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    • 4. 发明授权
    • Methothology for estimating statistical distribution characteristics of product parameters
    • 用于估计产品参数的统计分布特征的方法
    • US07343215B2
    • 2008-03-11
    • US11656715
    • 2007-01-23
    • Sung-Hee YunSeung-Ho JungDae-Wook KimMoon-Hyun YooJong-Bae Lee
    • Sung-Hee YunSeung-Ho JungDae-Wook KimMoon-Hyun YooJong-Bae Lee
    • G06F19/00
    • G06F17/5036G01R31/318357
    • Disclosed is method for estimating statistical distribution characteristics of product parameters. The method comprises determining n number of product parameters, which characterize a product, and m number of characteristic parameters dependent on the product parameters, determining m number of correlation functions that represent the characteristic parameters in terms of the product parameters, and obtaining inverse functions of the correlation functions that represent the product parameters in terms of the characteristic parameters. After fabricating test products to empirically determine quantitative relations between the product and characteristic parameters, the method includes measuring k number of test products and preparing measured data of the characteristic parameters. Thereafter, the method includes estimating statistical characteristics of the product parameters corresponding with a distribution of the measured data of the characteristic parameters using inverse functions of the correlation functions.
    • 公开了用于估计产品参数的统计分布特征的方法。 该方法包括:根据产品参数确定n个产品参数,表征产品,以及m个特征参数,根据产品参数确定表示特征参数的m个相关函数,并获得 根据特征参数表示产品参数的相关函数。 在制作测试产品以经验确定产品与特征参数的定量关系后,该方法包括测量k个测试产品并准备特征参数的测量数据。 此后,该方法包括使用相关函数的反函数来估计与特征参数的测量数据的分布相对应的乘积参数的统计特性。
    • 8. 发明授权
    • Method of creating a layout of a set of masks
    • 创建一组掩码的布局的方法
    • US07361435B2
    • 2008-04-22
    • US11289204
    • 2005-11-28
    • Chul-Hong ParkMoon-Hyun YooYoo-Hyon KimDong-Hyun KimSoo-Han Choi
    • Chul-Hong ParkMoon-Hyun YooYoo-Hyon KimDong-Hyun KimSoo-Han Choi
    • G03F1/00G03F1/14G06F17/50
    • G03F1/30G03F1/32G03F1/70G03F7/70466
    • A method of creating a layout of a set of masks including an alternating phase shifting mask (APSM) and a halftone phase shifting trim mask (HPSTM) is provided. The APSM includes first and second phase shifting areas and a first opaque pattern. The first and second phase shifting areas are disposed adjacent to each other and have different phases for generating destructive interference. Further, the first and second phase shifting areas define an access interconnection line. The first opaque pattern is formed on a transparent substrate to define the first and second phase shifting areas. The HPSTM includes a second opaque pattern on the transparent substrate and a halftone pattern. The second opaque pattern prevents an access interconnection line from being erased. The halftone pattern defines a pass interconnection line connected to the access interconnection line.
    • 提供了一种创建包括交替相移掩模(APSM)和半色调相移修剪蒙版(HPSTM)的掩模组的布局的方法。 APSM包括第一和第二相移区域和第一不透明图案。 第一和第二相移区域彼此相邻设置并且具有不同的相位以产生破坏性干扰。 此外,第一和第二相移区域限定了接入互连线。 第一不透明图案形成在透明基板上以限定第一和第二相移区域。 HPSTM在透明基板上包括第二不透明图案和半色调图案。 第二个不透明图案防止访问互连线被擦除。 半色调图案定义了连接到接入互连线的通过互连线。