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    • 1. 发明授权
    • High-throughput direct-write electron-beam exposure system and method
    • 高通量直写电子束曝光系统及方法
    • US5969362A
    • 1999-10-19
    • US30653
    • 1998-02-05
    • Shintaro KawataKazuya Okamoto
    • Shintaro KawataKazuya Okamoto
    • H01J37/073H01J37/305H01J37/317H01J37/30H01J37/14
    • B82Y10/00B82Y40/00H01J37/3177
    • An electron-beam exposure system includes: (1) a stage for supporting a wafer, (2) a planar electron-beam source that emits multiple electron beamlets toward the stage, (3) an electric-field generator for forming an electric field to accelerate the electrons in the electron beamlets, (4) a magnetic-field generator for forming a magnetic flux in the space between the planar electron-beam source and the wafer stage. The magnetic filed generator is structured and arranged such that the magnetic flux formed thereby is (1) substantially evenly distributed within a plane perpendicular to the optical axis, and (2) of increasing flux density, ranging from a first density in the vicinity of the planar electron-beam source, to a second density (greater than the first density) in the vicinity of the wafer stage. The electrons in the electron beamlets follow the lines of magnetic flux such that the beamlet width is decreased at the stage compared to the beamlet width at the planar electron-beam source. The electron beamlets are preferably individually switchable, on and off, by word lines and bit lines on the planar electron-beam source. To form a desired pattern on a wafer surface, the stage is moved through a small area, while the electron beamlets are modulated as needed to write the desired pattern.
    • 电子束曝光系统包括:(1)用于支撑晶片的台,(2)朝向平台发射多个电子束的平面电子束源,(3)用于形成电场的电场发生器 加速电子束中的电子,(4)用于在平面电子束源和晶片台之间的空间中形成磁通量的磁场发生器。 磁场发生器的结构和布置使得由此形成的磁通量是(1)在垂直于光轴的平面内基本上均匀分布,以及(2)增加磁通密度,范围从第 平面电子束源在晶片台附近达到第二密度(大于第一密度)。 电子束中的电子遵循磁通线,使得在与平面电子束源处的子束宽度相比较的阶段,子束宽度减小。 电子子束优选地可以通过平面电子束源上的字线和位线单独地切换,打开和关闭。 为了在晶片表面上形成期望的图案,将载物台移动通过小的区域,同时根据需要对电子束进行调制以写入期望的图案。
    • 3. 发明授权
    • Magnetic resonance imaging apparatus having controller that sets carrier frequencies outside detected interference bands
    • 具有控制器的磁共振成像设备,其将载波频率设置在检测到的干扰频带
    • US08643362B2
    • 2014-02-04
    • US13048314
    • 2011-03-15
    • Takahiro SekiguchiKoji AkitaToshiyuki NakanishiKazuya OkamotoSojuro Kato
    • Takahiro SekiguchiKoji AkitaToshiyuki NakanishiKazuya OkamotoSojuro Kato
    • G01R33/44
    • G01R33/3692G01R33/3607
    • According to one embodiment, a apparatus includes a coil, a clock generator, an echo transmitter, a carrier generator, a clock transmitter, a regenerator, an receiver, a reconstructor, a detector, and a controller. The echo transmitter generates and transmits an echo transmission signal synchronously with a clock signal generated by the clock generator to wirelessly transmit an echo signal output from the col. The carrier generator generates a carrier signal have a frequency within a variable range. The clock transmitter wirelessly transmits a clock transmission signal. The regenerator regenerates the clock signal based on the transmitted clock transmission signal. The receiver extracts the echo signal synchronously with the regenerated clock signal from the transmitted echo transmission signal. The detector detects a frequency of an interference wave. The controller controls the carrier generator to generate the carrier signal having a frequency which comparatively small interference with respect to the detected frequency.
    • 根据一个实施例,一种装置包括线圈,时钟发生器,回波发射器,载波发生器,时钟发射器,再生器,接收器,重建器,检测器和控制器。 回波发射机与由时钟发生器产生的时钟信号同步地生成和发送回波发送信号,以无线地发送从该列输出的回波信号。 载波发生器产生具有可变范围内的频率的载波信号。 时钟发射机无线传输时钟传输信号。 再生器基于发送的时钟传输信号再生时钟信号。 接收机从发送的回波发送信号中与再生的时钟信号同步地提取回波信号。 检测器检测到干扰波的频率。 控制器控制载波发生器以产生具有相对于检测到的频率具有相对小的干扰的频率的载波信号。
    • 6. 发明授权
    • Stacking apparatus and method for stacking integrated circuit elements
    • 用于堆叠集成电路元件的堆叠装置和方法
    • US08129201B2
    • 2012-03-06
    • US12230095
    • 2008-08-22
    • Kazuya Okamoto
    • Kazuya Okamoto
    • H01L21/00
    • H01L21/68H01L21/67253H01L21/67259H01L25/0657H01L25/50H01L2924/0002Y10S438/975H01L2924/00
    • A stacking apparatus that stacks chip assemblies each having a plurality of chips disposed continuously with circuit patterns and electrodes, includes: a plurality of stages each allowed to move arbitrarily, on which the chip assemblies are placed; a storage unit that stores an estimated extent of change in a position of an electrode at each chip, expected to occur as heat is applied to the chip assemblies placed on the plurality of stages during a stacking process; and a control unit that sets positions of the plurality of stages to be assumed relative to each other during the stacking process based upon the estimated extent of change in the position of the electrode at each chip provided from the storage unit and position information indicating positions of individual chips formed at the chip assemblies and controls at least one of the plurality of stages.
    • 堆叠装置,其堆叠各自具有与电路图案和电极连续布置的多个芯片的芯片组件,包括:允许任意移动的多个级,其上放置芯片组件; 存储单元,其存储在堆叠处理期间当放置在所述多个级上的所述芯片组件施加热量时期望发生的每个芯片处的电极的位置的估计变化范围; 以及控制单元,其基于从所述存储单元提供的每个芯片处的所述电极的所述位置的估计的变化范围和所述位置信息,所述控制单元在所述堆叠处理期间设定要相对于彼此假设的所述多个级的位置, 在芯片组件处形成的单个芯片并且控制多个级中的至少一个级。
    • 7. 发明授权
    • Manifold solenoid valve
    • 歧管电磁阀
    • US08061379B2
    • 2011-11-22
    • US12392210
    • 2009-02-25
    • Jouji InabaKazuya Okamoto
    • Jouji InabaKazuya Okamoto
    • F15B13/00
    • F16K27/003F15B13/0839F16K31/426Y10T137/5283Y10T137/86614Y10T137/87885
    • A plurality of valve assemblies are provided to a base, and an air-supply flow path for supplying compressed air to each valve assembly is formed in the base. A main flow path communicating with the air-supply flow path and communicating with a pilot air-supply flow path is formed in an air supply block. When the compressed air is supplied to the air-supply flow path and the pilot air-supply flow path from the main flow path, a manifold solenoid valve becomes an internal pilot type. An external pilot flow path communicating with the pilot air-supply flow path is formed in an external pilot block, and when the external pilot block is provided, communication between the main flow path and the pilot air-supply flow path is shut off, and the manifold solenoid valve becomes an external pilot type in which the pilot pressure is supplied from the external pilot flow path.
    • 多个阀组件设置在底座上,在基座上形成用于向每个阀组件供给压缩空气的供气流路。 在空气供应块中形成有与供气流路连通并与先导供气流路连通的主流路。 当压缩空气从主流路向供气流路和先导供气流路供给时,歧管电磁阀成为内部先导式。 在外部先导块中形成有与先导供气流路连通的外部先导流路,当设置外部先导块时,主流路与先导供气流路之间的连通被切断, 歧管电磁阀成为从外部先导流路供给先导压力的外部先导式。