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1. 发明申请

US20110074817A1 COMPOSITE PICTURE FORMING METHOD AND PICTURE FORMING APPARATUS 审中-公开
标题翻译：复合图像形成方法和图像形成装置
公开(公告)号：US20110074817A1
公开(公告)日：2011-03-31
申请号：US12871675
申请日：2010-08-30
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka , Atsushi Miyamoto , Go Kotaki
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka , Atsushi Miyamoto , Go Kotaki
IPC分类号： G09G5/00
CPC分类号： G06T7/344 , G06T2207/10056 , G06T2207/30148
摘要： A composite picture forming method and picture forming apparatus forms pattern attribute information contained in an overlapping domain for the overlapping domain between a plurality of pictures to select the pictures to be targeted for a composition in accordance with the pattern attribute information and combine the selected pictures, and the composition of the pictures is also performed in plural stages by using the pattern attribute information in the overlapping domain.
摘要翻译：复合图像形成方法和图像形成装置形成包含在多个图像之间的重叠域的重叠域中的图案属性信息，以根据图案属性信息选择要组合的图像，并组合所选择的图像，并且通过使用重叠域中的图案属性信息也可以在多个阶段中执行图像的组合。

2. 发明授权

US08577125B2 Method and apparatus for image generation 有权
标题翻译：用于图像生成的方法和装置
公开(公告)号：US08577125B2
公开(公告)日：2013-11-05
申请号：US12344000
申请日：2008-12-24
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/00
CPC分类号： G06T11/60 , G06T2200/32
摘要： The present invention provides a technique to generate an accurate connected image even in a monotonous pattern using design data as constrained conditions. A reference position is roughly determined through matching between the design data and image data, matching between neighboring images is performed using the amount of mismatch from the design data as a searching range and a connected image is generated at high speed and accurately. The image generation method of the present invention is an image generation method for inspecting an electronic device pattern using a scanning electron microscope and is constructed of a design data file that stores design data describing layout information of an electronic device pattern by inputting the data, a plurality of divided pieces of image data obtained by imaging the electronic device pattern at different imaging positions, and image connecting means for connecting the plurality of divided pieces of image data into one image using the plurality of divided pieces of image data and the design data of a file of the design data (see FIG. 1).
摘要翻译：本发明提供了一种使用设计数据作为约束条件即使以单调模式生成精确连接图像的技术。通过设计数据和图像数据之间的匹配粗略地确定参考位置，使用来自设计数据的失配量作为搜索范围来执行相邻图像之间的匹配，并且以高速和准确的方式生成连接的图像。本发明的图像生成方法是使用扫描电子显微镜来检查电子设备图案的图像生成方法，并且由设计数据文件构成，该设计数据文件通过输入数据来存储描述电子设备图案的布局信息的设计数据，通过在不同的成像位置对电子设备图案进行成像而获得的多个分割图像数据;以及图像连接装置，用于使用多个分割的图像数据和多个分割的图像数据将多个分割的图像数据片段连接到一个图像中设计数据的文件（参见图1）。

3. 发明授权

US08687921B2 Image processing apparatus, image processing method, and image processing program 有权
标题翻译：图像处理装置，图像处理方法和图像处理程序
公开(公告)号：US08687921B2
公开(公告)日：2014-04-01
申请号：US13578651
申请日：2011-03-25
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/32
CPC分类号： G06T7/001 , G06T7/74 , G06T2207/10061 , G06T2207/30148
摘要： It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).
摘要翻译：本发明的目的是提供一种可以高精度地检测样本的观察图像的旋转的图像处理技术。根据本发明的图像处理装置通过包括样本的测量部分（图1）的广角图像数据间接校正测量图像数据和参考图像数据之间的旋转间隙。

4. 发明申请

US20090202137A1 METHOD AND APPARATUS FOR IMAGE GENERATION 有权
标题翻译：用于图像生成的方法和装置
公开(公告)号：US20090202137A1
公开(公告)日：2009-08-13
申请号：US12344000
申请日：2008-12-24
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/00 , G06K9/64
CPC分类号： G06T11/60 , G06T2200/32
摘要： The present invention provides a technique to generate an accurate connected image even in a monotonous pattern using design data as constrained conditions. A reference position is roughly determined through matching between the design data and image data, matching between neighboring images is performed using the amount of mismatch from the design data as a searching range and a connected image is generated at high speed and accurately. The image generation method of the present invention is an image generation method for inspecting an electronic device pattern using a scanning electron microscope and is constructed of a design data file that stores design data describing layout information of an electronic device pattern by inputting the data, a plurality of divided pieces of image data obtained by imaging the electronic device pattern at different imaging positions, and image connecting means for connecting the plurality of divided pieces of image data into one image using the plurality of divided pieces of image data and the design data of a file of the design data (see FIG. 1).
摘要翻译：本发明提供了一种使用设计数据作为约束条件即使以单调模式生成精确连接图像的技术。通过设计数据和图像数据之间的匹配粗略地确定参考位置，使用来自设计数据的失配量作为搜索范围来执行相邻图像之间的匹配，并且以高速和准确的方式生成连接的图像。本发明的图像生成方法是使用扫描电子显微镜来检查电子设备图案的图像生成方法，并且由设计数据文件构成，该设计数据文件通过输入数据来存储描述电子设备图案的布局信息的设计数据，通过在不同的成像位置对电子设备图案进行成像而获得的多个分割图像数据;以及图像连接装置，用于使用多个分割的图像数据和多个分割的图像数据将多个分割的图像数据片段连接到一个图像中设计数据的文件（参见图1）。

5. 发明授权

US08705841B2 Pattern inspection method, pattern inspection apparatus and pattern processing apparatus 有权
标题翻译：图案检查方法，图案检查装置和图案处理装置
公开(公告)号：US08705841B2
公开(公告)日：2014-04-22
申请号：US12997176
申请日：2009-06-05
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A pattern inspection apparatus for detecting an abnormality includes a storage, a compensator and an abnormality judger. The storage stores data based on a reference pattern associated with an object pattern as an object to detect an abnormality and including a first pattern edge portion and a second pattern edge portion. The compensator partially compensates a location of the first pattern edge portion to be shrunk or expanded based on the reference pattern such that the first pattern edge portion is to be placed at a location of a third pattern edge portion while the second pattern edge portion maintains the same size. The abnormality judger sets a tolerance based on the location compensated based on the reference pattern, and judges the object pattern as abnormal when an outline of the object pattern is fallen outside of the tolerance.
摘要翻译：用于检测异常的图案检查装置包括存储器，补偿器和异常判断器。存储器基于与对象图案相关联的参考图案作为对象存储数据，以检测异常并且包括第一图案边缘部分和第二图案边缘部分。补偿器基于参考图案部分地补偿要缩小或扩大的第一图案边缘部分的位置，使得第一图案边缘部分将被放置在第三图案边缘部分的位置，而第二图案边缘部分保持相同大小异常判断器基于基于参考图案补偿的位置来设定公差，并且当对象图案的轮廓落在公差之外时，将对象图案判断为异常。

6. 发明申请

US20130011080A1 Image Processing Apparatus, Image Processing Method, and Image Processing Program 有权
标题翻译：图像处理装置，图像处理方法和图像处理程序
公开(公告)号：US20130011080A1
公开(公告)日：2013-01-10
申请号：US13578651
申请日：2011-03-25
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/32
CPC分类号： G06T7/001 , G06T7/74 , G06T2207/10061 , G06T2207/30148
摘要： It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).
摘要翻译：本发明的目的是提供一种可以高精度地检测样本的观察图像的旋转的图像处理技术。根据本发明的图像处理装置通过包括样本的测量部分（图1）的广角图像数据间接校正测量图像数据和参考图像数据之间的旋转间隙。

7. 发明申请

US20120092482A1 METHOD AND DEVICE FOR CREATING COMPOSITE IMAGE 审中-公开
标题翻译：用于创建复合图像的方法和装置
公开(公告)号：US20120092482A1
公开(公告)日：2012-04-19
申请号：US13262734
申请日：2010-04-02
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/36 , H04N7/18
CPC分类号： H04N5/272 , G06T3/4038 , G06T5/006 , H01J2237/221 , H01J2237/2817 , H04N5/23238
摘要： A composite image creating method and device are provided which, when images separately captured a plurality of times are panoramically synthesized, can prevent deformation of a pattern due to multiple irradiation of the electron beam. One image is generated by overlapping joining areas of rims of two adjacent images when a plurality of images are joined to generate one image. Of two adjacent images, the joining area of an image of an earlier image capturing order is left, and the joining area of an image of a later image capturing order is removed. The joining area of the image of an earlier image capturing order is obtained with irradiation of electron beam a less number of times than the joining area of the image of a later image capturing order, and therefore deformation of a pattern due to irradiation of the electron beam is little.
摘要翻译：提供了一种合成图像创建方法和装置，当全面地合成多次分开拍摄的图像时，可以防止由于电子束的多次照射引起的图案的变形。当连接多个图像以生成一个图像时，通过重叠两个相邻图像的边缘的连接区域来生成一个图像。在两个相邻图像中，留下较早图像拍摄顺序的图像的连接区域，并且去除了稍后图像拍摄顺序的图像的连接区域。通过电子束的照射获得比较晚的图像捕获顺序的图像的接合面积少的次数来获得较早的图像捕获顺序的图像的接合区域，因此由于电子照射引起的图案的变形梁很小。

8. 发明申请

US20110142326A1 PATTERN INSPECTION METHOD, PATTERN INSPECTION APPARATUS AND PATTERN PROCESSING APPARATUS 有权
标题翻译：图案检查方法，图案检查装置和图案处理装置
公开(公告)号：US20110142326A1
公开(公告)日：2011-06-16
申请号：US12997176
申请日：2009-06-05
申请人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
发明人： Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： In a defect judgment operation using tolerance to allow a high-speed operation, the amount of deformation is obtained from an image pickup pattern image, and tolerance including the deformation is generated by deforming a reference pattern image as the basis of the tolerance according to the deformation, and only a disconnection or a contact is judged as an abnormality even if deformation exists in an image pickup pattern.According to the present invention, an abnormality of an object pattern is judged by using a reference pattern storage unit for storing data based on a reference pattern corresponding to the object pattern the abnormality of which is to be detected, image data storage means for storing data based on image data obtained by picking up an image of the object pattern, tolerance generation means for generating data based on the tolerance of the object pattern by using the data based on the reference pattern in the reference pattern storage means and the data based on image pickup image data in the image data storage means, the data based on the tolerance generated by the tolerance generation means, and the data based on the image pickup image data in the image data storage means.
摘要翻译：在使用允许高速操作的公差的缺陷判断操作中，从图像拾取图案图像获得变形量，并且通过使参考图案图像变形作为公差的基础，根据变形，即使在图像拾取图案中存在变形，也仅将断开或接触判断为异常。根据本发明，通过使用用于存储数据的参考图案存储单元来判断对象图案的异常，该参考图案存储单元基于与要检测的异常的对象图案相对应的参考图案，用于存储数据的图像数据存储装置基于通过拾取对象图案的图像获得的图像数据;容差产生装置，用于基于参考图案存储装置中的参考图案使用数据并基于图像生成基于对象图案的容差的数据拾取图像数据存储装置中的图像数据，基于由公差产生装置产生的公差的数据以及基于图像数据存储装置中的图像拾取图像数据的数据。

9. 发明申请

US20130170757A1 METHOD FOR CREATING TEMPLATE FOR PATTERNMATCHING, AND IMAGE PROCESSING APPARATUS 审中-公开
标题翻译：用于创建模式的模式的方法和图像处理装置
公开(公告)号：US20130170757A1
公开(公告)日：2013-07-04
申请号：US13807666
申请日：2011-05-13
申请人： Shinichi Shinoda , Yasutaka Toyoda , Yuichi Abe , Mitsuji Ikeda , Hiroyuki Ushiba
发明人： Shinichi Shinoda , Yasutaka Toyoda , Yuichi Abe , Mitsuji Ikeda , Hiroyuki Ushiba
IPC分类号： G06K9/00
CPC分类号： G06K9/00 , G06K9/6202 , G06T7/001 , G06T2207/10056 , G06T2207/10061 , G06T2207/30148
摘要： Disclosed is a method for creating a template for the purpose of performing pattern matching on the basis of a template image having high contrast. Also disclosed is an image processing apparatus. In the method for creating the template, design data is partially extracted, and on the basis of the extracted partial region, the template for template matching is created. In the image processing apparatus, such method is performed. In the method and the apparatus, a density of edges that belong to a predetermined region in the design data equivalent to the region to be searched for in the template matching is obtained.
摘要翻译：公开了一种用于基于具有高对比度的模板图像来进行模式匹配的目的来创建模板的方法。还公开了一种图像处理装置。在创建模板的方法中，部分提取设计数据，并且基于提取的部分区域，创建用于模板匹配的模板。在图像处理装置中，执行这种方法。在该方法和装置中，获得属于与模板匹配中要搜索的区域等同的设计数据中的预定区域的边缘的密度。

10. 发明申请

US20090214109A1 DROPOUT COLOR PROCESSING METHOD AND PROCESSING APPARATUS USING SAME 有权
标题翻译：使用相同的倒角颜色处理方法和处理设备
公开(公告)号：US20090214109A1
公开(公告)日：2009-08-27
申请号：US12342627
申请日：2008-12-23
申请人： Keisuke NAKASHIMA , Shinichi Shinoda , Hiroshi Shojima , Masahiro Oikawa , Kazuki Nakashima , Yasuhiro Uchida
发明人： Keisuke NAKASHIMA , Shinichi Shinoda , Hiroshi Shojima , Masahiro Oikawa , Kazuki Nakashima , Yasuhiro Uchida
IPC分类号： G06K9/00
CPC分类号： G06K9/2072 , G06K9/00449 , G06K2209/01
摘要： It is possible to compatibly set multiple “dropout” color ranges and “non-dropout” color ranges and uniquely determine a dropout boundary. An object of the present invention is to greatly conserve maintenance cost of adding a new dropout form after apparatus operations. A conventional technology aims at assuring relation to a predetermined color region, determining the presence or absence of contention, or uniquely settling a dropout boundary. The present invention provides a means for supplying levels to a “dropout” color range and a “non-dropout” color range. A registered color range histogram can be quasi-three-dimensionally visualized so that an operator can make adjustment by viewing a contention determination result and an image.
摘要翻译：可以兼容地设置多个“压差”颜色范围和“非压差”颜色范围，并且唯一地确定出口边界。本发明的目的是大大节省在装置操作之后添加新的压差形式的维护成本。常规技术旨在确保与预定颜色区域的关系，确定争用的存在或不存在，或者唯一地建立退出边界。本发明提供了一种用于向“缺失”颜色范围和“非滴落”颜色范围提供水平的装置。注册的颜色范围直方图可以被准三维地可视化，使得操作者可以通过观看争用确定结果和图像进行调整。

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