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    • 7. 发明申请
    • MASK ROM CELL, NOR-TYPE MASK ROM DEVICE, AND RELATED METHODS OF FABRICATION
    • 掩模ROM单元,NOR型掩模ROM设备和相关的制造方法
    • US20080014691A1
    • 2008-01-17
    • US11774724
    • 2007-07-09
    • Hee-Seog JEONJeong-Uk HAN
    • Hee-Seog JEONJeong-Uk HAN
    • H01L21/8234
    • H01L27/105H01L21/823418H01L27/1052H01L27/112H01L27/11266H01L27/11293
    • A mask read-only memory (ROM) cell, a method for fabricating the mask ROM cell, a NOR-type mask ROM device, and a method for fabricating the NOR-type mask ROM device are disclosed. A mask ROM cell includes a substrate including an ON cell region and an OFF cell region, a first gate electrode disposed in the ON cell region, and a second gate electrode disposed in the OFF cell region. The mask ROM cell also includes a first impurity region disposed in the substrate proximate a sidewall of the first gate electrode, wherein a portion of the first impurity region is disposed under the first gate electrode; and a second impurity region disposed the substrate proximate a sidewall of the second gate electrode, wherein no portion of the second impurity region is disposed under the second gate electrode.
    • 公开了一种掩模只读存储器(ROM)单元,用于制造掩模ROM单元的方法,NOR型掩模ROM器件和用于制造NOR型掩模ROM器件的方法。 掩模ROM单元包括包括ON单元区域和OFF单元区域的基板,设置在ON单元区域中的第一栅极电极和设置在OFF单元区域中的第二栅电极。 掩模ROM单元还包括靠近第一栅电极的侧壁设置在基板中的第一杂质区,其中第一杂质区的一部分设置在第一栅电极下方; 以及第二杂质区域,其将所述基板设置在所述第二栅电极的侧壁附近,其中所述第二杂质区域的部分没有设置在所述第二栅电极下方。