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    • 1. 发明授权
    • Method for producing glass thin film
    • 制造玻璃薄膜的方法
    • US5660611A
    • 1997-08-26
    • US463866
    • 1995-06-05
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • C03B19/14C03C17/00C03C17/02C23C14/10C23C16/44C23C16/453C03B37/07C03C25/02
    • C03B19/1453C03B19/14C03B19/1415C03C17/001C03C17/02C23C14/10C23C16/44C23C16/453C03B2207/90
    • A method for producing an oxide glass thin film is provided, in which volatilization of additives in a porous film from which the thin film is formed is effectively suppressed, and which the oxide glass film has a desired arrangement of refractive index with a low optical loss. According to this method, glass fine particles mainly containing SiO.sub.2 with a first additive are deposited on a substrate to form a porous thin film. A gas containing a second additive is supplied to a first chamber and heated to a first predetermined temperature profile to provide a heated gas containing an oxide. After disposing the substrate in a second chamber communicated with the first chamber, the substrate is heated to make the deposited porous glass into transparent glass while controlling a temperature in the second chamber according to a second temperature profile. A carrier gas is flowed from the first chamber to the second chamber to transfer the heated gas and oxide from the first chamber to the second chamber during heating. The temperature of the first predetermined temperature profile is maintained higher than the temperature of the second predetermined temperature profile at the same time. In addition, the heated gas contains a component that is also present in the first additive.
    • 提供了一种制造氧化物玻璃薄膜的方法,其中有效地抑制了形成薄膜的多孔膜中的添加剂的挥发,并且氧化物玻璃薄膜具有期望的折射率排列,光损耗低 。 根据该方法,将主要含有SiO 2的第一添加剂的玻璃微粒子沉积在基板上,形成多孔薄膜。 将含有第二添加剂的气体供应到第一室并加热至第一预定温度分布,以提供含有氧化物的加热气体。 在将基板设置在与第一室连通的第二室中之后,基板被加热以使沉积的多孔玻璃成为透明玻璃,同时根据第二温度曲线控制第二室中的温度。 载气从第一室流到第二室,以在加热期间将加热的气体和氧化物从第一室转移到第二室。 第一预定温度曲线的温度同时保持高于第二预定温度曲线的温度。 此外,加热气体含有也存在于第一添加剂中的成分。
    • 2. 发明授权
    • Method for producing a glass thin film with controlloing an oxide vapor
of an additive
    • 用添加剂的氧化物蒸气调制玻璃薄膜的方法
    • US5503650A
    • 1996-04-02
    • US330602
    • 1994-10-28
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • C03B19/14C03C17/00C03C17/02C23C14/10C23C16/44C23C16/453C03B37/018
    • C03B19/1453C03B19/14C03B19/1415C03C17/001C03C17/02C23C14/10C23C16/44C23C16/453C03B2207/90
    • A method of producing an oxide glass thin film includes a process to obtain a transparent glass film, in which volatilization of additives in a porous film deposited is effectively suppressed and which can provide an oxide glass thin film having a desired arrangement of refractive index with a low optical loss. The method is for producing an oxide glass thin film, in which glass fine particles mainly containing SiO.sub.2 with additives are deposited on a substrate to form a porous thin film and then heated to form a transparent glass film. In the method, vapor of oxides of additive components is mixed in an atmosphere in which the porous thin film is heated to form the transparent glass film, whereby stopping the volatilization of the additives in the porous film deposited, preventing diffusion of the additives added to a core layer, and preventing the volatilization of glass transition temperature lowering components of additives (P.sub.2 O.sub.5, B.sub.2 O.sub.3, GeO.sub.2, etc.). By these, a desired arrangement of refractive index may be obtained, and an oxide glass thin film may be obtained while lowering the optical loss such as the optical scattering, which could be caused by bubbles in an unsintered portion.
    • 制造氧化物玻璃薄膜的方法包括获得透明玻璃膜的方法,其中有效地抑制了沉积的多孔膜中的添加剂的挥发,并且可以提供具有期望的折射率布置的氧化物玻璃薄膜 光损耗低。 该方法用于生产氧化物玻璃薄膜,其中主要含有SiO 2的玻璃微粒子添加剂沉积在基底上以形成多孔薄膜,然后加热形成透明玻璃膜。 在该方法中,添加成分的氧化物蒸气在多孔薄膜被加热的气氛中混合,形成透明玻璃膜,由此停止多孔膜中的添加剂的挥发,防止添加添加剂的扩散 核心层,并且防止添加剂(P 2 O 5,B 2 O 3,GeO 2等)的玻璃化转变温度降低成分的挥发。 通过这些,可以获得期望的折射率布置,并且可以在降低可能由未烧结部分中的气泡引起的光学散射等光损耗的同时获得氧化物玻璃薄膜。
    • 5. 发明授权
    • Seal structure-carrying linear motion guide unit
    • 密封结构承载线性运动导向单元
    • US5775813A
    • 1998-07-07
    • US863304
    • 1997-05-27
    • Masahide Saitoh
    • Masahide Saitoh
    • F16C29/06F16C29/08F16C33/66
    • F16C29/086F16C29/0609F16C29/0633F16C33/6622F16C33/6659
    • This linear motion rolling guide unit is provided with a seal structure capable of being applied to an existing linear motion rolling guide unit without changing the basic specifications thereof. A positioning pin-carrying mounting plate is fixed to a slider. Each of seal members incorporated in the seal structure comprises an upper seal portion and side seal portions. The positioning pins provided on the mounting plate are inserted into positioning pin holes of the seal members, whereby the seal members are positioned, the seal members being then fixed to the mounting plate by fixing screws inserted thereinto from the outer side of a scraper plate provided in contact with the seal members. The seal members of the seal structure are renewed by removing the same by outstretching the side seal portions thereof around the central parts of the upper seal portions thereof, and installing new seal members.
    • 该直线运动滚动导向单元设置有可以应用于现有的直线运动滚动导向单元而不改变其基本规格的密封结构。 定位销安装板固定在滑块上。 结合在密封结构中的每个密封构件包括上密封部分和侧密封部分。 设置在安装板上的定位销插入到密封件的定位销孔中,由此密封件被定位,密封件然后通过从设置的刮板的外侧的固定螺钉固定到安装板上 与密封件接触。 密封结构的密封构件通过在其上部密封部分的中心部分周围的侧部密封部分伸出,并且安装新的密封构件来移除密封结构的密封构件。
    • 6. 发明授权
    • Linear motion rolling guide unit
    • 直线运动滚动导轨单元
    • US5634722A
    • 1997-06-03
    • US685957
    • 1996-07-22
    • Kouhei YuasaMasahide Saitoh
    • Kouhei YuasaMasahide Saitoh
    • F16C29/04F16C29/06F16C29/08F16C33/66F16C33/76
    • F16C29/086F16C29/0645F16C33/6614F16C33/6622
    • The linear motion rolling guide unit has sealing devices that can be applied without having to modify the fundamental specifications of the existing unit and which can also be installed and removed easily. Each of the seals in the sealing device comprises a metal plate core and a rubber bonded to the core by baking. The core has at the central part a notched portion that allows a pair of seal side portions to be opened or expanded. Replacement of the seals can be done simply by fitting new seals over the track rail from above. The interference of the seals in the assembled sealing device can be adjusted easily by adjusting the distance that the adjust screws, whose front ends contact the side surface of the core, are screwed in.
    • 直线运动滚动导向单元具有可以施加的密封装置,而不必修改现有单元的基本规格,并且也可以容易地安装和拆卸。 密封装置中的每个密封件包括金属板芯和通过烘烤粘结到芯的橡胶。 芯部在中央部具有允许一对密封侧部分被打开或膨胀的切口部分。 可以通过从上方在轨道上安装新的密封件来更换密封件。 通过调节前端接触芯的侧面的调节螺钉被拧入的距离可以容易地调节组装的密封装置中的密封件的干扰。