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1. 发明授权

US09274021B2 Leakage inspection apparatus and leakage inspection method 有权
标题翻译：泄漏检查装置和泄漏检查方法
公开(公告)号：US09274021B2
公开(公告)日：2016-03-01
申请号：US13808226
申请日：2011-07-01
申请人： Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
发明人： Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
IPC分类号： G01M3/20 , G01M3/22 , G01M3/32
CPC分类号： G01M3/20 , G01M3/229 , G01M3/3281
摘要： Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber 21. The leakage inspection apparatus includes liquid supplying and pressurizing means 11 for supplying a probe liquid to the inside of the tested-body chamber 21 and pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means 22-b, 23-b and a quadrupole mass spectrometer 34. The tested body 21 is evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer 34, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.
摘要翻译：提供了一种用于检查设置在被测体室21中的被测体的泄漏流量的泄漏检查装置和泄漏检查方法。泄漏检查装置包括用于向内部供给探针液的液体供给和加压装置11 的试验体室21，将探针液加压至高压0.1MPa以上的真空排气装置22-b，23-b和四极质谱仪34.将被检体21抽真空，供给探针液到被测体的内部并加压到0.1MPa以上，并且通过四极质谱仪34测量从测试体泄漏并在真空中蒸发的探针介质的浓度，由此测量来自测试体的泄漏流量身体。这使得可以使用液体作为探针介质来确定泄漏流量，并且同时可以在大气压为0.1MPa以上，特别是在1MPa〜1GPa的高压下进行压力密封性检查。

2. 发明申请

US20130199274A1 LEAKAGE INSPECTION APPARATUS AND LEAKAGE INSPECTION METHOD 有权
标题翻译：泄漏检查装置和泄漏检查方法
公开(公告)号：US20130199274A1
公开(公告)日：2013-08-08
申请号：US13808226
申请日：2011-07-01
申请人： Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
发明人： Setsuo Yamamoto , Hiroki Kurisu , Naoki Takada , Mitsugu Nakagawa , Katsushi Tsuge , Yukihiro Ishikawa
IPC分类号： G01M3/20
CPC分类号： G01M3/20 , G01M3/229 , G01M3/3281
摘要： Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber 21. The leakage inspection apparatus includes liquid supplying and pressurizing means 11 for supplying a probe liquid to the inside of the tested-body chamber 21 and pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means 22-b, 23-b and a quadrupole mass spectrometer 34. The tested body 21 is evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer 34, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.
摘要翻译：提供了一种用于检查设置在被测体室21中的被测体的泄漏流量的泄漏检查装置和泄漏检查方法。泄漏检查装置包括用于向内部供给探针液的液体供给和加压装置11 的试验体室21，将探针液加压至高压0.1MPa以上的真空排气装置22-b，23-b和四极质谱仪34.将被检体21抽真空，供给探针液到被测体的内部并加压到0.1MPa以上，并且通过四极质谱仪34测量从测试体泄漏并在真空中蒸发的探针介质的浓度，由此测量来自测试体的泄漏流量身体。这使得可以使用液体作为探针介质来确定泄漏流量，并且同时可以在大气压为0.1MPa以上，特别是在1MPa〜1GPa的高压下进行压力密封性检查。

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