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1. 发明授权

US06791233B2 Semiconductor device 失效
标题翻译：半导体器件
公开(公告)号：US06791233B2
公开(公告)日：2004-09-14
申请号：US10053576
申请日：2002-01-24
申请人： Shigeaki Tomonari , Hitoshi Yoshida , Masanao Kamakura , Hiroshi Kawada , Masaaki Saito , Kazuhiro Nobutoki , Jun Ogihara , Shuichi Nagao
发明人： Shigeaki Tomonari , Hitoshi Yoshida , Masanao Kamakura , Hiroshi Kawada , Masaaki Saito , Kazuhiro Nobutoki , Jun Ogihara , Shuichi Nagao
IPC分类号： H02N1000
CPC分类号： F15C5/00 , F16K99/0001 , F16K99/0009 , F16K99/0044 , F16K2099/0074 , F16K2099/008 , H01H2061/006
摘要： A flexible area 2 is joined at one end via a thermal insulation area 7 to a semiconductor substrate 3 which becomes a frame and at an opposite end to a moving element 5. The thermal insulation area 7 is made of a thermal insulation material a resin such as polyimide or a fluoridated resin. The flexible area 2 is made up of a thin portion 2S and a thin film 2M different in thermal expansion coefficient. When a diffused resistor 6 formed on the surface of the thin portion 2S is heated, the flexible area 2 is displaced because of the thermal expansion difference between the thin portion 2S and the thin film 2M, and the moving element 5 is displayed with respect to the semiconductor substrate 3.
摘要翻译：柔性区域2的一端经由隔热区域7连接到半导体基板3，该半导体基板3成为框架并且在与移动元件5相反的端部。绝热区域7由诸如以下的树脂的绝热材料制成作为聚酰亚胺或氟化树脂。柔性区域2由薄的部分2S和热膨胀系数不同的薄膜2M组成。当形成在薄部分2S的表面上的扩散电阻器6被加热时，柔性区域2由于薄部分2S和薄膜2M之间的热膨胀差异而移位，并且移动元件5相对于半导体衬底3。

2. 发明授权

US06384509B1 Semiconductor device 失效
标题翻译：半导体器件
公开(公告)号：US06384509B1
公开(公告)日：2002-05-07
申请号：US09511948
申请日：2000-02-23
申请人： Shigeaki Tomonari , Hitoshi Yoshida , Masanao Kamakura , Hiroshi Kawada , Masaaki Saito , Kazuhiro Nobutoki , Jun Ogihara , Shuichi Nagao
发明人： Shigeaki Tomonari , Hitoshi Yoshida , Masanao Kamakura , Hiroshi Kawada , Masaaki Saito , Kazuhiro Nobutoki , Jun Ogihara , Shuichi Nagao
IPC分类号： F03G706
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0007 , F16K99/0009 , F16K99/0015 , F16K99/0044 , F16K2099/0074 , F16K2099/008 , H01H2061/006
摘要： A flexible area 2 is joined at one end via a thermal insulation area 7 to a semiconductor substrate 3 which becomes a frame and at an opposite end to a moving element 5. The thermal insulation area 7 is made of a thermal insulation material a resin such as polyimide or a fluoridated resin. The flexible area 2 is made up of a thin portion 2S and a thin film 2M different in thermal expansion coefficient. When a diffused resistor 6 formed on the surface of the thin portion 2S is heated, the flexible area 2 is displaced because of the thermal expansion difference between the thin portion 2S and the thin film 2M, and the moving element 5 is displayed with respect to the semiconductor substrate 3.
摘要翻译：柔性区域2的一端经由隔热区域7连接到半导体基板3，该半导体基板3成为框架并且在与移动元件5相对的端部。绝热区域7由诸如以下的树脂的绝热材料制成作为聚酰亚胺或氟化树脂。柔性区域2由薄的部分2S和热膨胀系数不同的薄膜2M组成。当形成在薄部分2S的表面上的扩散电阻器6被加热时，柔性区域2由于薄部分2S和薄膜2M之间的热膨胀差异而移位，并且移动元件5相对于半导体衬底3。

3. 发明授权

US07468571B2 Electrostatically driven latchable actuator system 失效
标题翻译：静电驱动的可锁定致动器系统
公开(公告)号：US07468571B2
公开(公告)日：2008-12-23
申请号：US10569101
申请日：2004-08-25
申请人： Hiroshi Harada , Naomasa Oka , Yuji Suzuki , Hiroshi Fukshima , Hiroshi Noge , Jun Ogihara , Kiyohiko Kawano
发明人： Hiroshi Harada , Naomasa Oka , Yuji Suzuki , Hiroshi Fukshima , Hiroshi Noge , Jun Ogihara , Kiyohiko Kawano
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/355 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B26/02 , H01H59/0009 , H01H2001/0047
摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
摘要翻译：静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。致动器被弹性地支撑到基板上，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置，再次被锁在那里。

4. 发明授权

US07422928B2 Process for fabricating a micro-electro-mechanical system with movable components 有权
标题翻译：用于制造具有可移动部件的微机电系统的工艺
公开(公告)号：US07422928B2
公开(公告)日：2008-09-09
申请号：US10572554
申请日：2004-09-12
申请人： Naomasa Oka , Hiroshi Harada , Jun Ogihara , Hiroshi Fukshima , Hiroshi Noge , Yuji Suzuki , Kiyohiko Kawano , Takaaki Yoshihara , Masahiko Suzumura
发明人： Naomasa Oka , Hiroshi Harada , Jun Ogihara , Hiroshi Fukshima , Hiroshi Noge , Yuji Suzuki , Kiyohiko Kawano , Takaaki Yoshihara , Masahiko Suzumura
IPC分类号： H01L21/00 , H02N1/00
CPC分类号： G02B26/0816 , B81B3/0086 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C2201/0109 , B81C2201/019 , G02B6/3516 , G02B6/3518 , G02B6/3546 , G02B6/355 , G02B6/357 , G02B6/3584 , H02N1/008
摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.
摘要翻译：一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。该方法利用与下基板分开的上基板。在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。下基板在其顶表面上形成有至少一个凹部。然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许它们相对于下基板移动，同时保持固定部件固定在下基板。

5. 发明申请

US20100193428A1 SUPPORT FOR SEPARATION MEMBRANE, AND METHOD FOR PRODUCTION THEREOF 有权
标题翻译：分离膜的支持及其生产方法
公开(公告)号：US20100193428A1
公开(公告)日：2010-08-05
申请号：US12670721
申请日：2008-07-28
申请人： Ryoichi Hane , Jun Ogihara , Hiroyuki Matsuura , Yohei Nakano , Naoki Shibusawa , Tatsuya Kajino , Yoshikazu Yakake
发明人： Ryoichi Hane , Jun Ogihara , Hiroyuki Matsuura , Yohei Nakano , Naoki Shibusawa , Tatsuya Kajino , Yoshikazu Yakake
IPC分类号： B01D69/10 , D04H13/00 , B32B5/26 , B01D67/00
CPC分类号： B01D69/10 , B01D71/68 , B32B5/022 , B32B5/08 , B32B5/22 , B32B5/26 , B32B2250/20 , B32B2262/0276 , B32B2262/12 , B32B2307/40 , B32B2307/50 , B32B2307/538 , B32B2307/54 , B32B2307/718 , B32B2307/72 , B32B2307/724 , B32B2307/734 , D04H3/16 , Y10T442/60 , Y10T442/66 , Y10T442/671 , Y10T442/681
摘要： A support for a separation membrane includes a long-fiber nonwoven fabric composed of thermoplastic continuous filaments.
摘要翻译：分离膜的支持体包括由热塑性连续长丝构成的长纤维无纺布。

6. 发明申请

US20060261702A1 Electrostatically driven latchable actuator system 失效
标题翻译：静电驱动的可锁定致动器系统
公开(公告)号：US20060261702A1
公开(公告)日：2006-11-23
申请号：US10569101
申请日：2004-08-25
申请人： Hiroshi Harada , Naomasa Oka , Yuji Suzuki , Hiroshi Fukshima , Hiroshi Noge , Jun Ogihara , Kiyohiko Kawano
发明人： Hiroshi Harada , Naomasa Oka , Yuji Suzuki , Hiroshi Fukshima , Hiroshi Noge , Jun Ogihara , Kiyohiko Kawano
IPC分类号： G02B6/26 , G02B26/00 , H02N1/00
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/355 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B26/02 , H01H59/0009 , H01H2001/0047
摘要： An electrostatically driven latchable actuator system has an actuator and a pair of side effectors on opposite ends of the actuator. The actuator is resiliently supported to a substrate and is movable along a linear axis between two operative positions as being electrically attracted to one of the side effectors. A latch mechanism is provided to mechanically latch the actuator at either of the operative positions. The side effectors are movably towards and away from the actuator along the linear axis between a normal position and a shifted position close to the actuator. Both of the side effectors are also resiliently supported to the substrate to be movable towards the actuator by being electrostatically attracted thereto and away from the actuator by resiliency. The moving side effector is interlocked to the latch mechanism through a mechanical link so as to unlatch the actuator in response to one of the side effectors being attracted to the actuator, and allow the actuator to move from one operative position to the other operative position to be again latched thereat.
摘要翻译：静电驱动的可闩锁致动器系统在致动器的相对端具有致动器和一对副作用器。致动器被弹性地支撑到基板上，并且可以沿着线性轴线在两个操作位置之间移动，从而被电吸引到一个副作用器。提供闩锁机构以在执行位置的任一位置机械地闩锁致动器。副作用器可沿着线性轴线在致动器之间朝向和远离致动器移动，在正常位置和靠近致动器的移位位置之间。两个副作用器也被弹性地支撑到基板上，以通过静电吸引到致动器并且通过弹性远离致动器而朝向致动器移动。运动侧执行器通过机械连杆与闩锁机构互锁，以响应于一个副作用器被吸引到致动器而解锁致动器，并允许致动器从一个操作位置移动到另一操作位置，再次被锁在那里。

7. 发明授权

US08424687B2 Support for separation membrane, and method for production thereof 有权
标题翻译：分离膜的支持及其制造方法
公开(公告)号：US08424687B2
公开(公告)日：2013-04-23
申请号：US12670721
申请日：2008-07-28
申请人： Ryoichi Hane , Jun Ogihara , Hiroyuki Matsuura , Yohei Nakano , Naoki Shibusawa , Tatsuya Kajino , Yoshikazu Yakake
发明人： Ryoichi Hane , Jun Ogihara , Hiroyuki Matsuura , Yohei Nakano , Naoki Shibusawa , Tatsuya Kajino , Yoshikazu Yakake
IPC分类号： B01D69/10 , B01D67/00 , D04H13/00 , B32B5/26
CPC分类号： B01D69/10 , B01D71/68 , B32B5/022 , B32B5/08 , B32B5/22 , B32B5/26 , B32B2250/20 , B32B2262/0276 , B32B2262/12 , B32B2307/40 , B32B2307/50 , B32B2307/538 , B32B2307/54 , B32B2307/718 , B32B2307/72 , B32B2307/724 , B32B2307/734 , D04H3/16 , Y10T442/60 , Y10T442/66 , Y10T442/671 , Y10T442/681
摘要： A support for a separation membrane includes a long-fiber nonwoven fabric composed of thermoplastic continuous filaments.
摘要翻译：分离膜的支持体包括由热塑性连续长丝构成的长纤维无纺布。

8. 发明申请

US20070128831A1 Process for fabricating a micro-electro-mechanical system with movable components 有权
标题翻译：用于制造具有可移动部件的微电机系统的工艺
公开(公告)号：US20070128831A1
公开(公告)日：2007-06-07
申请号：US10572554
申请日：2004-09-12
申请人： Naomasa Oka , Hiroshi Harada , Jun Ogihara , Hiroshi Fukshima , Hiroshi Noge , Yuji Suzuki , Kiyohiko Kawano , Takaaki Yoshihara , Masahiko Suzumura
发明人： Naomasa Oka , Hiroshi Harada , Jun Ogihara , Hiroshi Fukshima , Hiroshi Noge , Yuji Suzuki , Kiyohiko Kawano , Takaaki Yoshihara , Masahiko Suzumura
IPC分类号： H01L21/30
CPC分类号： G02B26/0816 , B81B3/0086 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C2201/0109 , B81C2201/019 , G02B6/3516 , G02B6/3518 , G02B6/3546 , G02B6/355 , G02B6/357 , G02B6/3584 , H02N1/008
摘要： A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.
摘要翻译：一种用于制造由固定地支撑在下基板上的固定部件和可移动地支撑在下基板上的可移动部件的微机电系统（MEMS）的制造方法。该方法利用与下基板分开的上基板。在其顶层中选择性地蚀刻上基板，以在其中形成多个从上基板的底层共同突出的柱。支柱包括要固定到下基板的固定部件和仅弹性地支撑到一个或多个固定部件以相对于固定部件可移动的可动部件。下基板在其顶表面上形成有至少一个凹部。然后将上基板以这样的方式上下连接到下基板的顶部，以将固定部件直接放置在下基板上并将可移动部件放置在凹部的上方。最后，去除上基板的底层以从底层释放可移动部件，用于使可移动部件浮动在凹部上方并允许它们相对于下基板移动，同时保持固定部件固定在下基板。

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