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    • 1. 发明授权
    • Film forming system and film forming method
    • 成膜系统和成膜方法
    • US07935185B2
    • 2011-05-03
    • US11229841
    • 2005-09-20
    • Shinji MiyazakiHiroki Fukushima
    • Shinji MiyazakiHiroki Fukushima
    • C23C16/00F27D3/12
    • C23C16/4405Y10S414/137Y10S414/138Y10S414/14
    • A clean gas circulates to pass through a loading area provided below a vertical heat treatment furnace. The clean gas unidirectionally flows through the loading area. After completion of wafer processing, a wafer boat lowers from the heat treatment furnace to the loading area, where the wafers are removed from the wafer boat. Subsequently, a clean gas jetting nozzle arranged in the loading area jets a clean gas toward the emptied wafer boat. Fragment of thin film which may readily peel off are blown away from the wafer boat, and are discharged out of the loading area together with the unidirectional flow. Thus, it is possible to avoid wafer contamination due to the unexpected peel-off of thin film fragments from the wafer boat.
    • 清洁气体循环通过垂直热处理炉下方的装载区域。 清洁气体单向流过装载区域。 在晶片处理完成之后,晶片舟从热处理炉降低到从晶片舟皿移除晶片的装载区域。 随后,布置在装载区域中的清洁气体喷射喷嘴将清洁气体朝排空的晶片舟喷射。 容易剥离的薄膜碎片从晶舟上吹走,并与单向流一起排出装载区域。 因此,可以避免由于来自晶片舟皿的薄膜碎片的意外剥离而造成的晶片污染。
    • 2. 发明申请
    • Film forming system and film forming method
    • 成膜系统和成膜方法
    • US20060081181A1
    • 2006-04-20
    • US11229841
    • 2005-09-20
    • Shinji MiyazakiHiroki Fukushima
    • Shinji MiyazakiHiroki Fukushima
    • C23C16/00
    • C23C16/4405Y10S414/137Y10S414/138Y10S414/14
    • A clean gas circulates to pass through a loading area provided below a vertical heat treatment furnace. The clean gas unidirectionally flows through the loading area. After completion of wafer processing, a wafer boat lowers from the heat treatment furnace to the loading area, where the wafers are removed from the wafer boat. Subsequently, a clean gas jetting nozzle arranged in the loading area jets a clean gas toward the emptied wafer boat. Fragment of thin film which may readily peel off are blown away from the wafer boat, and are discharged out of the loading area together with the unidirectional flow. Thus, it is possible to avoid wafer contamination due to the unexpected peel-off of thin film fragments from the wafer boat.
    • 清洁气体循环通过垂直热处理炉下方的装载区域。 清洁气体单向流过装载区域。 在晶片处理完成之后,晶片舟从热处理炉降低到从晶片舟皿移除晶片的装载区域。 随后,布置在装载区域中的清洁气体喷射喷嘴将清洁气体朝排空的晶片舟喷射。 容易剥离的薄膜碎片从晶舟上吹走,并与单向流一起排出装载区域。 因此,可以避免由于来自晶片舟皿的薄膜碎片的意外剥离而造成的晶片污染。
    • 4. 发明授权
    • Data access method and data access device
    • 数据访问方式和数据访问设备
    • US08321641B2
    • 2012-11-27
    • US12350872
    • 2009-01-08
    • Hiroki Fukushima
    • Hiroki Fukushima
    • G06F12/02
    • G06F17/30
    • A recording medium has a real data area built from a plurality of clusters and a fat (File Allocation Table) built from a plurality of entries showing usage conditions of the corresponding clusters. A control unit previously divides the fat into a plurality of blocks and creates, in RAM, a search table, at each block, showing presence or absence of an entry (unassigned entry) corresponding to an unassigned cluster. When data are written into the recording medium, the position of a block including an unassigned entry is located on the basis of the search table. Subsequently, the block is read in RAM, thereby locating the position of the unassigned cluster. Data are written in the thus-located cluster.
    • 记录介质具有从多个集群构建的实际数据区域和由表示对应的集群的使用条件的多个条目构建的胖(文件分配表)。 控制单元先前将脂肪划分成多个块,并在RAM中创建一个搜索表,在每个块处显示与未分配簇相对应的条目(未分配条目)的存在或不存在。 当数据被写入记录介质时,包括未分配条目的块的位置位于搜索表的基础上。 随后,块被读入RAM中,从而定位未分配簇的位置。 数据写在如此定位的集群中。
    • 5. 发明申请
    • FACILITIES CONTROL DEVICE AND FACILITIES CONTROL METHOD
    • 设备控制设备和设备控制方法
    • US20100324700A1
    • 2010-12-23
    • US12817305
    • 2010-06-17
    • Hiroki Fukushima
    • Hiroki Fukushima
    • G05B11/01
    • G05B9/02G05B23/0235
    • A facilities control device includes control point acquiring means for acquiring control point data for monitoring and controlling the operation of the facilities equipment; monitoring interval setting means for setting monitoring intervals depending on the types of the control point data; control point data monitoring means for comparing the previous-cycle value and the present-cycle value of control point data to monitor whether or not there has been a change within the monitoring interval; and monitoring result notifying means for providing notification in the event that that there is a determination that there has been no change in control point data within the monitoring interval.
    • 设备控制装置包括控制点获取装置,用于获取用于监视和控制设备设备的操作的控制点数据; 监视间隔设定单元,其根据控制点数据的种类设定监视间隔; 控制点数据监视装置,用于比较控制点数据的前一周期值和当前周期值,以监视监视间隔内是否发生变化; 以及监视结果通知装置,用于在所述监视间隔内存在控制点数据的变化确定的情况下提供通知。
    • 6. 发明申请
    • OVERDUBBING DEVICE
    • 超音速装置
    • US20090178541A1
    • 2009-07-16
    • US12350162
    • 2009-01-07
    • Hiroki FukushimaShigeyuki Adachi
    • Hiroki FukushimaShigeyuki Adachi
    • G10H7/00H04B1/00
    • G11B27/036
    • A CPU of an overdubbing device plays back a music file recorded in a memory card of the device and outputs the file as a played-back audio signal while mixing the played-back audio signal with an external audio signal input from the outside, to thus perform overdubbing. A music file recorded through overdubbing last time is automatically set as a playback music file for the next time, and a selected state of means for selecting execution/nonexecution of overdubbing is maintained as the state of execution. As a result, overdubbing is enabled by twice operations of a record key, whereby the operation is made identical with operation performed during ordinary recording. Further, playback is performed by changing either playback speed or musical interval of the playback music file.
    • 超频装置的CPU重放记录在设备的存储卡中的音乐文件,并将该文件作为回放音频信号输出,同时将回放音频信号与从外部输入的外部音频信号混合,从而 执行overdubbing。 通过上次叠加记录的音乐文件被自动设置为下一次的播放音乐文件,并且保持用于选择执行/不执行超限的装置的选择状态作为执行状态。 结果,通过记录键的两次操作来实现叠加,从而使操作与在普通记录期间执行的操作相同。 此外,通过改变播放音乐文件的播放速度或音乐间隔来执行播放。
    • 8. 发明授权
    • Overdubbing device
    • 叠加装置
    • US07977563B2
    • 2011-07-12
    • US12350162
    • 2009-01-07
    • Hiroki FukushimaShigeyuki Adachi
    • Hiroki FukushimaShigeyuki Adachi
    • G10H1/08
    • G11B27/036
    • A CPU of an overdubbing device plays back a music file recorded in a memory card of the device and outputs the file as a played-back audio signal while mixing the played-back audio signal with an external audio signal input from the outside, to thus perform overdubbing. A music file recorded through overdubbing last time is automatically set as a playback music file for the next time, and a selected state of means for selecting execution/nonexecution of overdubbing is maintained as the state of execution. As a result, overdubbing is enabled by twice operations of a record key, whereby the operation is made identical with operation performed during ordinary recording. Further, playback is performed by changing either playback speed or musical interval of the playback music file.
    • 超频装置的CPU重放记录在设备的存储卡中的音乐文件,并将该文件作为回放音频信号输出,同时将回放音频信号与从外部输入的外部音频信号混合,从而 执行overdubbing。 通过上次叠加记录的音乐文件被自动设置为下一次的播放音乐文件,并且保持用于选择执行/不执行超限的装置的选择状态作为执行状态。 结果,通过记录键的两次操作来实现叠加,从而使操作与在普通记录期间执行的操作相同。 此外,通过改变回放音乐文件的播放速度或音乐间隔来执行回放。
    • 10. 发明授权
    • Enhanced recording operation in an overdubbing device
    • 在超频设备中增强录音操作
    • US08173885B2
    • 2012-05-08
    • US12349475
    • 2009-01-06
    • Hiroki FukushimaShigeyuki Adachi
    • Hiroki FukushimaShigeyuki Adachi
    • G10H1/08
    • G11B27/034G11B27/34
    • A CPU of an overdubbing device plays back a music file recorded in a memory card of the device and outputs the file as a played-back audio signal while mixing the played-back audio signal with an external audio signal input from the outside, to thus perform overdubbing. A music file recorded through overdubbing last time is automatically set as a playback music file for the next time, and a selected state of means for selecting execution/nonexecution of overdubbing is maintained as the state of execution. As a result, overdubbing is enabled by twice operations of a record key, whereby the operation is made identical with operation performed during ordinary recording.
    • 超频装置的CPU重放记录在设备的存储卡中的音乐文件,并将该文件作为回放音频信号输出,同时将回放音频信号与从外部输入的外部音频信号混合,从而 执行overdubbing。 通过上次叠加记录的音乐文件被自动设置为下一次的播放音乐文件,并且保持用于选择执行/不执行超限的装置的选择状态作为执行状态。 结果,通过记录键的两次操作来实现叠加,从而使操作与在普通记录期间执行的操作相同。