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1. 发明授权

US06376401B1 Ultraviolet ray-transparent optical glass material and method of producing same 有权
标题翻译：紫外线透明光学玻璃材料及其制造方法
公开(公告)号：US06376401B1
公开(公告)日：2002-04-23
申请号：US09387773
申请日：1999-09-01
申请人： Shinichi Kondo , Takayuki Nakamura , Kazuhiko Fukuda , Naoyoshi Kamisugi , Nobu Kuzuu , Yoshinao Ihara , Hidetoshi Wakamatsu
发明人： Shinichi Kondo , Takayuki Nakamura , Kazuhiko Fukuda , Naoyoshi Kamisugi , Nobu Kuzuu , Yoshinao Ihara , Hidetoshi Wakamatsu
IPC分类号： C03B2000
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/02 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/23 , C03C2201/11 , C03C2201/23 , C03C2203/44
摘要： A synthetic silica glass having a high transmittance for vacuum ultraviolet rays, for example F2 excimer laser beam with a wavelength of 157 nm, a high uniformity and a high durability and useful for ultraviolet ray-transparent optical glass materials is produced from a high-purity silicon compound, for example silicon tetrachloride, by heat treating an accumulated porous silica material at a temperature not high enough to convert the porous silica material to a transparent silica glass in an inert gas atmosphere for a time sufficient to cause the OH groups to be condensed and removed from the glass, and exhibits substantially no content of impurities other than OH group a difference between highest and lowest fictional temperatures of 50° C. or less and a transmittance of 157 nm ultraviolet rays through a 10 mm optical path of 60% or more, and optically a OH group content of 1 to 70 ppm, a Cl content less than 1 ppm, a total content of impurity metals of 50 ppb or less, a content of each individual impurity metal less than 10 ppb, and an ultraviolet ray-transmittance at 172 to 200 nm of 40% or more even after the glass is exposed to an irradiation of ultraviolet rays at 160 to 300 nm for one hour.
摘要翻译：对于真空紫外线具有高透射率的合成二氧化硅玻璃，例如波长为157nm的F2准分子激光束，高均匀性和高耐久性并且可用于紫外线透明光学玻璃材料由高纯度硅化合物，例如四氯化硅，通过在不足够高的温度下热处理积聚的多孔二氧化硅材料，以在惰性气体气氛中将多孔二氧化硅材料转化为透明的石英玻璃足以使OH基团冷凝的时间并且从玻璃中除去，并且基本上不含OH基团中的杂质含量，最高和最低虚构温度之间的差别为50℃或更低，通过10mm光路的157nm紫外线的透射率为60％或更多地，光学地含有1至70ppm的OH基含量，小于1ppm的Cl含量，50ppb以下的杂质金属的总含量，即使玻璃暴露于160〜300nm的紫外线照射1小时，每一种杂质金属小于10ppb，而在172〜200nm的紫外线透射率为40％以上。

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