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1. 发明申请

US20120086149A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 有权
标题翻译：印刷装置和制品制造方法
公开(公告)号：US20120086149A1
公开(公告)日：2012-04-12
申请号：US13268351
申请日：2011-10-07
申请人： Setsuo YOSHIDA , Noriyasu HASEGAWA , Yoshihiro SHIODE , Tatsuya HAYASHI
发明人： Setsuo YOSHIDA , Noriyasu HASEGAWA , Yoshihiro SHIODE , Tatsuya HAYASHI
IPC分类号： B28B11/08 , B28B17/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.
摘要翻译：本发明的压印装置使用模具将压印材料模制在基板上，并固化压印材料以在基板上形成图案。该装置包括：支架，其构造成吸引模具以保持模具; 以及减压装置，其构造成减小由所述保持器保持的模具的背压，其中所述装置构造成与所述压模材料的模具释放平行地减小所述减压装置的背压。

2. 发明申请

US20120257180A1 METHOD OF CLEANING PIPE OF IMMERSION EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE 审中-公开
标题翻译：浸渍曝光装置的清洗方法及制造装置的方法
公开(公告)号：US20120257180A1
公开(公告)日：2012-10-11
申请号：US13439015
申请日：2012-04-04
申请人： Masayuki TANABE , Keiko CHIBA , Tatsuya HAYASHI
发明人： Masayuki TANABE , Keiko CHIBA , Tatsuya HAYASHI
IPC分类号： G03B27/52
CPC分类号： G03F7/70925 , G03F7/70341
摘要： A method of cleaning a supply pipe of an immersion exposure apparatus includes a cycle including a step of increasing a flow rate of a cleaning liquid via a supply pipe, which supplies a liquid to a gap between a substrate and a final surface of a projection optical system, and a step of decreasing the flow rate, wherein the cycle is executed a plurality of times after one of completion of one of setting and maintenance of the immersion exposure apparatus and completion of exposure of at least one substrate, and before exposure of a first shot region on a new substrate using the immersion exposure apparatus.
摘要翻译：清洗浸渍曝光装置的供给管的方法包括：循环，包括通过供给管增加清洗液的流量的步骤，所述供给管将液体供应到基板与投影光学的最终表面之间的间隙系统，以及降低流量的步骤，其中在完成浸没曝光设备的设置和维护之一之一以及完成至少一个基板的曝光之后以及在曝光之前多次执行循环使用浸渍曝光装置在新基板上的第一曝光区域。

3. 发明申请

US20110039455A1 PUSH-TYPE CONNECTOR 失效
标题翻译：推式连接器
公开(公告)号：US20110039455A1
公开(公告)日：2011-02-17
申请号：US12989106
申请日：2009-03-24
申请人： Tatsuya HAYASHI
发明人： Tatsuya HAYASHI
IPC分类号： H01R4/48
CPC分类号： H01R4/4863 , H01R9/2408
摘要： Provided is a push-type connector having a structure for preventing an operational error of a lever member of the connector by an operator. A first operating part 35a of a first lever member 3a at a first position is positioned anterior to a second operating part 35b of a second lever member 3b at a third position, in relation to the pushing direction of the lever. Further, first operating part 35a of first lever member 3a projects further than second operating part 35b of second lever member 3b in the direction toward the front end of the lever or the operator side. Therefore, second lever member 3b is not likely to be an obstacle to the operation of first lever member 3a, and first lever member 3a is not likely to be an obstacle to the operation of second lever member 3b.
摘要翻译：提供了一种具有用于防止操作者对连接器的杠杆构件的操作错误的结构的推式连接器。在第一位置处的第一杆构件3a的第一操作部35a相对于杆的推动方向位于第三位置处的第二杆构件3b的第二操作部35b的前方。此外，第一杆构件3a的第一操作部35a在朝向杆的前端或操作者侧的方向上比第二杆构件3b的第二操作部35b突出。因此，第二杆构件3b不可能成为第一杆构件3a的操作的障碍物，并且第一杆构件3a不可能成为第二杆构件3b的操作的障碍。

4. 发明申请

US20130074767A1 THIN FILM FORMING APPARATUS 有权
标题翻译：薄膜成型装置
公开(公告)号：US20130074767A1
公开(公告)日：2013-03-28
申请号：US13621337
申请日：2012-09-17
申请人： Yousong JIANG , Ichiro SHIONO , Mitsuhiro MIYAUCHI , Takaaki AOYAMA , Tatsuya HAYASHI , Ekishu NAGAE
发明人： Yousong JIANG , Ichiro SHIONO , Mitsuhiro MIYAUCHI , Takaaki AOYAMA , Tatsuya HAYASHI , Ekishu NAGAE
IPC分类号： B05C13/00
CPC分类号： C23C14/042 , C23C14/04 , C23C14/24 , C23C14/50 , C23C14/505 , C23C16/04 , C23C16/042 , C23C16/4584
摘要： Provided is a thin film forming apparatus for reducing operation time and cost by forming a film only on a specific portion on substrates. A substrate holding mechanism provided in the apparatus includes: substrate holding members holding substrates in a manner that a part of a non-film forming portion of a substrate overlaps the other substrate and a film forming portion is exposed, a support member supporting the substrate holding members, and a rotation member which rotates the support member. The substrate holding members include: holding surfaces holding the substrates and disposed between a film forming source and the substrates, step portions formed between the holding surfaces in a manner that ends of the substrates respectively contact with the step portions, and opening portions formed on the holding surfaces of the portion corresponding to the film forming portion when the ends of the substrates contact with the step portions.
摘要翻译：提供了一种通过仅在基板上的特定部分上形成膜来减少操作时间和成本的薄膜形成装置。设置在该设备中的基板保持机构包括：基板保持部件，其以基板的非成膜部分的一部分与另一个基板重叠并且成膜部分露出的方式保持基板;支撑部件，其支撑基板保持构件，以及使支撑构件旋转的旋转构件。基板保持构件包括：保持基板并且配置在成膜源与基板之间的保持面，以与基板的端部分别接触的台阶部分之间形成在保持面之间的台阶部，当基板的端部与台阶部分接触时，保持对应于成膜部分的部分的表面。

5. 发明申请

US20120034824A1 PUSH-TYPE CONNECTOR 失效
标题翻译：推式连接器
公开(公告)号：US20120034824A1
公开(公告)日：2012-02-09
申请号：US13273330
申请日：2011-10-14
申请人： Tatsuya HAYASHI , Takayuki Nagumo
发明人： Tatsuya HAYASHI , Takayuki Nagumo
IPC分类号： H01R4/28
CPC分类号： H01R4/4863 , H01R9/2408
摘要： Provided is a push-type connector having a structure for preventing an operational error of a lever member of the connector by an operator. A first operating part 35a of a first lever member 3a at a first position is positioned anterior to a second operating part 35b of a second lever member 3b at a third position, in relation to the pushing direction of the lever. Further, first operating part 35a of first lever member 3a projects further than second operating part 35b of second lever member 3b in the direction toward the front end of the lever or the operator side. Therefore, second lever member 3b is not likely to be an obstacle to the operation of first lever member 3a, and first lever member 3a is not likely to be an obstacle to the operation of second lever member 3b.
摘要翻译：提供了一种具有用于防止操作者对连接器的杠杆构件的操作错误的结构的推式连接器。在第一位置处的第一杆构件3a的第一操作部35a相对于杆的推动方向位于第三位置处的第二杆构件3b的第二操作部35b的前方。此外，第一杆构件3a的第一操作部35a在朝向杆的前端或操作者侧的方向上比第二杆构件3b的第二操作部35b突出。因此，第二杆构件3b不可能成为第一杆构件3a的操作的障碍物，并且第一杆构件3a不可能成为第二杆构件3b的操作的障碍。

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