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1. 发明授权

US08130360B2 Exposure apparatus and device manufacturing method 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US08130360B2
公开(公告)日：2012-03-06
申请号：US11835035
申请日：2007-08-07
申请人： Shinichiro Hirai , Tetsuya Mori , Seiya Miura , Yoshinori Ohsaki
发明人： Shinichiro Hirai , Tetsuya Mori , Seiya Miura , Yoshinori Ohsaki
IPC分类号： G03B27/68
CPC分类号： G03F9/7034 , G03F9/7026 , G03F9/7088
摘要： An exposure apparatus includes an image sensor, a measurement optical system configured to guide measurement light to obliquely enter the projection optical system, and further, to guide the measurement light returned from the projection optical system to the image sensor, and a control unit configured to calculate surface position information of the substrate based on the output from the image sensor. The control unit calculates the surface position information of the substrate based on an interval between the image, of a mark arranged on the original stage, formed by the measurement light, which has passed through the mark, and the image of the mark formed by the measurement light reflected by the mark.
摘要翻译：曝光装置包括图像传感器，测量光学系统，被配置为引导测量光倾斜地进入投影光学系统，并且还将投影光学系统返回的测量光引导到图像传感器;以及控制单元，被配置为基于来自图像传感器的输出来计算基板的表面位置信息。控制单元基于由已经通过标记的测量光形成的在原始台上布置的标记的图像与由该标记形成的标记的图像之间的间隔来计算基板的表面位置信息测量光由标记反射。

2. 发明申请

US20080036990A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080036990A1
公开(公告)日：2008-02-14
申请号：US11835035
申请日：2007-08-07
申请人： Shinichiro Hirai , Tetsuya Mori , Seiya Miura , Yoshinori Ohsaki
发明人： Shinichiro Hirai , Tetsuya Mori , Seiya Miura , Yoshinori Ohsaki
IPC分类号： G03B27/74
CPC分类号： G03F9/7034 , G03F9/7026 , G03F9/7088
摘要： An exposure apparatus is disclosed. The apparatus comprises an image sensor, a measurement optical system configured to guide measurement light to obliquely enter the projection optical system, and further guide the measurement light returned from the projection optical system to the image sensor, and a control unit configured to calculate surface position information of the substrate based on the output from the image sensor. The control unit calculates the surface position information of the substrate based on an interval between the image, of a mark arranged on the original stage, formed by the measurement light which has passed through the mark and the image of the mark formed by the measurement light reflected by the mark.
摘要翻译：公开了一种曝光装置。该装置包括图像传感器，测量光学系统，被配置为引导测量光倾斜地进入投影光学系统，并且进一步将从投影光学系统返回的测量光引导到图像传感器;以及控制单元，被配置为计算表面位置基于来自图像传感器的输出的基板的信息。控制单元基于由穿过标记的测量光形成的原稿台上的标记的图像与由测量光形成的标记的图像之间的间隔来计算基板的表面位置信息被标记所反映。

3. 发明申请

US20080094597A1 PROJECTION EXPOSURE APPARATUS, OPTICAL MEMBER, AND DEVICE MANUFACTURING METHOD 失效
标题翻译：投影曝光装置，光学构件和装置制造方法
公开(公告)号：US20080094597A1
公开(公告)日：2008-04-24
申请号：US11873724
申请日：2007-10-17
申请人： Shinichiro Hirai , Yoshinori Ohsaki , Yoshiyuki Kuramoto
发明人： Shinichiro Hirai , Yoshinori Ohsaki , Yoshiyuki Kuramoto
IPC分类号： G03B27/54 , G01B11/02
CPC分类号： G03B27/54 , G03F7/706 , G03F7/7085
摘要： A projection exposure apparatus 100 projects the pattern of an original 6 onto a substrate 7 via a projection optical system PL. The projection exposure apparatus 100 includes an original stage 5 which holds the original 6, a substrate stage 8 which holds the substrate 7, and a measurement unit. The measurement unit includes a Fizeau interferometer IF including an optical unit 17 and mirror 22. The optical unit 17 includes a Fizeau surface which splits a light beam into a reference light beam and a test light beam. The mirror 22 reflects the test light beam having passed through the projection optical system PL. The optical unit 17 is mounted on the original stage 5. The mirror 22 is mounted on the substrate stage 8.
摘要翻译：投影曝光装置100通过投影光学系统PL将原稿6的图案投影到基板7上。投影曝光装置100包括保持原稿6的原稿台5，保持基板7的基板台8和测量单元。测量单元包括包括光学单元17和反射镜22的Fizeau干涉仪IF。光学单元17包括将光束分成参考光束和测试光束的Fizeau表面。反射镜22反射穿过投影光学系统PL的测试光束。光学单元17安装在原始台5上。反射镜22安装在基板台8上。

4. 发明授权

US07787103B2 Projection exposure apparatus, optical member, and device manufacturing method 失效
标题翻译：投影曝光装置，光学构件和装置制造方法
公开(公告)号：US07787103B2
公开(公告)日：2010-08-31
申请号：US11873724
申请日：2007-10-17
申请人： Shinichiro Hirai , Yoshinori Ohsaki , Yoshiyuki Kuramoto
发明人： Shinichiro Hirai , Yoshinori Ohsaki , Yoshiyuki Kuramoto
IPC分类号： G03B27/54 , G03B27/52
CPC分类号： G03B27/54 , G03F7/706 , G03F7/7085
摘要： A projection exposure apparatus 100 projects the pattern of an original 6 onto a substrate 7 via a projection optical system PL. The projection exposure apparatus 100 includes an original stage 5 which holds the original 6, a substrate stage 8 which holds the substrate 7, and a measurement unit. The measurement unit includes a Fizeau interferometer IF including an optical unit 17 and mirror 22. The optical unit 17 includes a Fizeau surface which splits a light beam into a reference light beam and a test light beam. The mirror 22 reflects the test light beam having passed through the projection optical system PL. The optical unit 17 is mounted on the original stage 5. The mirror 22 is mounted on the substrate stage 8.
摘要翻译：投影曝光装置100通过投影光学系统PL将原稿6的图案投影到基板7上。投影曝光装置100包括保持原稿6的原稿台5，保持基板7的基板台8和测量单元。测量单元包括包括光学单元17和反射镜22的Fizeau干涉仪IF。光学单元17包括将光束分成参考光束和测试光束的Fizeau表面。反射镜22反射穿过投影光学系统PL的测试光束。光学单元17安装在原始台5上。反射镜22安装在基板台8上。

5. 发明申请

US20060270333A1 Vehicular air-conditioner 有权
标题翻译：车用空调
公开(公告)号：US20060270333A1
公开(公告)日：2006-11-30
申请号：US11444272
申请日：2006-05-31
申请人： Shinichiro Hirai , Takuya Kataoka
发明人： Shinichiro Hirai , Takuya Kataoka
IPC分类号： B60H1/00
CPC分类号： B60H1/00785 , B60H1/00849
摘要： A vehicle air-conditioner provided with an inside air-conditioning unit introducing at least one of inside air and outside air, adjusting the state of the introduced air, and blowing it out into the vehicle compartment, where an air-conditioning electronic control device judges if window glass is liable to fog up based on a window glass surface relative humidity near the window glass in the compartment (degree of ease of fogging). When it is judged that the window glass is liable to fog up, the inside air-conditioning unit is controlled to prevent the window glass from fogging up in defrost control, while when it is judged that the window glass is resistant to fogging, the inside air-conditioning unit is controlled to introduce at least inside air into the compartment.
摘要翻译：一种车内空调装置，其具有引入内部空气和外部空气中的至少一个的内部空调单元，调节引入的空气的状态，并将其吹出到车厢内，空调电子控制装置判断如果窗玻璃容易基于车厢内的窗玻璃附近的窗玻璃表面相对湿度而雾化（容易起雾的程度）。当判断出窗玻璃容易起雾时，控制内部空调单元以防止窗玻璃在除霜控制中起雾，而当判断出窗玻璃不起雾时，内部控制空调单元至少将内部空气引入隔室。

6. 发明申请

US20090207400A1 EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20090207400A1
公开(公告)日：2009-08-20
申请号：US12369581
申请日：2009-02-11
申请人： Naoto Hayashi , Shinichiro Hirai
发明人： Naoto Hayashi , Shinichiro Hirai
IPC分类号： G03B27/52
CPC分类号： G03B27/52 , G03F7/70516 , G03F7/70591
摘要： The present invention provides an exposure apparatus including a measuring unit which includes an imaging optical system configured to guide light having propagated through a projection optical system to an image sensor, and is configured to measure the overall birefringence of the imaging optical system and the projection optical system, a calibration unit which is set on a side of an object plane of the projection optical system in order to measure a birefringence of the imaging optical system, and is configured to reflect the light from the measuring unit back to the measuring unit without using the projection optical system, and a calculation unit configured to isolate, from the result of measuring the overall birefringence, the birefringence of the imaging optical system measured by the measuring unit, thereby calculating the birefringence of the projection optical system.
摘要翻译：本发明提供一种曝光装置，包括测量单元，该测量单元包括成像光学系统，该成像光学系统被配置为将通过投影光学系统传播的光引导到图像传感器，并且被配置为测量成像光学系统和投影光学系统的整体双折射系统，校准单元，其被设置在投影光学系统的物平面的一侧，以便测量成像光学系统的双折射，并且被配置为将来自测量单元的光反射回测量单元，而不使用投影光学系统和计算单元，被配置为从测量整个双折射的结果中隔离由测量单元测量的成像光学系统的双折射，由此计算投影光学系统的双折射率。

7. 发明申请

US20050067158A1 Air conditioner for vehicle use 有权
标题翻译：车用空调
公开(公告)号：US20050067158A1
公开(公告)日：2005-03-31
申请号：US10947529
申请日：2004-09-22
申请人： Koji Ito , Yasushi Yamanaka , Kazushi Shikata , Takahiro Tokunaga , Tomohiro Kamiya , Masakazu Nagaya , Shinichiro Hirai
发明人： Koji Ito , Yasushi Yamanaka , Kazushi Shikata , Takahiro Tokunaga , Tomohiro Kamiya , Masakazu Nagaya , Shinichiro Hirai
IPC分类号： B60H1/00 , B60H1/12 , B60H1/24 , B60H1/32 , B60R21/22
CPC分类号： B60H1/00207 , B60H1/00007 , B60H1/00885 , B60H1/12 , B60H1/247 , B60H1/323 , B60H2001/002 , B60H2001/00928 , B60H2001/00942
摘要： An upper opening portion (74, 75) and lower opening portion (76, 77) are arranged in a door body (13b, 14b) located below a side window (13a, 14a), and an air conditioning unit (15, 16) is arranged inside the door body (13b, 14b), and a rotary position of a scroll casing (62, 63) of a blower (56, 57) is selected so that air can flow from the lower opening portion (76, 77) to the upper opening portion (74, 75) at the time of air-cooling and air can flow from the upper opening portion (74, 75) to the lower opening portion (76, 77) at the time of heating.
摘要翻译：上部开口部分（74,75）和下部开口部分（76,77）设置在位于侧面窗口（13a，14a）下方的门体（13b，14b）中，空调单元（15,16）布置在门体（13b，14b）内，并且选择鼓风机（56,57）的涡旋壳体（62,63）的旋转位置，使得空气可以从下开口部（76,77）流动，在空气冷却时到上部开口部分（74,75），并且在加热时空气可以从上部开口部分（74,75）流动到下部开口部分（76,77）。

8. 发明授权

US07958740B2 Vehicular air-conditioner 有权
标题翻译：车用空调
公开(公告)号：US07958740B2
公开(公告)日：2011-06-14
申请号：US11444272
申请日：2006-05-31
申请人： Shinichiro Hirai , Takuya Kataoka
发明人： Shinichiro Hirai , Takuya Kataoka
IPC分类号： F25D21/00 , F25D21/06 , F25D17/04 , F25B49/00 , F24F3/14 , F24F11/00 , F24F6/00 , G05D22/02 , G05D21/00 , B01F3/02
CPC分类号： B60H1/00785 , B60H1/00849
摘要： A vehicle air-conditioner provided with an inside air-conditioning unit introducing at least one of inside air and outside air, adjusting the state of the introduced air, and blowing it out into the vehicle compartment, where an air-conditioning electronic control device judges if window glass is liable to fog up based on a window glass surface relative humidity near the window glass in the compartment (degree of ease of fogging). When it is judged that the window glass is liable to fog up, the inside air-conditioning unit is controlled to prevent the window glass from fogging up in defrost control, while when it is judged that the window glass is resistant to fogging, the inside air-conditioning unit is controlled to introduce at least inside air into the compartment.
摘要翻译：一种车内空调装置，其具有引入内部空气和外部空气中的至少一个的内部空调单元，调节引入的空气的状态，并将其吹出到车厢内，空调电子控制装置判断如果窗玻璃容易基于车厢内的窗玻璃附近的窗玻璃表面相对湿度而雾化（容易起雾的程度）。当判断出窗玻璃容易起雾时，控制内部空调单元以防止窗玻璃在除霜控制中起雾，而当判断出窗玻璃不起雾时，内部控制空调单元至少将内部空气引入隔室。

9. 发明授权

US4284648A Nasal administration of propranolol 失效
标题翻译：普萘洛尔的鼻内给药
公开(公告)号：US4284648A
公开(公告)日：1981-08-18
申请号：US63176
申请日：1979-08-03
申请人： Anwar A. Hussain , Shinichiro Hirai , Rima Bawarshi
发明人： Anwar A. Hussain , Shinichiro Hirai , Rima Bawarshi
IPC分类号： A61K31/13 , A61K9/00 , A61K9/08 , A61K9/107 , A61K9/12 , A61K31/135 , A61K31/138 , A61P25/02
CPC分类号： A61K9/0043 , A61K31/135 , Y10S514/821
摘要： The invention relates to a novel method of administering propranolol, a known .beta.-andrenergic blocking agent widely used in the treatment of angina pectoris, arrhythmias, hypertension and other cardiac conditions, and migraine. The invention further relates to novel dosage forms of propranolol which are adapted for nasal administration and which include solutions, suspensions, gels and ointments.
摘要翻译：本发明涉及一种广泛用于治疗心绞痛，心律失常，高血压和其他心脏病以及偏头痛的已知β-肾上腺素能阻断剂的普萘洛尔的新方法。本发明还涉及适于鼻内给药的普萘洛尔的新型剂型，其包括溶液，悬浮液，凝胶和软膏。

10. 发明授权

US4383993A Nasal dosage forms containing natural female sex hormones 失效
标题翻译：含有天然雌性性激素的鼻剂
公开(公告)号：US4383993A
公开(公告)日：1983-05-17
申请号：US277000
申请日：1981-06-24
申请人： Anwar A. Hussain , Shinichiro Hirai , Rima Bawarshi
发明人： Anwar A. Hussain , Shinichiro Hirai , Rima Bawarshi
IPC分类号： A61K9/00 , A61K31/57 , A01N45/00
CPC分类号： A61K9/0043 , A61K31/57 , Y10S514/843
摘要： The invention relates to a novel method of administering the natural female sex hormones, 17 .beta.-estradiol and progesterone, to achieve enhanced bioavailability thereof. The invention further relates to novel dosage forms of 17 .beta.-estradiol and/or progesterone which are adapted for nasal administration, such as solutions, suspensions, gels and ointments. The dosage forms containing a combination of 17 .beta.-estradiol and progesterone are particularly useful as contraceptives, while the dosage forms containing only one of the hormonal components find utility in the treatment of conditions such as menopause, menstrual disorders, etc., which are known to respond to administration of a natural or synthetic female hormone.
摘要翻译：本发明涉及一种施用天然雌性激素17β-雌二醇和孕酮的新方法，以实现其增强的生物利用度。本发明还涉及适于鼻内给药的17β-雌二醇和/或孕酮的新型剂型，例如溶液，悬浮液，凝胶和软膏。含有17β-雌二醇和孕酮组合的剂型特别适用于避孕药，而含有仅一种激素成分的剂型可用于治疗已知的诸如更年期，月经紊乱等病症对天然或合成雌激素的施用作出反应。

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