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    • 8. 发明授权
    • Device and method for separating and collecting halide gas
    • 用于分离和收集卤化物气体的装置和方法
    • US06921428B2
    • 2005-07-26
    • US10466188
    • 2002-01-23
    • Osamu YamamotoMasayuki KinouchiNaoki TakadaYoji KaseMasao Kikuchi
    • Osamu YamamotoMasayuki KinouchiNaoki TakadaYoji KaseMasao Kikuchi
    • B01D53/22B01D61/58B01D71/02B01D71/64B01D69/08
    • B01D63/02B01D53/22B01D53/226B01D2313/18B01D2313/90
    • A halide gas separating and collecting device for separating and collecting halide gas from mixed gas containing the halide gas, wherein at least first and second stage separating membrane modules are stacked in multiple stages. The method comprises: feeding the mixed gas to the inlet of the first stage separating membrane module, feeding the gas passed through the previous separating membrane module to the inlets of the second and subsequent stage separating membrane modules, recycling the gas unpassed through the second and subsequent stage separating membrane modules to the inlet of the first stage separating membrane module, and controlling the flow of gas unpassed through the first stage separating membrane module by a control valve connected to the unpassed gas outlet of the first stage separating membrane module, whereby the halide gas can be separated and collected as unpassed gas at a high density and a high collection rate.
    • 一种用于从含有卤化物气体的混合气体中分离和收集卤化物气体的卤化物气体分离和收集装置,其中至少第一和第二级分离膜组件以多级堆叠。 该方法包括:将混合气体输送到第一级分离膜组件的入口,将通过先前分离膜组件的气体输送到第二级和后级分离膜组件的入口,循环通过第二和第二分离膜组件的气体, 后续阶段将膜组件分离到第一级分离膜组件的入口,并且通过连接到第一级分离膜组件的未通过的气体出口的控制阀来控制未通过第一级分离膜组件的气体流,由此 卤化物气体可以以高密度和高收集速率被分离和收集为未通过的气体。