会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • METHOD OF MANUFACTURING FILM BULK ACOUSTIC WAVE RESONATOR
    • 制造膜片声波谐波器的方法
    • US20070044296A1
    • 2007-03-01
    • US11466680
    • 2006-08-23
    • Tae Yeol JeonChul Hwan JungSung Hwan LeeIn Jeong
    • Tae Yeol JeonChul Hwan JungSung Hwan LeeIn Jeong
    • H04R17/00
    • H04R17/00Y10T29/42Y10T29/49005Y10T29/4908
    • The invention relates to a method of manufacturing an FBAR having a cap made of solid metal. The method includes preparing a substrate and stacking a lower electrode, a piezoelectric film and an upper electrode on the substrate to form a resonance region. The method also includes forming a passivation layer above substantially an entire area of the resonance region and its adjacent region to protect the resonance region and forming a first photoresist layer on the passivation layer. The first photoresist layer exposes a sidewall region which surrounds the resonance region. The method further includes filling in the sidewall region with metal and forming a roof with the same metal on the resonance region surrounded by the sidewall region, thereby forming a cap composed of the sidewall and the roof.
    • 本发明涉及制造具有由固体金属制成的盖的FBAR的方法。 该方法包括在衬底上制备衬底并堆叠下电极,压电膜和上电极以形成谐振区域。 该方法还包括在谐振区域及其相邻区域的基本上整个区域上方形成钝化层,以保护谐振区域并在钝化层上形成第一光致抗蚀剂层。 第一光致抗蚀剂层暴露围绕谐振区域的侧壁区域。 该方法还包括用金属填充侧壁区域并在由侧壁区域包围的共振区域上形成具有相同金属的屋顶,由此形成由侧壁和屋顶构成的盖。