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1. 发明授权

US06319299B1 Adjustable cold trap with different stages 有权
标题翻译：可调式冷阱具有不同的阶段
公开(公告)号：US06319299B1
公开(公告)日：2001-11-20
申请号：US09537479
申请日：2000-03-30
申请人： Shih-Min Shih , Kun-Lin Huang
发明人： Shih-Min Shih , Kun-Lin Huang
IPC分类号： B01D800
CPC分类号： F28D9/0093 , B01D8/00 , Y10S55/15
摘要： A new three-stage cold trap configuration is provided that allows for significantly improved cold trap efficiency and reduced Preventive Maintenance of the cold trap. The cold trap of the invention is provided with three stages that are used for the removal of impurities from processing gasses after they have been released from a processing chamber. The spaces between the three plates of the cold trap are not the same while the angle under which the gas impacts the plates differs from conventional cold trap designs. The three plates of the cold trap are furthermore adjustable, making the design of the cold trap of the invention flexible and readily applicable to a range of cold trap requirements.
摘要翻译：提供了一个新的三级冷阱配置，可以显着提高冷阱效率，减少冷阱的预防性维护。本发明的冷阱具有三个阶段，用于在处理气体从处理室中释放出之后从处理气体中除去杂质。冷阱的三个板之间的空间不一样，而气体撞击板的角度与传统的冷阱设计不同。冷阱的三个板块进一步是可调节的，使得本发明的冷阱的设计灵活并且容易地适用于一系列冷阱要求。

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