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1. 发明授权

US5537882A Semiconductor sensor for detecting physical amount without thermal hypsteresis where output wiring is disposed in a stress insensitive direction 失效
标题翻译：用于检测没有热电渗的物理量的半导体传感器，其中输出布线设置在不敏感的方向
公开(公告)号：US5537882A
公开(公告)日：1996-07-23
申请号：US317156
申请日：1994-10-03
申请人： Seiichi Ugai , Satoshi Shimada , Susumu Murakami , Yoshimi Yamamoto , Yukio Takahashi , Yasuo Maruyama
发明人： Seiichi Ugai , Satoshi Shimada , Susumu Murakami , Yoshimi Yamamoto , Yukio Takahashi , Yasuo Maruyama
IPC分类号： G01L9/04 , G01L9/00 , G01L9/06 , G01P1/00 , G01P15/12 , H01L29/84 , G01P15/09 , H01C10/10
CPC分类号： G01P1/006 , G01L9/0054 , G01P15/123
摘要： A sensor for detecting physical amount in which a gauge resistance value is made not to change even when a wiring material presents a yield phenomenon by wiring a wiring material Such as aluminum presenting a yield phenomenon by thermal stress in a stress insensitive direction of a piezogauge.
摘要翻译：用于检测物位量的传感器，即使当布线材料通过在压力计的应力不敏感方向上通过热应力布线布线材料（例如铝）而产生屈服现象时，也不会改变表面电阻值的物理量。

2. 发明授权

US06211772B1 Semiconductor composite sensor 失效
标题翻译：半导体复合传感器
公开(公告)号：US06211772B1
公开(公告)日：2001-04-03
申请号：US09417235
申请日：1997-09-05
申请人： Susumu Murakami , Satoshi Shimada , Seiichi Ugai , Yukio Takahashi , Shuichi Shimizu
发明人： Susumu Murakami , Satoshi Shimada , Seiichi Ugai , Yukio Takahashi , Shuichi Shimizu
IPC分类号： H01L1010
CPC分类号： G01L9/0054
摘要： A semiconductor composite sensor using a plurality of semiconductor piezoresistive gauge elements connected in series. The piezoresistive elements are separated so that a high potential terminal of one of the resistive elements having the same resistance values and the substrate of the other of the resistive elements will be connected with equal potential values. Potential difference values between semiconductor regions serving as respective resistive elements and the substrates are made equal.
摘要翻译：一种使用串联连接的多个半导体压阻式元件的半导体复合传感器。压阻元件被分离，使得具有相同电阻值的电阻元件之一的高电位端子和另一个电阻元件的衬底将以相等的电势值连接。使作为各个电阻元件的半导体区域和基板之间的电位差值相等。

3. 发明授权

US5469749A Multiple-function fluid measuring and transmitting apparatus 失效
标题翻译：多功能流体测量和传输装置
公开(公告)号：US5469749A
公开(公告)日：1995-11-28
申请号：US411922
申请日：1995-03-28
申请人： Satoshi Shimada , Seiichi Ugai , Tomoyuki Tobita , Yoshimi Yamamoto
发明人： Satoshi Shimada , Seiichi Ugai , Tomoyuki Tobita , Yoshimi Yamamoto
IPC分类号： G01F1/38 , G01F1/36 , G01F1/37 , G01F1/42 , G01F1/44 , G01F1/50 , G01F15/02 , G01F23/14 , G01F23/16 , G01L9/00 , G01L19/00 , G01L7/08
CPC分类号： G01F1/363 , G01F1/372 , G01F1/383 , G01F1/44 , G01F23/164 , G01L19/0092 , G01L9/0054
摘要： A measuring and controlling system is provided which has a control function as well as a measurement function to perform the measurement and control of fluid amounts such as the flow rate, pressure, liquid level, weight and so on by itself in the same field. A pressure receiving unit is directly mounted on a pipe or a container, in which a fluid under measurement exists, in order to detect the temperature, differential pressure and static pressure of the fluid under measurement independently of each other. Means for storing the characteristic of fluids under measurement is provided such that the mass flow rate, weight and liquid level can be calculated. By providing the transmitter with the measurement and control functions, the measurement and control of fluid amounts such as flow rate, pressure, liquid level, weight and so on can be performed in a closed form, thereby making it possible to simplify a correction procedure for the static pressure and temperature, improve the responsibility, and enhance the control performance of the whole plant. Also, a measuring and controlling system can be realized which reduces a wiring amount for connecting with an upper level control unit.
摘要翻译：提供了一种测量和控制系统，其具有控制功能和测量功能，以在相同的领域中自身进行流量，压力，液位，重量等流体量的测量和控制。压力接收单元直接安装在其上存在测量流体的管道或容器上，以便彼此独立地检测待测流体的温度，压差和静压力。提供了用于存储测量流体特性的装置，以便可以计算质量流量，重量和液位。通过向变送器提供测量和控制功能，可以以封闭形式执行流量，压力，液位，重量等流体量的测量和控制，从而可以简化对静态压力和温度，提高责任感，提高整厂的控制性能。此外，可以实现减少与上位控制单元连接的配线量的测量和控制系统。

4. 发明授权

US5429736A Detector having self-calibration function 失效
公开(公告)号：US5429736A
公开(公告)日：1995-07-04
申请号：US339709
申请日：1994-11-14
申请人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
发明人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
IPC分类号： G01N27/00 , G01D5/241 , G01D18/00 , G01N27/22 , G01P15/125 , G01P21/00 , G01N27/26
CPC分类号： G01D5/2417 , G01D18/006 , G01P21/00 , G01P2015/0828
摘要： A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

5. 发明授权

US5259248A Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor 失效
标题翻译：集成多传感器和静压差压变送器和工厂系统采用集成式多传感器
公开(公告)号：US5259248A
公开(公告)日：1993-11-09
申请号：US672113
申请日：1991-03-19
申请人： Seiichi Ugai , Satoshi Shimada , Tomoyuki Tobita , Akira Sase
发明人： Seiichi Ugai , Satoshi Shimada , Tomoyuki Tobita , Akira Sase
IPC分类号： G01L9/00 , G01L9/06 , G01L19/00 , G01L13/02
CPC分类号： G01L19/0092 , G01L9/0054 , G01L9/065
摘要： In an integrated multisensor used in a differential and static pressure transmitter, a pair of static pressure gages are formed on a static pressure detecting diaphragm and another pair of static pressure gages are formed at positions on a fixed portion which are near to the center of a differential pressure detecting diaphragm. The second term generated by a differential pressure appearing in a static pressure sensor is a function of a distance. Therefore, equal influence is exerted on each static pressure gage. Accordingly, by constructing a static pressure sensor so as to form a bridge circuit, a static pressure value free of the influence of a differential pressure can be detected, thereby making it possible to determine an accurate differential and static pressure.
摘要翻译：在用于差压静态压力变送器的集成多传感器中，静压检测膜上形成一对静压计，另一对静压计则形成在靠近中心的固定部位差压检测膜片。通过出现在静压传感器中的差压产生的第二项是距离的函数。因此，对每个静压力表施加相等的影响。因此，通过构造静压传感器以形成桥接电路，可以检测到不受压差影响的静压值，从而可以确定精确的差动静压。

6. 发明授权

US5012677A Differential pressure transmitter 失效
标题翻译：差压变送器
公开(公告)号：US5012677A
公开(公告)日：1991-05-07
申请号：US275580
申请日：1988-11-23
申请人： Satoshi Shimada , Yasushi Shimizu , Seiichi Ugai
发明人： Satoshi Shimada , Yasushi Shimizu , Seiichi Ugai
IPC分类号： G01L13/06 , G01L9/00 , G01L13/02 , G01L19/00
CPC分类号： G01L19/147 , G01L13/025 , G01L19/0092 , G01L19/0645 , G01L19/148
摘要： A differential pressure transmitter is an improvement over the drawbacks of conventional apparatuses and provides a differential pressure transmitter which compensates for adverse effects of a static pressure by using a static pressure detecting piezoresistive gauge. The transmitter includes a highly sensitive static pressure sensor with high outputs, and a composite sensor with small crosstalk between the static pressure sensor and a differential pressure sensor. The differential pressure transmitter is constructed of semiconductor sensor substrate and a fixed mount on which the sensor substrate is securely mounted; whereby the differential pressure of a fluid is detected by utilizing the difference in Young's modulus between the sensor substrate and the mount. The sensor substrate is processed on one side or on both sides to make a part of the sensor substrate thinner than the surrounding parts and thereby cause a peak stress due to a static pressure load to occur at the thin part, and a change in resistance of a semiconductor piezoresistive gauge formed at that thin portion is detected.
摘要翻译：差压变送器是对常规设备的缺点的改进，并且提供了一种通过使用静压检测压阻式压力补偿静压的不利影响的差压变送器。变送器包括具有高输出的高灵敏度静压传感器，以及静压传感器和压差传感器之间具有小串扰的复合传感器。差压变送器由半导体传感器基板和传感器基板固定在其上的固定支架构成; 由此通过利用传感器基板和安装座之间的杨氏模量的差异来检测流体的压差。传感器基板在一侧或两侧进行处理，使得传感器基板的一部分比周围部分薄，从而在薄部分产生由于静压力引起的峰值应力，并且电阻变化检测在该薄部分处形成的半导体压阻计。

7. 发明授权

US4986127A Multi-functional sensor 失效
标题翻译：多功能传感器
公开(公告)号：US4986127A
公开(公告)日：1991-01-22
申请号：US333246
申请日：1989-04-05
申请人： Satoshi Shimada , Seiichi Ugai , Akira Sase , Yasushi Shimizu
发明人： Satoshi Shimada , Seiichi Ugai , Akira Sase , Yasushi Shimizu
IPC分类号： G01L9/04 , G01F1/38 , G01K7/16 , G01L9/00 , G01L13/02 , G01L27/00 , H01L29/84
CPC分类号： G01L19/147 , G01F1/383 , G01L13/026 , G01L19/003 , G01L19/0645 , G01L9/0054 , G01L9/045
摘要： Multi-functional sensor comprises a support base made from borosilicate, a diaphragm with a E-shaped section secured to the base, the diaphragm being made from single crystalline silicon, principal plane thereof being oriented to be a crystalline plane (110), a differential pressure sensor having p-doped piezoresistor elements formed in the principal plane of the diaphragm at a thin wall portion of the E-shaped sectional diaphragm, each element being arranged along a crystal axis , a static pressure sensor having p-doped piezoresistor elements formed in the principal plane at an outer peripheral thick wall portion of the E-shaped sectional diaphragm, each element being arranged along the crystal axis , and a temperature sensor having a p-doped piezoresistor element formed in the principal plane at the outer peripheral thick wall portion of the E-shaped sectional diaphragm, the element being arranged along the crystal axis . In the multi-functional sensor thus constructed, deviation of the output signal from the differential pressure sensor due to the influence of the temperature and static pressure can be removed easily to obtain the correct signal.
摘要翻译：多功能传感器包括由硼硅酸盐制成的支撑基座，具有固定到基部的E形截面的隔膜，隔膜由单晶硅制成，其主面被定向为晶面（110），差动压电传感器，其具有在E形截面光阑的薄壁部分处形成在膜片的主平面中的p掺杂的压电电阻元件，每个元件沿着晶轴<111>布置，静压传感器具有p掺杂的压电电阻在E形截面光阑的外周厚壁部分的主平面上形成的元件，每个元件沿着晶轴<111>布置，并且具有在主平面上形成的p掺杂的压电电阻元件的温度传感器 E形截面膜片的外周厚壁部分，该元件沿着晶轴<100>排列。在这样构成的多功能传感器中，由于温度和静压的影响，输出信号与差压传感器的偏差可以容易地消除，从而获得正确的信号。

8. 发明授权

US5174884A Detector having self-calibration function 失效
标题翻译：具有自我校准功能的检测器
公开(公告)号：US5174884A
公开(公告)日：1992-12-29
申请号：US595824
申请日：1990-10-10
申请人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
发明人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
IPC分类号： G01N27/00 , G01D5/241 , G01D18/00 , G01N27/22 , G01P15/125 , G01P21/00
CPC分类号： G01D5/2417 , G01D18/006 , G01P21/00 , G01P2015/0828
摘要： A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibrating signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion whereby a self-calibration and a correction of the characteristics are performed in accordance with the amount of the change in the response.

9. 发明授权

US5574211A Detector having self-calibration function 失效
公开(公告)号：US5574211A
公开(公告)日：1996-11-12
申请号：US452698
申请日：1995-05-30
申请人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
发明人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
IPC分类号： G01N27/00 , G01D5/241 , G01D18/00 , G01N27/22 , G01P15/125 , G01P21/00 , G01P15/00
CPC分类号： G01D5/2417 , G01D18/006 , G01P21/00 , G01P2015/0828
摘要： A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.

10. 发明授权

US5391283A Detector having self-calibration function 失效
标题翻译：检测器具有自校准功能
公开(公告)号：US5391283A
公开(公告)日：1995-02-21
申请号：US985654
申请日：1992-12-07
申请人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
发明人： Satoshi Shimada , Seiko Suzuki , Shigeki Tsuchitani , Seiichi Ugai , Masayoshi Kaneyasu , Hiroshi Kuroiwa , Yoshihiro Yokota
IPC分类号： G01N27/00 , G01D5/241 , G01D18/00 , G01N27/22 , G01P15/125 , G01P21/00 , G01L1/14 , G01P15/08
CPC分类号： G01D5/2417 , G01D18/006 , G01P21/00 , G01P2015/0828
摘要： A detector for detecting a physical quantity as a quantity of electricity has a detection portion, a portion for stimulating the detection portion and a signal processing portion, wherein a calibration signal is supplied from the signal processing portion to the detection portion via the stimulating portion so as to measure a specific response of the detection portion, whereby self-calibration and correction of the characteristic of the detector are performed in accordance with an amount of a change in the response.
摘要翻译：用于检测作为电量的物理量的检测器具有检测部分，用于刺激检测部分的部分和信号处理部分，其中经由刺激部分从信号处理部分向检测部分提供校准信号，为了测量检测部分的特定响应，由此根据响应的变化量执行检测器的特性的自校准和校正。

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