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    • 1. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07986003B2
    • 2011-07-26
    • US11828616
    • 2007-07-26
    • Shinji AonoHideki TakahashiYoshifumi TomomatsuJunichi Moritani
    • Shinji AonoHideki TakahashiYoshifumi TomomatsuJunichi Moritani
    • H01L29/739
    • H01L29/7397H01L29/0834H01L29/1095H01L29/66348
    • A carrier storage layer is located in a region of a predetermined depth from a surface of an N− substrate, a base region is located in a shallower region than the predetermined depth and an emitter region is located in a surface of the N− substrate. The carrier storage layer is formed by phosphorus injected to have a maximum impurity concentration at the predetermined depth, the base region is formed by boron injected to have the maximum impurity concentration at a shallower position than the predetermined depth and the emitter region is formed by arsenic injected to have the maximum impurity concentration at the surface of the N− substrate. An opening is formed to extend through the emitter region, base region and the carrier storage layer. On the inner wall of the opening, a gate electrode is formed with a gate insulating film therebetween.
    • 载体存储层位于距离N基板的表面的预定深度的区域中,基极区域位于比预定深度更浅的区域中,并且发射极区域位于N基板的表面中。 载体存储层由注入的磷形成,以在预定深度具有最大杂质浓度,基底区域由注入的硼形成,使其具有比预定深度更浅的位置的最大杂质浓度,并且发射极区域由砷形成 注入到在N-底物的表面具有最大的杂质浓度。 形成开口以延伸穿过发射极区域,基极区域和载流子存储层。 在开口的内壁上形成有栅极绝缘膜。