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1. 发明授权

US5543921A Aligning method utilizing reliability weighting coefficients 失效
标题翻译：利用可靠性加权系数对齐方法
公开(公告)号：US5543921A
公开(公告)日：1996-08-06
申请号：US465098
申请日：1995-06-05
申请人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
发明人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/7088 , G03F9/7003 , G03F9/7092
摘要： An aligning method suitably usable in a semiconductor device manufacturing exposure apparatus of step-and-repeat type, for sequentially positioning regions on a wafer to an exposure position. In one preferred form, the marks provided on selected regions of the wafer are detected to obtain corresponding mark signals and then respective positional data related to the positions or positional errors of the selected regions are measured, on the basis of the mark signals. Then, the reliability of each measured positional data of a corresponding selected region is detected, on the basis of the state of a corresponding mark signal or the state of that measured positional data and by using fuzzy reasoning, for example. Corrected positional data related to the disposition of all the regions on the wafer is then prepared by using the measured positional data of the selected regions, wherein, for preparation of the corrected positional data, each measured positional data is weighted in accordance with the detected reliability thereof such that measured positional data having higher reliability is more influential to determine the corrected positional data.
摘要翻译：适用于步进重复类型的半导体器件制造曝光设备中的对准方法，用于将晶片上的区域顺序地定位到曝光位置。在一个优选形式中，检测提供在晶片的选定区域上的标记以获得对应的标记信号，然后基于标记信号测量与所选区域的位置或位置误差相关的各个位置数据。然后，基于对应的标记信号的状态或测量的位置数据的状态，并通过使用模糊推理来检测对应的选择区域的每个测量位置数据的可靠性。然后通过使用测量的所选择的区域的位置数据来准备与晶片上的所有区域的配置相关的位置数据，其中，为了准备校正的位置数据，根据检测到的可靠性对每个测量的位置数据进行加权使得具有较高可靠性的测量位置数据对确定校正的位置数据更有影响力。

2. 发明授权

US06333786B1 Aligning method 失效
标题翻译：对齐方式
公开(公告)号：US06333786B1
公开(公告)日：2001-12-25
申请号：US08139059
申请日：1993-10-21
申请人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
发明人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
IPC分类号： G01B1100
CPC分类号： G03F9/7092 , G03F9/7003 , G03F9/7088
摘要： An aligning method suitably usable in a semiconductor device manufacturing exposure apparatus of step-and-repeat type, for sequentially positioning regions on a wafer to an exposure position. In one preferred form, the marks provided on selected regions of the wafer are detected to obtain corresponding mark signals and then respective positional data related to the positions or positional errors of the selected regions are measured, on the basis of the mark signals. Then, the reliability of each measured positional data of a corresponding selected region is detected, on the basis of the state of a corresponding mark signal or the state of that measured positional data and by using fuzzy reasoning, for example. Corrected positional data related to the disposition of all the regions on the wafer is then prepared by using the measured positional data of the selected regions, wherein, for preparation of the corrected positional data, each measured positional data is weighted in accordance with the detected reliability thereof such that measured positional data having higher reliability is more influential to determine of the corrected positional data. For sequential positioning of the regions on the wafer to the exposure position, the wafer movement is controlled on the basis of the prepared corrected positional data, whereby high-precision alignment of each region is assured.
摘要翻译：适用于步进重复类型的半导体器件制造曝光设备中的对准方法，用于将晶片上的区域顺序地定位到曝光位置。在一个优选形式中，检测提供在晶片的选定区域上的标记以获得对应的标记信号，然后基于标记信号测量与所选区域的位置或位置误差相关的各个位置数据。然后，基于对应的标记信号的状态或测量的位置数据的状态，并通过使用模糊推理来检测对应的选择区域的每个测量位置数据的可靠性。然后通过使用测量的所选择的区域的位置数据来准备与晶片上的所有区域的配置相关的位置数据，其中，为了准备校正的位置数据，根据检测到的可靠性对每个测量的位置数据进行加权使得具有较高可靠性的测量位置数据对确定校正的位置数据更有影响力。为了将晶片上的区域顺序定位到曝光位置，基于准备的校正位置数据来控制晶片移动，从而确保每个区域的高精度对准。

3. 发明授权

US6097495A Aligning method 失效
标题翻译：对齐方式
公开(公告)号：US6097495A
公开(公告)日：2000-08-01
申请号：US102752
申请日：1998-06-23
申请人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
发明人： Shigeyuki Uzawa , Akiya Nakai , Masaaki Imaizumi , Hiroshi Tanaka , Noburu Takakura , Yoshio Kaneko
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/7088 , G03F9/7003 , G03F9/7092
摘要： An aligning method suitably usable in a semiconductor device manufacturing exposure apparatus of step-and-repeat type, for sequentially positioning regions on a wafer to an exposure position. In one preferred form, the marks provided on selected regions of the wafer are detected to obtain corresponding mark signals and then respective positional data related to the positions or positional errors of the selected regions are measured, on the basis of the mark signals. Then, the reliability of each measured positional data of a corresponding selected region is detected, on the basis of the state of a corresponding mark signal or the state of that measured positional data and by using fuzzy reasoning, for example. Corrected positional data related to the disposition of all the regions on the wafer is then prepared by using the measured positional data of the selected regions, wherein, for preparation of the corrected positional data, each measured positional data is weighted in accordance with the detected reliability thereof such that measured positional data having higher reliability is more influential to determine the corrected positional data. For sequential positioning of the regions on the wafer to the exposure position, the wafer movement is controlled on the basis of the prepared corrected positional data, whereby high-precision alignment of each region is assured.
摘要翻译：适用于步进重复类型的半导体器件制造曝光设备中的对准方法，用于将晶片上的区域顺序地定位到曝光位置。在一个优选形式中，检测提供在晶片的选定区域上的标记以获得对应的标记信号，然后基于标记信号测量与所选区域的位置或位置误差相关的各个位置数据。然后，基于对应的标记信号的状态或测量的位置数据的状态，并通过使用模糊推理来检测对应的选择区域的每个测量位置数据的可靠性。然后通过使用测量的所选择的区域的位置数据来准备与晶片上的所有区域的配置相关的位置数据，其中，为了准备校正的位置数据，根据检测到的可靠性对每个测量的位置数据进行加权使得具有较高可靠性的测量位置数据对确定校正的位置数据更有影响力。为了将晶片上的区域顺序定位到曝光位置，基于准备的校正位置数据来控制晶片移动，从而确保每个区域的高精度对准。

4. 发明授权

US09773597B2 Composite soft magnetic material having low magnetic strain and high magnetic flux density, method for producing same, and electromagnetic circuit component 有权
公开(公告)号：US09773597B2
公开(公告)日：2017-09-26
申请号：US13979988
申请日：2012-02-22
申请人： Hiroaki Ikeda , Hiroshi Tanaka , Kazunori Igarashi
发明人： Hiroaki Ikeda , Hiroshi Tanaka , Kazunori Igarashi
IPC分类号： H01F1/24 , H01F41/02 , B22F1/02 , B22F3/16 , C22C33/02 , C22C38/02 , H01F3/08 , H01F27/255 , H01F1/26 , H01F1/33
CPC分类号： H01F1/24 , B22F1/02 , B22F1/025 , B22F3/16 , B22F3/24 , B22F2998/10 , B22F2999/00 , C22C33/0214 , C22C33/0278 , C22C38/02 , C22C2202/02 , H01F1/26 , H01F1/33 , H01F3/08 , H01F27/255 , H01F41/0246 , B22F3/02 , B22F2003/248 , B22F2201/02 , B22F2201/20
摘要： A composite soft magnetic material having low magnetostriction and high magnetic flux density contains: pure iron-based composite soft magnetic powder particles that are subjected to an insulating treatment by a Mg-containing insulating film or a phosphate film; and Fe—Si alloy powder particles including 11%-16% by mass of Si. A ratio of an amount of the Fe—Si alloy powder particles to a total amount is in a range of 10%-60% by mass. A method for producing the composite soft magnetic material comprises the steps of: mixing a pure iron-based composite soft magnetic powder, and the Fe—Si alloy powder in such a manner that a ratio of the Fe—Si alloy powder to a total amount is in a range of 10%-60%; subjecting a resultant mixture to compression molding; and subjecting a resultant molded body to a baking treatment in a non-oxidizing atmosphere.

5. 发明授权

US09399189B2 CO2 recovery device 有权
标题翻译： CO2回收装置
公开(公告)号：US09399189B2
公开(公告)日：2016-07-26
申请号：US14004708
申请日：2012-04-11
申请人： Tatsuya Tsujiuchi , Hiroshi Tanaka , Hiromitsu Nagayasu , Takuya Hirata , Tsuyoshi Oishi , Masahiko Tatsumi , Koji Kadono
发明人： Tatsuya Tsujiuchi , Hiroshi Tanaka , Hiromitsu Nagayasu , Takuya Hirata , Tsuyoshi Oishi , Masahiko Tatsumi , Koji Kadono
IPC分类号： B01D53/14
CPC分类号： B01D53/1425 , B01D53/1406 , B01D53/1475 , B01D2252/204 , B01D2257/504 , B01D2258/0283 , Y02A50/2342 , Y02C10/04 , Y02C10/06
摘要： A CO2 recovery device includes a cooling tower including a cooling unit for bringing the flue gas, which contains CO2, into contact with water so as to cool flue gas; a CO2-absorbing unit for bringing the flue gas into contact with a CO2 absorbent (lean solution) so as to remove CO2 from flue gas; and a regenerator including an absorbent regenerating unit for releasing CO2 from a rich solution so as to regenerate the CO2 absorbent. The CO2-absorbing unit includes: a cocurrent flow CO2-absorbing unit provided in a cocurrent flow CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a cocurrent flow so as to remove CO2 from flue gas and a countercurrent CO2-absorbing unit provided in a CO2 absorber, for bringing the flue gas into contact with the CO2 absorbent in a countercurrent flow so as to remove CO2 from flue gas.
摘要翻译： CO 2回收装置包括：冷却塔，其包括用于使含有CO 2的烟道气与水接触以冷却烟道气的冷却单元; 用于使烟道气与CO 2吸收剂（贫溶液）接触以便从烟道气中除去CO 2的CO 2吸收单元; 以及再生器，其包括用于从富溶液中释放CO 2以便再生CO 2吸收剂的吸收剂再生单元。二氧化碳吸收单元包括：并流CO2吸收单元，其设置在并流CO2吸收器中，用于使烟道气与CO 2吸收剂以并流方式接触，以便从烟气中除去CO 2和逆流CO2- 提供在CO 2吸收器中的吸收单元，用于使烟气以逆流流动与CO 2吸收剂接触，以便从烟道气中除去CO 2。

6. 发明授权

US09340117B2 Power supply and demand leveling system 有权
标题翻译：电力供需调平系统
公开(公告)号：US09340117B2
公开(公告)日：2016-05-17
申请号：US13814154
申请日：2011-07-29
申请人： Nobuo Momose , Makoto Kataniwa , Yasuhiro Nakai , Hiroyuki Kumazawa , Tatsuji Munaka , Yoshitaka Okazaki , Yuichiro Shimura , Hiroshi Tanaka , Hiroshi Irie , Hitoshi Maejima
发明人： Nobuo Momose , Makoto Kataniwa , Yasuhiro Nakai , Hiroyuki Kumazawa , Tatsuji Munaka , Yoshitaka Okazaki , Yuichiro Shimura , Hiroshi Tanaka , Hiroshi Irie , Hitoshi Maejima
IPC分类号： G06F19/00 , B60L11/18 , H02J3/32
CPC分类号： B60L11/1838 , B60L11/1816 , B60L11/1824 , B60L11/1825 , B60L11/184 , B60L11/1842 , B60L11/1844 , B60L11/1846 , B60L11/1877 , B60L2210/30 , B60L2230/22 , B60L2230/24 , B60L2230/40 , B60L2240/545 , B60L2240/70 , B60L2250/16 , H02J3/28 , H02J3/32 , Y02E60/721 , Y02T10/7005 , Y02T10/705 , Y02T10/7088 , Y02T10/7241 , Y02T10/7291 , Y02T90/121 , Y02T90/127 , Y02T90/128 , Y02T90/14 , Y02T90/16 , Y02T90/163 , Y02T90/168 , Y02T90/169 , Y04S10/126 , Y04S30/12 , Y04S30/14
摘要： The invention judges a total power supply/demand condition of the electricity consumers 2 as a whole according to an individual power supply/demand condition of electricity consumers 2, judges a total usable capacity of all batteries 17 according to a usable capacity of the batteries 17 of electric vehicles 10 parked at electricity consumers 2, obtains required charge/discharge amounts of all the batteries 17 according to a result of comparison of the total power supply/demand condition of the electricity consumers 2 as a whole with the total usable capacity of all the batteries 17, subjects the batteries 17 to charge/discharge controls according to the required charge/discharge amounts, the power supply/demand conditions of the electricity consumers 2, and the usable capacities of the batteries.
摘要翻译：根据电力用户2的个体供电条件，本发明判断电力用户2整体的总供电状况，根据电池17的可使用容量来判断全部电池17的总可使用容量停电在电力用户2上的电动车辆10，根据电力用户2的整体供电/供给状况的比较结果与所有电池17的总可用容量的比较结果，获得所有电池17的所需充放电量电池17根据所需的充电/放电量，电力用户2的供电/需求条件以及电池的可用容量对电池17进行充放电控制。

7. 发明授权

US09264332B2 Transmission system, transmission device, packet loss ratio measurement method, and packet loss ratio measurement program 有权
标题翻译：传输系统，传输设备，丢包率测量方法和丢包率测量程序
公开(公告)号：US09264332B2
公开(公告)日：2016-02-16
申请号：US14129075
申请日：2012-06-12
申请人： Akira Sakurai , Hiroshi Tanaka , Masaki Umayabashi
发明人： Akira Sakurai , Hiroshi Tanaka , Masaki Umayabashi
IPC分类号： G01R31/08 , G06F11/00 , G08C15/00 , H04L12/26
CPC分类号： H04L43/0829 , H04L43/0835 , H04L43/0841 , H04L43/0852 , H04L43/106
摘要： In a transmission system capable of measuring packet loss ratio between arbitrary devices upon a transmission path without increasing bandwidth of an OAM frame band, a plurality of transmission devices which have been disposed upon a transmission path are provided with a frame analysis unit which receives data frames so as to analyze the type of the data frames, a count processing unit which stores the number of received frames included in the data frames into storage module provided beforehand, an output line end portion which outputs the data frames, and an OAM processing unit which calculates the packet loss ratio in the transmission path using the number of received frames. The frame analysis unit has a function which, if the data frames are OAM frames, copies the data frames and the OAM processing unit has a function which calculates the packet loss ratio using the copied OAM frames.
摘要翻译：在能够测量传输路径上的任意设备之间的分组丢失率而不增加OAM帧频带宽的传输系统中，设置在传输路径上的多个传输设备设置有帧分析单元，其接收数据帧为了分析数据帧的类型，将数据帧中包含的接收帧的数量存储在预先提供的存储模块中的计数处理单元，输出数据帧的输出线路端部分和OAM处理单元，使用接收帧的数量来计算传输路径中的丢包率。帧分析单元具有这样的功能：如果数据帧是OAM帧，则复制数据帧，并且OAM处理单元具有使用复制的OAM帧来计算分组丢失率的功能。

8. 发明授权

US09070549B2 Substrate processing apparatus and substrate processing method 有权
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US09070549B2
公开(公告)日：2015-06-30
申请号：US12680799
申请日：2008-09-22
申请人： Hiroshi Tanaka , Toshiyuki Shiokawa , Takao Inada
发明人： Hiroshi Tanaka , Toshiyuki Shiokawa , Takao Inada
IPC分类号： B08B5/02 , H01L21/02 , H01L21/67
CPC分类号： H01L21/02052 , H01L21/67028
摘要： A drying gas is supplied into a drying chamber in a substantially horizontal direction, an obliquely downward direction descendent from the substantially horizontal direction, or a vertically downward direction under a state where a wafer is immersed in a cleaning liquid in a cleaning tank. The wafer is moved from the cleaning tank into the drying chamber, with the drying gas being supplied into the drying chamber. At this time, the supply of the drying gas into the drying chamber is stopped, under a condition where a part of the wafer is immersed in the cleaning liquid stored in the cleaning tank. After the movement of the wafer into the drying chamber has been finished, a drying gas is supplied into the drying chamber in an obliquely upward direction ascendant from the substantially horizontal direction or a vertically upward direction.
摘要翻译：在将晶片浸入清洗槽中的清洗液体的状态下，将干燥气体从大致水平方向或垂直向下方向向大致水平方向，倾斜向下方向供给到干燥室。将晶片从清洁槽移动到干燥室中，其中干燥气体被供应到干燥室中。此时，在将晶片的一部分浸渍在存储在清洗槽中的清洗液中的状态下，将干燥气体供给到干燥室内停止。在将晶片移动到干燥室中之后，干燥气体从大致水平方向或垂直向上方向上升的斜上方向供给干燥室。

9. 发明授权

US09000126B2 Crystalline oxidized glutathione and production method therefor 有权
标题翻译：结晶氧化型谷胱甘肽及其制备方法
公开(公告)号：US09000126B2
公开(公告)日：2015-04-07
申请号：US13642356
申请日：2011-04-21
申请人： Ken Kimura , Kenta Fukumoto , Hiroshi Tanaka
发明人： Ken Kimura , Kenta Fukumoto , Hiroshi Tanaka
IPC分类号： C07K5/08 , C07K5/02
CPC分类号： C07K5/0215 , C30B7/08 , C30B29/54
摘要： Provided is a novel crystal of oxidized glutathione hexahydrate. Crystal of oxidized glutathione hexahydrate is produced by cooling an aqueous solution containing oxidized glutathione to 15° C. or lower to precipitate a crystal of oxidized glutathione hexahydrate.
摘要翻译：提供了一种新型的氧化型谷胱甘肽六水合物晶体。通过将含有氧化型谷胱甘肽的水溶液冷却至15℃以下，生成氧化型谷胱甘肽六水合物的晶体，使氧化型谷胱甘肽六水合物的结晶析出。

10. 发明授权

US08889649B2 Composition containing antisense oligonucleotide to micro RNA 有权
标题翻译：含有反义寡核苷酸至微RNA的组合物
公开(公告)号：US08889649B2
公开(公告)日：2014-11-18
申请号：US13884436
申请日：2011-11-10
申请人： Koichi Nakashiro , Hiroyuki Hamakawa , Hiroshi Tanaka
发明人： Koichi Nakashiro , Hiroyuki Hamakawa , Hiroshi Tanaka
IPC分类号： C12N15/11 , C12Q1/68 , A61K31/7088 , C12N15/113 , A61K48/00
CPC分类号： C12N15/113 , A61K31/7088 , A61K48/00 , C12N2310/113 , C12N2310/141 , C12N2310/3231 , C12N2320/11 , C12N2330/31
摘要： Provided is a composition that contains an antisense oligonucleotide to a micro RNA and is capable of inhibiting the growth of cancer cells. The present invention, as one aspect, relates to a composition for suppressing the growth of human cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-133a, hsa-miR-133b, hsa-miR-346 and hsa-miR-361-3p. The present invention, as another aspect, relates to a composition for suppressing the growth of human head/neck cancer cells, the composition containing an antisense oligonucleotide to a micro RNA, wherein the micro RNA is selected from the group consisting of hsa-miR-92a, hsa-miR-133a, hsa-miR-133b, hsa-miR-139-5p, hsa-miR-197, hsa-miR-328, hsa-miR-346, hsa-miR-361-3p, hsa-miR-605, hsa-miR-766, hsa-miR-1228, hsa-miR-1252, hsa-miR-1260 and hsa-miR-1271.
摘要翻译：本发明提供了含有对微RNA的反义寡核苷酸并且能够抑制癌细胞生长的组合物。本发明一方面涉及抑制人癌细胞生长的组合物，该组合物含有对微RNA的反义寡核苷酸，其中所述微RNA选自hsa-miR-133a，hsa -miR-133b，hsa-miR-346和hsa-miR-361-3p。本发明另一方面涉及抑制人头颈部癌细胞生长的组合物，该组合物含有对微RNA的反义寡核苷酸，其中微RNA选自hsa-miR- 92a，hsa-miR-133a，hsa-miR-133b，hsa-miR-139-5p，hsa-miR-197，hsa-miR-328，hsa-miR-346，hsa-miR-361-3p， miR-605，hsa-miR-766，hsa-miR-1228，hsa-miR-1252，hsa-miR-1260和hsa-miR-1271。

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