会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明授权
    • Method for making FET having reduced oxidation inductive stacking fault
    • 制造具有减少的氧化感应堆垛层错的FET的方法
    • US5677208A
    • 1997-10-14
    • US410373
    • 1995-03-24
    • Hiroyasu ItouHideya Inagaki
    • Hiroyasu ItouHideya Inagaki
    • H01L29/78H01L21/225H01L21/265H01L21/322H01L21/336H01L21/8234H01L23/544
    • H01L23/544H01L21/2253H01L21/3225H01L21/823462H01L2223/54426H01L2223/54453H01L2223/5446H01L2924/0002
    • An improved manufacturing method for a semiconductor device, which can reduce process inductive fault such as oxidation inductive stacking fault (OSF) and contribute to the improvement of the electric characteristics of the semiconductor device, is disclosed. A thermal oxide film is formed on a semiconductor substrate, then a nitride film is formed and a medium temperature heat treatment is provided to the semiconductor substrate within a temperature range from 600.degree. C. to 1,000.degree. C., whereby an interstitial oxygen concentration can be lowered. Subsequently, ion implantation, etc. are provided as a well region forming process, and a drive-in process is performed by means of a high temperature heat treatment. At this time, ion implantation dose is set to 9.times.10.sup.13 �cm.sup.-2 ! or less, and the temperature of the heat treatment is lowered or the duration of the teat treatment is shortened. After this, an element separation layer process is performed, and a gate oxide film, a gate electrode, a source/drain layer, a CVD oxide film, a contact hole and a metal wire are formed.
    • 公开了一种用于半导体器件的改进的制造方法,其可以减少诸如氧化感应堆垛层错(OSF)的处理感应故障并且有助于提高半导体器件的电特性。 在半导体衬底上形成热氧化膜,然后形成氮化物膜,并在600℃至1000℃的温度范围内向半导体衬底提供中温热处理,由此间隙氧浓度可以 被降低 随后,提供离子注入等作为阱区形成工艺,并且通过高温热处理进行驱入工艺。 此时,离子注入剂量设定为9×10 13 [cm -2]以下,热处理温度降低或乳头处理的持续时间缩短。 之后,进行元件分离层工艺,形成栅极氧化膜,栅电极,源/漏层,CVD氧化膜,接触孔和金属线。
    • 10. 发明授权
    • Method for producing a contact hole in a semiconductor device using
reflow and etch
    • 使用回流和蚀刻在半导体器件中制造接触孔的方法
    • US5552342A
    • 1996-09-03
    • US293247
    • 1994-08-19
    • Hiroyasu ItouTosiyuki MorisitaTakanori Simamoto
    • Hiroyasu ItouTosiyuki MorisitaTakanori Simamoto
    • H01L21/28H01L21/302H01L21/3065H01L21/768
    • H01L21/76802Y10S438/978
    • An LOCOS film is formed on an Si substrate, a gate oxide film and a gate electrode are formed thereon, and source/drain impurities are ion implanted into the Si substrate using the gate electrode as a mask. Then, a BPSG film is formed at a film density of 1.8 g/cm.sup.3 or more. A recessed part is formed in the BPSG film by the first photolithographic process with an etching depth of 20% or more but under 100% of the thickness of the BPSG film. Thereafter, the BPSG film is fluidized by reflow treatment to shape a part which is to be a contact hole into a funnel with an "upwards convex" curvature. Finally, the part formed into the funnel is etched to make a contact hole. As a result, wiring disconnection within the contact hole can be prevented, the diffusion depth controllability for the source/drain impurities can be improved, and the fall in the impurity density in the source/drain surface can be prevented.
    • 在Si衬底上形成LOCOS膜,在其上形成栅极氧化膜和栅电极,并且使用栅电极作为掩模将源/漏杂质离子注入到Si衬底中。 然后,以1.8g / cm 3以上的膜密度形成BPSG膜。 通过第一光刻工艺在BPSG膜中形成凹陷部分,其蚀刻深度为BPSG膜的厚度的20%以上但低于100%。 此后,通过回流处理将BPSG膜流化,将作为接触孔的部分成形为具有“向上凸起”曲率的漏斗。 最后,将形成漏斗的部分蚀刻以形成接触孔。 结果,可以防止接触孔内的布线断开,可以提高源极/漏极杂质的扩散深度可控性,并且可以防止源极/漏极表面中的杂质浓度的下降。