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1. 发明授权

US07938547B2 Coherent light display system 有权
标题翻译：相干光显示系统
公开(公告)号：US07938547B2
公开(公告)日：2011-05-10
申请号：US12061254
申请日：2008-04-02
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： G03B21/28 , G03B21/26 , G02B26/08 , G02B26/10 , G02B26/12
CPC分类号： H04N9/3161 , H01S3/2391 , H04N9/3129
摘要： A display system includes a coherent light source that can emit a coherent light beam, an optical component that can direct the coherent light beam to a spatial light modulator, a transport mechanism that can move the optical component to produce a movement in the coherent light beam, and a spatial light modulator having a two-dimensional array of mirrors each configured to selectively reflect the coherent light beam either toward a screen surface or away from the screen surface to form a display pixel on the screen surface. A display image is formed on the display screen by display pixels produced by the mirrors that reflect the coherent light beam toward the screen surface.
摘要翻译：显示系统包括可发射相干光束的相干光源，可将相干光束引导到空间光调制器的光学部件，可移动光学部件以产生相干光束中的运动的传输机构以及具有二维阵列阵列的空间光调制器，其各自被配置为选择性地将相干光束朝向屏幕表面或远离屏幕表面反射以在屏幕表面上形成显示像素。显示图像通过由反射相干光束朝向屏幕表面的反射镜产生的显示像素在显示屏上形成。

2. 发明申请

US20100033799A1 PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER 有权
公开(公告)号：US20100033799A1
公开(公告)日：2010-02-11
申请号：US12186747
申请日：2008-08-06
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： G02B26/00 , H01L21/66
CPC分类号： G02B26/101 , G02B26/0833
摘要： A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.

3. 发明授权

US07800810B2 Packaging and testing of multiple MEMS devices on a wafer 有权
标题翻译：在晶片上封装和测试多个MEMS器件
公开(公告)号：US07800810B2
公开(公告)日：2010-09-21
申请号：US12186747
申请日：2008-08-06
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： G02B26/00 , H01L23/58 , H01L21/66
CPC分类号： G02B26/101 , G02B26/0833
摘要： A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.
摘要翻译：包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。

4. 发明授权

US07763962B2 Wafer-level packaging of micro devices 有权
标题翻译：微型器件的晶圆级封装
公开(公告)号：US07763962B2
公开(公告)日：2010-07-27
申请号：US11558883
申请日：2006-11-10
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： H01L23/20
CPC分类号： B81C1/00285 , G02B26/0841 , H01L23/26 , H01L2924/0002 , H01L2924/12044 , Y10S257/913 , H01L2924/00
摘要： An encapsulated device includes a micro device on a substrate, a cover bonded to the substrate thereby forming a chamber to encapsulate the micro device, and a desiccant material on the cover and in the chamber. An anti-stiction material is absorbed in the desiccant material.
摘要翻译：封装装置包括在基板上的微型装置，与基板结合的盖，从而形成用于封装微型装置的腔室，以及在盖子和腔室中的干燥剂材料。抗静电材料被吸收在干燥剂材料中。

5. 发明授权

US08507297B2 Packaging and testing of multiple MEMS devices on a wafer 有权
标题翻译：在晶片上封装和测试多个MEMS器件
公开(公告)号：US08507297B2
公开(公告)日：2013-08-13
申请号：US12856981
申请日：2010-08-16
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： H01L21/66
CPC分类号： G02B26/101 , G02B26/0833
摘要： A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.
摘要翻译：包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。

6. 发明申请

US20090252186A1 COHERENT LIGHT DISPLAY SYSTEM 有权
标题翻译：相干灯显示系统
公开(公告)号：US20090252186A1
公开(公告)日：2009-10-08
申请号：US12061254
申请日：2008-04-02
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： H01S3/10
CPC分类号： H04N9/3161 , H01S3/2391 , H04N9/3129
摘要： A display system includes a coherent light source that can emit a coherent light beam, an optical component that can direct the coherent light beam to a spatial light modulator, a transport mechanism that can move the optical component to produce a movement in the coherent light beam, and a spatial light modulator having a two-dimensional array of mirrors each configured to selectively reflect the coherent light beam either toward a screen surface or away from the screen surface to form a display pixel on the screen surface. A display image is formed on the display screen by display pixels produced by the mirrors that reflect the coherent light beam toward the screen surface.
摘要翻译：显示系统包括可发射相干光束的相干光源，可将相干光束引导到空间光调制器的光学部件，可移动光学部件以产生相干光束中的运动的传输机构以及具有二维阵列阵列的空间光调制器，其各自被配置为选择性地将相干光束朝向屏幕表面或远离屏幕表面反射以在屏幕表面上形成显示像素。显示图像通过由反射相干光束朝向屏幕表面的反射镜产生的显示像素在显示屏上形成。

7. 发明申请

US20100311192A1 PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER 有权
标题翻译：多个MEMS器件在波形上的包装和测试
公开(公告)号：US20100311192A1
公开(公告)日：2010-12-09
申请号：US12856981
申请日：2010-08-16
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： H01L21/66
CPC分类号： G02B26/101 , G02B26/0833
摘要： A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.
摘要翻译：包含多个电光器件的晶片，每个器件封装在具有半透明盖的腔室中。晶片上的一对互连的X-Y矩阵连接到用于寻址电光器件的电光装置的电路。这些互连对延伸到包围器件的外部的外部到晶圆周边的测试区域。通过互连施加的信号进行测试，同时通过半透明盖将设备曝光。

8. 发明申请

US20080112037A1 HERMETIC SEALING OF MICRO DEVICES 审中-公开
标题翻译：微型器件的封闭密封
公开(公告)号：US20080112037A1
公开(公告)日：2008-05-15
申请号：US11558888
申请日：2006-11-10
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： G02B26/00 , H01L21/52
CPC分类号： B81C1/00293 , B81B2203/0384 , B81C2203/0118 , B81C2203/0136 , B81C2203/019 , H01L23/041 , H01L23/10 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： A method for packaging a micro device includes encapsulating a micro device in a chamber on a substrate, wherein the chamber is defined by spacer walls and an encapsulation cover, removing a portion of the encapsulation cover and portions of the spacer walls to expose a surfaces of the spacer walls, and forming a layer of a sealing material on the exposed surfaces of the spacer walls to hermetically seal the micro device in the chamber.
摘要翻译：用于封装微器件的方法包括将微器件封装在衬底上的腔室中，其中腔室由间隔壁和封装盖限定，去除封装盖的一部分和间隔壁的部分以暴露出间隔壁，并且在间隔壁的暴露表面上形成密封材料层，以密封腔室中的微器件。

9. 发明申请

US20080111203A1 WAFER-LEVEL PACKAGING OF MICRO DEVICES 有权
标题翻译：微型器件的水平包装
公开(公告)号：US20080111203A1
公开(公告)日：2008-05-15
申请号：US11558883
申请日：2006-11-10
申请人： Shaoher X. Pan , Vlad Novotny
发明人： Shaoher X. Pan , Vlad Novotny
IPC分类号： H01L29/84 , H01L21/52
CPC分类号： B81C1/00285 , G02B26/0841 , H01L23/26 , H01L2924/0002 , H01L2924/12044 , Y10S257/913 , H01L2924/00
摘要： An encapsulated device includes a micro device on a substrate, a cover bonded to the substrate thereby forming a chamber to encapsulate the micro device, and a desiccant material on the cover and in the chamber. An anti-stiction material is absorbed in the desiccant material.
摘要翻译：封装装置包括在基板上的微型装置，与基板结合的盖，从而形成用于封装微型装置的腔室，以及在盖子和腔室中的干燥剂材料。抗静电材料被吸收在干燥剂材料中。

10. 发明授权

US07443572B2 Fast-response spatial light modulator 有权
标题翻译：快速响应空间光调制器
公开(公告)号：US07443572B2
公开(公告)日：2008-10-28
申请号：US11297162
申请日：2005-12-07
申请人： Shaoher X. Pan , Vlad Novotny , Xuchun Liu
发明人： Shaoher X. Pan , Vlad Novotny , Xuchun Liu
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a cavity having an opening on the lower surface; a substrate comprising an upper surface, a hinge support post in connection with the upper surface, and a hinge component supported by the hinge support post and in connection with the mirror plate; and a landing tip having a laterally extended upper portion and a vertically extended lower portion in connection with the substrate and the vertically extended lower portion. The laterally extended upper portion can contact the lower surface of the mirror plate to limit the rotation of the mirror plate. The hinge component extends into the cavity and can facilitate a rotation of the mirror plate.
摘要翻译：一种空间光调制器包括一个反射镜板，该反射板包括反射上表面，下表面和在下表面上具有开口的空腔; 包括上表面的衬底，与所述上表面相关的铰链支撑柱以及由所述铰链支撑柱支撑并与所述镜板连接的铰链部件; 以及具有与基底和垂直延伸的下部相连的横向延伸的上部和垂直延伸的下部的着陆尖端。横向延伸的上部可以接触镜板的下表面以限制镜板的旋转。铰链部件延伸到空腔中并且可以促进镜板的旋转。

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