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    • 2. 发明授权
    • Device for measuring temperature of object in vacuum environment
    • 真空环境下物体温度测量装置
    • US5092680A
    • 1992-03-03
    • US527307
    • 1990-05-23
    • Kazuo KobayashiAyahiko SatoYuji UeharaShigetomo Sawada
    • Kazuo KobayashiAyahiko SatoYuji UeharaShigetomo Sawada
    • G01J5/04G01J5/08
    • G01J5/0003G01J5/041G01J5/061G01J5/08G01J5/0806G01J5/0809G01J5/0821G01J5/084G01J5/0868G01J5/0875G01J5/046
    • A device for the measurement of a temperature in a relatively low range having the lower limit of below 100.degree. C. is proposed. The device is suitably used for measuring a temperature of a substrate 4 during a sputtering treatment in a vacuum environment. Infrared rays radiated from the substrate 4 in a vacuum chamber 1 are collected by an optical lens 13 mounted in a freely movable probe 10 via a mirror (15) provided in a hood 14 attached to a front end of the probe (10) for deflecting the incident rays to the lens 13. The collected rays are led outside the chamber 1 to a sensor through a fluoride fiber 8 optically connected to the lens 13. The fiber 8 is enveloped in an air-tight manner within a metal bellows 9. A pipe 20, 24 for feeding a coolant extends in a circulating manner through the interior of the bellows 9 between a coolant source 30 and the probe 10, to suppress the radiation of infrared rays from the probe 10, hood 14 and mirror 15, and to reduce disturbance to the detected substrate temperature value. A combination of an MCT sensor composed of Hg, Cd and Te and a chalcogen fiber composed of Ge, As, Se and Te is also proposed for the measurement of relatively low temperature ranges. A system for controlling a substrate temperature during the sputtering process while using the above device is also proposed.
    • 提出了用于测量具有低于100℃的下限的较低范围内的温度的装置。 该装置适用于在真空环境中的溅射处理期间测量基板4的温度。 在真空室1中从基板4辐射的红外线通过安装在可自由移动的探针10中的光学透镜13收集,所述光学透镜13经由设置在附接到探针(10)的前端的罩14中的反射镜(15) 入射到透镜13的光线。收集的光线通过光学连接到透镜13的氟化纤维8被引导到室1外面到传感器。光纤8以气密的方式包围在金属波纹管9内。 用于供给冷却剂的管20,24以循环的方式延伸穿过冷却剂源30和探针10之间的波纹管9的内部,以抑制来自探针10,罩14和反射镜15的红外线的辐射,并且 减少对检测到的基板温度值的干扰。 还提出了由Hg,Cd和Te组成的MCT传感器和由Ge,As,Se和Te组成的硫族元素纤维的组合,用于测量相对较低的温度范围。 还提出了一种用于在使用上述装置的溅射过程中控制衬底温度的系统。
    • 3. 发明授权
    • Method of manufacturing magnetic head slider, and guide plate used
therefor
    • 制造磁头滑块的方法及其导向板
    • US6129855A
    • 2000-10-10
    • US984631
    • 1997-12-03
    • Shigetomo SawadaYoshinore WatanabeTadamasa TakagiShigeo TerashimaHisami Izawa
    • Shigetomo SawadaYoshinore WatanabeTadamasa TakagiShigeo TerashimaHisami Izawa
    • G11B5/31G11B5/60B44C1/22
    • G11B5/6005G11B5/3106G11B5/3163
    • A method of manufacturing a magnetic head slider from a flying surface pattern formed on one surface of a long and slender rectangular parallelepiped slider block having a plurality of thin film magnetic head elements aligned in a row. The method includes preparing an arrangement jig including a guide plate and an adhesive rubber plate which adheres onto a lower surface of the guide plate by its adhesive force. The method also includes placing blocks in the accommodation holes on the guide plate in such a manner that the surface of each block on which a pattern is formed is directed upward and each block is fixed by the adhesive force of the rubber plate. The rubber plate is then peeled off after an upper surface of the arrangement jig has been set upside down. Pouring and penetrating hardening liquid into clearances formed between the accommodation holes on the guide plate and the blocks is the next step. The guide plate is then fixed onto a base plate and a pattern is formed on the surface of each block.
    • 一种制造磁头滑块的方法,该飞行表面图案形成在具有排列成一行的多个薄膜磁头元件的长而细长的长方体滑动块的一个表面上。 该方法包括制备包括引导板和粘合橡胶板的布置夹具,所述粘合橡胶板通过其粘合力粘附在引导板的下表面上。 该方法还包括将块放置在导向板上的容纳孔中,使得其上形成图案的每个块的表面向上指向,并且通过橡胶板的粘合力来固定每个块。 然后在布置夹具的上表面已经颠倒设置之后,将橡胶板剥离。 将导入硬化液倒入和形成在导向板上的容纳孔和块之间的间隙是下一步骤。 然后将引导板固定在基板上,并且在每个块的表面上形成图案。
    • 5. 发明授权
    • Method and apparatus for suppressing the evaporation of lubricant film
coated on magnetic disks of a disk storage
    • 用于抑制涂覆在磁盘存储器的磁盘上的润滑剂膜的蒸发的方法和装置
    • US4626941A
    • 1986-12-02
    • US618078
    • 1984-05-22
    • Shigetomo SawadaTakeo Hinobayashi
    • Shigetomo SawadaTakeo Hinobayashi
    • G11B23/50G11B25/04G11B33/14G11B5/012G11B5/82G11B17/32
    • G11B33/148G11B23/507G11B25/043
    • A magnetic disk storage apparatus includes an air-tight enclosure containing a drive mechanism for rotating magnetic disks coated with a lubricant material and a flying head assembly. A lubricant evaporating source is arranged inside the enclosure and exposed to the flow of hot air produced by rotation of the disks whereby the lubricant is evaporated and the enclosure is filled with lubricant vapor to suppress the evaporation and consumption of the lubricant layers coated on the magnetic disks. The lubricant evaporating source may be positioned on the inside wall of the enclosure, on a dummy surface of the disks, or on a portion exposed to the circulating hot air flow inside the enclosure. The surface on which the lubricant evaporating source is coated may be of a porous or rough structure to accelerate the evaporation of the lubricant of the source and provide a strong adhesion of the lubricant material to the surface.
    • 磁盘存储装置包括一个气密的外壳,它包含用于旋转涂覆有润滑剂材料的磁盘的驱动机构和一个飞头组件。 润滑剂蒸发源设置在外壳内部并暴露于由圆盘旋转产生的热空气流动,由此润滑剂蒸发并且外壳中充满润滑剂蒸汽,以抑制涂覆在磁性材料上的润滑剂层的蒸发和消耗 磁盘。 润滑剂蒸发源可以位于外壳的内壁上,在盘的虚拟表面上,或者暴露于外壳内循环的热空气流的部分上。 涂有润滑剂蒸发源的表面可以是多孔的或粗糙的结构,以加速源的润滑剂的蒸发,并且提供润滑剂材料对表面的强烈粘附。