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    • 2. 发明专利
    • Silicon substrate for magnetic recording and manufacturing method thereof
    • 用于磁记录的硅基板及其制造方法
    • JP2009217870A
    • 2009-09-24
    • JP2008057785
    • 2008-03-07
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • OHASHI TAKESHI
    • G11B5/73G11B5/738G11B5/84
    • G11B5/7315G11B5/8404Y10T428/24355Y10T428/265
    • PROBLEM TO BE SOLVED: To provide an Si substrate for magnetic recording medium having excellent surface flatness without making a processing process and deposition process of a magnetic recording layer complex, as well as a thermal conductivity that is unchanged from a bulk substrate of a single crystal and a polycrystal. SOLUTION: A metal film is deposited (S7) on a polycrystalline silicon substrate after rough polishing (S6) and silicidated or silicon-alloyed (S8). Thereafter, the film is subjected to precision polishing (S9) such as CMP polishing to increase the flatness of the substrate. Accordingly, the Si substrate for a magnetic recording medium obtains a flat and smooth surface without being influenced by a difference between crystal orientations of the polycrystalline grains and the presence of crystal grain boundary, and obtains heat resistance and a thermal conductivity approximately equivalent to a bulk Si substrate. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供具有优异的表面平坦度的磁记录介质的Si衬底,而不进行磁记录层复合物的加工工艺和沉积工艺,以及与本体衬底的体积基底不变的热导率 单晶和多晶。 解决方案:在粗抛光(S6)和硅化硅或硅合金(S8)之后,在多晶硅基板上沉积金属膜(S7)。 此后,对CMP进行精密抛光(S9),以增加基板的平坦度。 因此,用于磁记录介质的Si衬底获得平坦光滑的表面,而不受多晶晶粒的晶体取向和晶界的存在之间的差异的影响,并获得大致相当于体积的耐热性和热导率 Si衬底。 版权所有(C)2009,JPO&INPIT
    • 3. 发明专利
    • Method of manufacturing silicon substrate for magnetic recording medium, and magnetic recording medium
    • 制造用于磁记录介质的硅基板和磁记录介质的方法
    • JP2009093758A
    • 2009-04-30
    • JP2007264397
    • 2007-10-10
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • OHASHI TAKESHI
    • G11B5/84C23C14/20G11B5/73
    • G11B5/8404
    • PROBLEM TO BE SOLVED: To provide an Si substrate for magnetic recording medium, which has sufficient shock resistance, prevents machining processes and film deposition processes of a magnetic recording layer from becoming complex, has improved surface planarity, and can reduce costs. SOLUTION: Etching is not performed in the process of planarizing a polycrystalline Si wafer, but only mechanical grinding is performed for planarization (S104, S106). This is because, since the etching rate is crystal-face dependent, etching of the polycrystalline Si wafer inevitably results in formation of steps because of different crystal-face orientations of individual crystal grains exposed on a surface of the wafer, which hinders precision surface planarization. Subsequently, the Si wafer surface is coated with an oxide film to form an Si wafer with oxide film prior to the final polishing stage (S107) and then a surface of the oxide film is planarized, to obtain a planar substrate (Si substrate with oxide film) having no steps on the surface thereof (S108). COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供具有足够的抗冲击性的磁记录介质的Si衬底,防止磁记录层的机械加工和膜沉积过程变得复杂,具有改善的表面平面性,并且可以降低成本。 解决方案:在平坦化多晶Si晶片的过程中不进行蚀刻,但是仅进行用于平坦化的机械研磨(S104,S106)。 这是因为,由于蚀刻速度是晶面依赖的,所以多晶硅晶片的蚀刻不可避免地导致步骤的形成,这是由于晶片表面上暴露的各个晶粒的晶面取向不同,这阻碍了精密的表面平坦化 。 随后,在最终抛光阶段之前,用氧化膜涂覆Si晶片表面以形成具有氧化膜的Si晶片(S107),然后使氧化膜的表面平坦化,从而获得平面基板(具有氧化物的Si基板 薄膜),其表面没有台阶(S108)。 版权所有(C)2009,JPO&INPIT
    • 4. 发明专利
    • Silicon substrate for magnetic recording medium and its manufacturing method
    • 用于磁记录介质的硅基底及其制造方法
    • JP2008234750A
    • 2008-10-02
    • JP2007071337
    • 2007-03-19
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • OHASHI TAKESHI
    • G11B5/73G11B5/84
    • G11B5/82G11B5/7315G11B5/8404
    • PROBLEM TO BE SOLVED: To provide a silicon substrate for magnetic recording medium which reduces cost reduction while having sufficient impact resistance and excellent surface flatness without complicating working process and deposition process of a magnetic recording layer.
      SOLUTION: A method for manufacturing the silicon substrate for magnetic recording medium comprises: a step for coating a silicone based material and a solution including organosilica on a surface of polycrystal silicon substrate after roughly polishing (S106) to make a thin film for shielding steps and crystal grain boundaries, a step for forming an SiO
      2 film by treating the thin film with heat at an appropriate temperature to vaporize organic constituents (S107), and a step for enhancing the flatness of the substrate by finely polishing the SiO
      2 film (S108) such as CMP polishing. Herewith a flat and smooth surface (both square mean values of waviness and microwaviness are equal to or less than 0.3 nm) is obtained without being affected by difference of crystal orientation and existence of crystal grain boundaries of the polycrystal grains.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种用于磁记录介质的硅衬底,其降低成本,同时具有足够的抗冲击性和优异的表面平坦度,而不会使工作过程和磁记录层的沉积过程复杂化。 解决方案:一种用于制造用于磁记录介质的硅衬底的方法,包括:在大致抛光之后,在多晶硅衬底的表面上涂覆有机硅基材料和包括有机硅溶液的溶液的步骤(S106),以制备用于 屏蔽步骤和晶粒边界,通过在合适的温度下热处理该薄膜以蒸发有机成分来形成SiO 2 SBS薄膜的步骤(S107),以及用于提高SiO 2的平坦度的步骤 通过精细研磨SiO 2 SBS薄膜(S108)(例如CMP抛光)来形成基板。 由此,不受晶体取向的差异和多晶晶粒的晶粒边界的存在的影响,获得平坦且平滑的表面(波形和微波的平均值均等于或小于0.3nm)。 版权所有(C)2009,JPO&INPIT
    • 5. 发明专利
    • Substrate for magnetic recording medium, its manufacturing method and magnetic recording medium
    • 磁记录介质基板及其制造方法及磁记录介质
    • JP2007272999A
    • 2007-10-18
    • JP2006097603
    • 2006-03-31
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • ITO TAKUOHASHI TAKESHI
    • G11B5/73G11B5/667G11B5/84G11B5/858
    • G11B5/667G11B5/7325G11B5/8404G11B5/858
    • PROBLEM TO BE SOLVED: To provide a substrate suitable for manufacturing a perpendicular magnetic recording medium having low noise and satisfactory signal reproducing characteristics and to provide its manufacturing method.
      SOLUTION: A soft magnetic backing layer 12 is formed on a non-magnetic substrate 11 by an electroless plating method. The soft magnetic backing layer formed by the plating method is subjected to heat treatment in a magnetic field by selecting conditions of 150 to 350°C heat treatment temperature, ≥50 Oersted (Oe) magnetic field intensity applied to the substrate and 5 to 10 hr treatment time. Magnetic anisotropy wherein an absolute value of the difference (δH=H
      d -H
      c ) between a magnetization saturation magnetic field (H
      d ) in an in-plane radial direction of the soft magnetic film and a magnetization saturation magnetic field (H
      c ) in an in-plane circumferential direction is 5 Oersted (Oe) or more and which has symmetry with respect to a center axis of the substrate is imparted by the heat treatment in the magnetic field. The soft magnetic backing layer having the magnetic anisotropy is effective for noise reduction and controllability and reproducibility of the degree of the magnetic anisotropy are high.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供适于制造具有低噪声和令人满意的信号再现特性的垂直磁记录介质的基板,并提供其制造方法。 解决方案:通过无电镀方法在非磁性基板11上形成软磁性背衬层12。 通过选择150〜350℃的热处理温度,施加到基板上的≥50奥斯特(Oe)磁场强度和5〜10小时的条件,通过电镀法形成的软磁性背衬层在磁场中进行热处理 治疗时间。 磁化各向异性,其中磁化饱和磁场(H d )之间的差异的绝对值(δH= H H c ) 软磁性膜的面内径向方向和面内圆周方向的磁化饱和磁场(H c )为5奥斯特(Oe)以上,并且相对于 通过在磁场中的热处理赋予基板的中心轴。 具有磁各向异性的软磁背衬层对于降低噪声和可控性是有效的,并且磁各向异性程度的再现性高。 版权所有(C)2008,JPO&INPIT
    • 6. 发明专利
    • Linear motor for machine tool
    • 线性电机机床
    • JP2006034016A
    • 2006-02-02
    • JP2004210488
    • 2004-07-16
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • MIYATA KOJIUCHIDA MASANOBUOHASHI TAKESHI
    • H02K41/03B23K26/08B23K26/10
    • PROBLEM TO BE SOLVED: To provide a linear motor for enhancing the processing speed of a laser processing system and realizing high speed high precision processing by reducing cogging force sharply. SOLUTION: In the linear motor for use in a machine tool comprising a stator where a plurality of permanent magnets of identical profile are fixed to the opposite sides of a planar yoke, while spaced apart equally, such that different polarities are arranged alternately in the direction perpendicular to the moving direction of a mover, and an array of movers where movers each having an armature core applied with an armature coil are arranged oppositely to the array of permanent magnets on the opposite sides of the stator, the array of movers consists of three blocks of nine movers having a length eight times as long as the magnet pitch, i.e. the sum of the width of permanent magnet and the distance between permanent magnets, and applied with the armature coil of each phase for each set of three movers, and the interval of respective blocks is set equal to two third of the magnet pitch. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于提高激光加工系统的处理速度的线性电动机,并通过大幅削减齿槽力来实现高速高精度加工。 解决方案:在用于包括定子的机床的直线电动机中,其中具有相同轮廓的多个永磁体固定到平面轭的相对侧,同时间隔开,使得不同的极性交替排列 在与移动体的移动方向垂直的方向上,并且具有各自具有施加有电枢线圈的电枢铁芯的移动器的移动器阵列与定子的相对侧上的永久磁铁阵列相对地布置, 由三个长度为磁铁间距八倍的九个移动器组成,即永磁体的宽度与永磁体之间的距离之和,并与每组三个移动器的各相电枢线圈相加 并且各块的间隔被设定为等于磁体间距的三分之一。 版权所有(C)2006,JPO&NCIPI
    • 7. 发明专利
    • Linear motor for machine tool
    • 线性电机机床
    • JP2006034015A
    • 2006-02-02
    • JP2004210487
    • 2004-07-16
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • MIYATA KOJIUCHIDA MASANOBUOHASHI TAKESHI
    • H02K41/03
    • PROBLEM TO BE SOLVED: To provide a linear motor for enhancing the processing speed of a laser processing system and realizing high speed high precision processing by reducing cogging force sharply.
      SOLUTION: In the linear motor for use in a machine tool comprising a stator where a plurality of permanent magnets of identical profile are fixed to the opposite sides of a planar yoke, while spaced apart equally, such that different polarities are arranged alternately in the direction perpendicular to the moving direction of a mover, and a pair of movers where an armature core applied with an armature coil is arranged oppositely to the array of permanent magnets on the opposite sides of the stator, each mover includes three mover blocks of nine armature cores having a length eight times as long as the magnet pitch τ, i.e. the sum of the width of permanent magnet and the distance between permanent magnets, and applied with the armature coil of each phase for each set of three armature coils, and the interval of respective blocks is set equal to one third of the magnet pitch τ.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于提高激光加工系统的处理速度的线性电动机,并通过大幅削减齿槽力来实现高速高精度加工。 解决方案:在用于包括定子的机床的直线电动机中,其中具有相同轮廓的多个永磁体固定到平面轭的相对侧,同时间隔开,使得不同的极性交替排列 在与移动体的移动方向正交的方向上,并且一对移动体,其中施加有电枢线圈的电枢磁芯与定子的相对侧上的永久磁铁阵列相对地布置,每个动子包括三个 九个电枢磁芯的长度为磁体间距τ的八倍,即永久磁铁的宽度与永磁体之间的距离之和,并与每组三个电枢线圈的各相电枢线圈相加;以及 各块的间隔被设定为等于磁体间距τ的三分之一。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Linear synchronous motor
    • 线性同步电机
    • JP2003070226A
    • 2003-03-07
    • JP2001253059
    • 2001-08-23
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • OHASHI TAKESHI
    • H02K41/03
    • PROBLEM TO BE SOLVED: To decrease ripple of mover thrust by finding the optimum magnetizing direction and arrangement of permanent magnets on a stator side, making the flux density distribution of a permanent magnet train into a rough sinewave, and approximating counter electromotive force induced by a mover coil to a sinewave, thus reducing cogging torque.
      SOLUTION: This linear synchronous motor includes a primary mover having a coil and a secondary stator in which a plurality of permanent magnets are disposed along a straight line, and moves the mover along the secondary side stator linearly by exciting the coil. A plurality of the permanent magnets are disposed adjacent to each other, and the magnetizing directions of the permanent magnets adjacent to each other are shifted by 90° in each moving direction and orthogonal direction of the mover.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:通过找到定子侧的永磁体的最佳磁化方向和布置来减小动子推力的波动,使永磁体列车的磁通密度分布成粗糙的正弦波,并且近似由 动子线圈到正弦波,从而减少齿槽转矩。 解决方案:该线性同步电动机包括具有线圈和次级定子的原动机,其中沿着直线设置多个永磁体,并且通过激励线圈使发电机沿着次级侧定子线性移动。 多个永磁体彼此相邻设置,并且彼此相邻的永磁体的磁化方向偏移90度。 在移动器的每个移动方向和正交方向上。
    • 9. 发明专利
    • Substrate for magnetic recording medium, manufacturing method, and magnetic recording medium
    • 用于磁记录介质的基板,制造方法和磁记录介质
    • JP2008176846A
    • 2008-07-31
    • JP2007008074
    • 2007-01-17
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • OHASHI TAKESHITAKAI YASUSHI
    • G11B5/667G11B5/858
    • PROBLEM TO BE SOLVED: To provide a substrate suitable for manufacturing vertical magnetic recording medium which has good signal reproducing characteristic with low noise and a manufacturing method thereof.
      SOLUTION: On the non magnetic substrate 1, preferably a core forming layer 2 is formed, and a multilayer soft magnetic backing layer 3 including antiferromagnetic film is formed on the layer 2. The soft magnetic backing layer 3 is exchange coupled between the soft magnetic film and the antiferromagnetic film, and has anisotropy in the circumferential direction or radial direction. The antiferromagnetic film is an alloy film preferably including Cr or Mn or metal oxide film except natural oxidization, and is obtained by film forming like plating. Anisotropic processing is carried out by thermal treatment in a magnetic field, and circumferential or radial anisotropy is made by changing the direction of applying the magnetic field, and a magnetic recording layer 5 for vertical magnetic recording is formed on the soft magnetic backing layer 3. Further, a protection layer 6 and a lubricating layer 7 are favorably laminated in order.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种适用于制造具有良好的低噪声信号再现特性的垂直磁记录介质的基板及其制造方法。 解决方案:在非磁性基板1上,优选形成芯形成层2,并且在层2上形成包括反铁磁性膜的多层软磁背衬层3.软磁背衬层3交换耦合在 软磁性膜和反铁磁膜,并且在圆周方向或径向方向上具有各向异性。 反铁磁性膜是除了天然氧化以外,优选含有Cr或Mn或金属氧化物膜的合金膜,通过成膜等形成。 通过在磁场中的热处理进行各向异性处理,通过改变施加磁场的方向来进行圆周或径向各向异性,在软磁背衬层3上形成用于垂直磁记录的磁记录层5。 此外,保护层6和润滑层7顺序地层压。 版权所有(C)2008,JPO&INPIT
    • 10. 发明专利
    • Linear motor for machine tool
    • 线性电机机床
    • JP2006054972A
    • 2006-02-23
    • JP2004235808
    • 2004-08-13
    • Shin Etsu Chem Co Ltd信越化学工業株式会社
    • UCHIDA MASANOBUMIYATA KOJIOHASHI TAKESHI
    • H02K41/03B23K26/08B23Q5/28H02K15/03
    • PROBLEM TO BE SOLVED: To provide a linear motor for machine tool which is high in positioning accuracy by magnetizing a plurality of permanent magnets after arraying them on both sides of a plate-shaped yoke. SOLUTION: This linear motor 10 for a machine tool comprises a stator 13 where the plurality of permanent magnets 12 in the same form being magnetized in the vertical direction to the face of the yoke 11 are arrayed, at equal intervals so that the direction of the magnetization may be different from adjacent permanent magnets 12, on both sides of the plate-shaped yoke 11, and a pair of moving members 16 where armature coils 14 provided with a plurality of teeth with armature coils 15 wound are counterposed severally to the rows of each permanent magnet 12 provided on both sides of the plate-shaped yoke 11 so that the central axis of each armature coil 15 may be parallel with the direction of the magnetization of each permanent magnet 12. After the plurality of permanent magnets 12 are arrayed on both sides of the plate-shaped yoke 11, the permanent magnets 12 are magnetized. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过在将多个永磁体排列在板状轭的两侧上之后使多个永磁体磁化,来提供定位精度高的机床线性电动机。 解决方案:用于机床的线性电动机10包括定子13,其中相同形式的多个永磁体12在垂直于磁轭11的表面的方向被磁化,以等间隔排列, 磁化方向与板状磁轭11的两侧的相邻的永久磁铁12不同,并且一对移动部件16分别与电枢绕组15配置有电枢线圈15的电枢线圈14分别相对地 设置在板状磁轭11的两侧的每个永磁体12的行,使得每个电枢线圈15的中心轴线可以与每个永磁体12的磁化方向平行。在多个永磁体12之后 排列在板状磁轭11的两侧,永磁体12被磁化。 版权所有(C)2006,JPO&NCIPI