite a cavity, the light-receiving area of the light-receiving sections is greater than that in the case where there is no warp. It is thus possible to improve detection sensitivity of the pyroelectric element without making the size of the pyroelectric element larger than that in the case where there is no warp.
摘要翻译：热电元件包括热电基板; 由正面电极，背面电极和受光部分组成的光接收部分; 以及由正面电极，背面电极和受光部分组成的光接收部分。由于热电衬底在与空腔相对的面向腔的区域中翘曲，所以光接收部分的光接收面积大于不存在翘曲的情况。因此，可以提高热电元件的检测灵敏度，而不会使热电元件的尺寸大于不存在翘曲的情况。

8. 发明授权

US09070547B2 Composite substrate and method for manufacturing composite substrate 有权
标题翻译：复合基板及复合基板的制造方法
公开(公告)号：US09070547B2
公开(公告)日：2015-06-30
申请号：US13295542
申请日：2011-11-14
申请人： Tomoyoshi Tai , Yuji Hori
发明人： Tomoyoshi Tai , Yuji Hori
IPC分类号： H01L21/30 , H01L21/46 , H01L21/02 , H01L21/265 , H01L21/762 , H01L33/00 , H01S5/02 , H01S5/323
CPC分类号： H01L21/02002 , H01L21/2654 , H01L21/76254 , H01L33/007 , H01L2924/0002 , H01S5/0206 , H01S5/32341 , H01L2924/00
摘要： A metal film is formed on at least a surface of a second substrate composed of ceramic (step c), and a first substrate composed of a group nitride is bonded to the second substrate through the metal film (step d). Since the metal film generally has higher thermal conductivity than oxide films, a composite substrate having high heat dissipation can be produced as compared with a case where the first substrate is bonded to the second substrate through an oxide film. In addition, a step of out diffusion is not required because of nonuse of an oxide film, thereby simplifying the process.
摘要翻译：在由陶瓷（步骤c）构成的第二基板的至少一个表面上形成金属膜，通过金属膜将由氮化物构成的第一基板接合到第二基板（步骤d）。由于金属膜通常具有比氧化膜更高的热导率，所以与第一衬底通过氧化膜结合到第二衬底的情况相比，可以制造具有高散热性的复合衬底。此外，由于不使用氧化膜，不需要扩散步骤，从而简化了工艺。

9. 发明授权

US08754373B2 Pyroelectric element and method for manufacturing the same 有权
标题翻译：热电元件及其制造方法
公开(公告)号：US08754373B2
公开(公告)日：2014-06-17
申请号：US13637717
申请日：2012-02-16
申请人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
发明人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
IPC分类号： G01J5/00
CPC分类号： H01L37/02 , G01J5/0225 , G01J5/024 , G01J5/34 , H01L37/025
摘要： A pyroelectric element includes a pyroelectric substrate; a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion; and a light-receiving section composed of a front-side electrode, a back-side electrode, and a light-receiving portion. Since the pyroelectric substrate warps in a cavity-facing region opposite a cavity, the light-receiving area of the light-receiving sections is greater than that in the case where there is no warp. It is thus possible to improve detection sensitivity of the pyroelectric element without making the size of the pyroelectric element larger than that in the case where there is no warp.
摘要翻译：热电元件包括热电基板; 由正面电极，背面电极和受光部分组成的光接收部分; 以及由正面电极，背面电极和受光部分组成的光接收部分。由于热电衬底在与空腔相对的面向腔的区域中翘曲，所以光接收部分的光接收面积大于不存在翘曲的情况。因此，可以提高热电元件的检测灵敏度，而不会使热电元件的尺寸大于不存在翘曲的情况。

10. 发明申请

US20130020484A1 Pyroelectric Element 有权
标题翻译：热电元件
公开(公告)号：US20130020484A1
公开(公告)日：2013-01-24
申请号：US13638048
申请日：2011-10-20
申请人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
发明人： Tomoyoshi Tai , Kenji Suzuki , Jungo Kondo
IPC分类号： G01J5/02
CPC分类号： H01L37/02 , G01J5/0225 , G01J5/024 , G01J5/34 , H01L37/025
摘要： A pyroelectric element includes a pyroelectric substrate being a substrate of lithium tantalate single crystal having an X-axis, a Y-axis, and a Z-axis as crystal axes; front-side electrodes disposed on a front side of the pyroelectric substrate; and back-side electrodes paired with the front-side electrodes, respectively. The pyroelectric substrate is a Y-offcut plate obtained by cutting the lithium tantalate single crystal at an angle turned by a cut angle θ from the Y-axis toward the Z-axis about the X-axis that coincides with a direction along the electrode plane, and the cut angle θ is 30° to 60° or 120° to 150°. The pyroelectric substrate is preferably 10 μm or less in thickness, and is more preferably 5 μm to 10 μm in thickness.
摘要翻译：热电元件包括作为晶轴的具有X轴，Y轴和Z轴的钽酸锂单晶的衬底的热电衬底; 设置在所述热电基板的前侧的前侧电极; 和与前侧电极配对的背面电极。热电基板是通过以切割角度折射的角度切割钽酸锂单晶获得的Y断开板; 从Y轴向Z轴绕X轴方向与电极平面方向一致，切割角度与θ轴方向一致; 为30°至60°或120°至150°。热电基板的厚度优选为10μm以下，更优选为5μm〜10μm。

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