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    • 8. 发明授权
    • Method of detecting protrusion of inspection object from palette and method of fabricating semiconductor device
    • 从调色板检测检查对象的突起的方法和制造半导体器件的方法
    • US06955264B2
    • 2005-10-18
    • US10145154
    • 2002-05-15
    • Toshiya IjichiShinji Semba
    • Toshiya IjichiShinji Semba
    • G01R31/26G01N21/956B07C5/00
    • G01N21/956
    • In order to provide a method of detecting protrusion of an inspection object from a palette improved to be capable of making highly precise detection and reducing a socket breakage ratio, an inspection object is introduced into each of a plurality of pockets provided on the surface of a palette, which in turn is transported. A reflection level of the inspection object stored in each of the plurality of pockets is measured every palette with a reflection type photoelectric sensor. The maximum value and the minimum value of the reflection level are obtained from data of every palette, for calculating a dispersion width defined by the difference between the maximum value and the minimum value. The dispersion width is compared with a previously set determination threshold, for determining whether or not the dispersion width is greater than the determination threshold.
    • 为了提供一种检测检查对象从调色板突出的方法,其能够进行高精度检测和减小插座断裂率,将检查对象引入到设置在 调色板,反过来被运输。 每个调色板用反射型光电传感器测量存储在多个凹穴中的每一个中的检查对象的反射水平。 从每个调色板的数据获得反射电平的最大值和最小值,用于计算由最大值和最小值之间的差定义的色散宽度。 将色散宽度与先前设置的确定阈值进行比较,以确定色散宽度是否大于确定阈值。