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    • 4. 发明授权
    • Method and apparatus for production of fluorine-containing polyimide film
    • 含氟聚酰亚胺薄膜的制造方法和装置
    • US07364771B2
    • 2008-04-29
    • US10795122
    • 2004-03-05
    • Kozo TajiriShinichi GotoYoshinobu AsakoKumiko Kawada
    • Kozo TajiriShinichi GotoYoshinobu AsakoKumiko Kawada
    • B05D3/12
    • C08J5/18B05D1/005C08G73/1039C08J2379/08H05K1/0346
    • A method for producing a fluorine-containing polyimide film excelling in heat resistance, resistance to chemicals, water repellency, dielectric properties, electrical properties, and optical properties and a spin coater suitable for the method are to be provided. A method for the production of a fluorine-containing polyimide film which comprises forming a coating film of a fluorine-containing polyimide precursor in an atmosphere having a relative humidity thereof adjusted to a level of not more than 50 RH % and then subjecting the fluorine-containing polyimide precursor to heat treatment thereby forming a fluorine-containing polyimide film is provided. By adjusting the relative humidity in accordance with this method, the fluorine-containing polyimide precursor can be prevented from being decomposed by the absorption of moisture and consequently prevent effectively the fluorine-containing polyimide film from forming piriform spots and scratches. Further, by forming the coating film while keeping the coating film sprayed with a gas particularly during the course of spin coating thereby giving rise to a layer of air flow on the coating film, misty substances of the coating solution generated within the spin coater can be prevented from adhering again to the coating film and consequently ensure the production of a coating film of uniform quality. This formation of the layer of air flow can be facilitated by providing the spin coater with a lid and furnishing the lid with a gas feed port.
    • 本发明提供一种耐热性,耐化学品性,防水性,介电性,电性能,光学性能优异的含氟聚酰亚胺膜的制造方法和适用于该方法的旋涂机。 一种含氟聚酰亚胺薄膜的制造方法,其特征在于,在相对湿度为50%RH以下的气氛中,形成含氟聚酰亚胺前体的涂膜, 提供含有聚酰亚胺前体的热处理,从而形成含氟聚酰亚胺膜。 通过根据该方法调整相对湿度,可以防止含氟聚酰亚胺前体因吸湿而分解,从而有效地防止含氟聚酰亚胺膜形成梨状斑点和划痕。 此外,通过形成涂膜,同时特别是在旋涂过程中特别是喷涂气体的涂膜,从而在涂膜上产生空气流,在旋涂机中产生的涂布溶液中的雾状物质可以是 防止再次粘附到涂膜上,从而确保制造质量均匀的涂膜。 通过为旋转涂布机提供盖子并为盖子提供气体供给口,可以方便地形成气流层。
    • 6. 发明授权
    • Method for production of fluorine-containing aromatic compounds
    • 含氟芳香族化合物的制造方法
    • US6043397A
    • 2000-03-28
    • US139422
    • 1998-08-25
    • Seiichi TeshimaYoshinobu Asako
    • Seiichi TeshimaYoshinobu Asako
    • C07B39/00C07C17/18C07C45/41C07C45/63C07C19/08C07C25/13C07C47/52C07C47/546
    • C07C45/41C07B39/00C07C17/18C07C45/63
    • A method for the production of a fluorine-containing aromatic compound is provided which allows the relevant reaction to proceed in a standard reaction vessel such as, for example, a glass vessel at room temperature under an ambient pressure without requiring provision of such special devices as have been necessary heretofore or adoption of harsh reaction conditions. This method comprises causing an aromatic compound (A) having a cyclic skeletal part of 6 to 16 carbon atoms containing a plurality of --C(.dbd.O)X groups, wherein X stands for a hydrogen atom, a halogen atom, or an alkyl group of 1 to 10 carbon atoms, and having the remaining hydrogen atoms unsubstituted or partly or wholly substituted with at least one species of halogen atom to react with a compound (B) represented by the formula: ##STR1## wherein R.sup.1 and R.sup.2 independently stand for an alkyl group of 1 to 6 carbon atoms or a phenyl group.
    • 提供了一种制备含氟芳族化合物的方法,其允许相关反应在标准反应容器例如玻璃容器中在室温下在环境压力下进行,而不需要提供如 迄今为止还是采用了苛刻的反应条件。 该方法包括使具有6〜16个碳原子的环状骨架部分的芳香族化合物(A)含有多个-C(= O)X基团,其中X表示氢原子,卤素原子或烷基 具有1至10个碳原子,并且其余的氢原子未被取代或部分或全部被至少一种卤素原子取代,以与由下式表示的化合物(B)反应:其中R1和R2独立地表示烷基 1至6个碳原子或苯基。