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    • 2. 发明申请
    • Combined sensor and its fabrication method
    • 组合传感器及其制造方法
    • US20070062282A1
    • 2007-03-22
    • US11516927
    • 2006-09-06
    • Teruhisa AkashiRyoji OkadaMasahide HayashiKengo Suzuki
    • Teruhisa AkashiRyoji OkadaMasahide HayashiKengo Suzuki
    • G01P15/08
    • G01P15/0802G01C19/5719G01P15/097G01P15/14G01P15/18G01P2015/082
    • A sensor structure using vibrating sensor elements which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units which vibrate in out-of-phase mode (tunning-fork vibration) and include four vibrating sensor elements of the approximately same shape supported on a substrate in a vibratile state are provided and the vibrating sensor elements are disposed so that vibration axes of the vibration units cross each other at right angles. Each of the vibrating sensor elements includes a pair of detection units and adjustment units for adjusting a vibration frequency. The vibrating sensor elements constitute a combined sensor having supporting structure for supporting the vibrating sensor elements independently so that the vibrating sensor elements do not interfere with each other.
    • 提供了使用能够同时检测两个轴的角速度和加速度的振动传感器元件的传感器结构。 提供了2组以异相模式(调音叉振动)振动的振动单元,并且包括以振动状态支撑在基板上的大致相同形状的四个振动传感器元件,并且将振动传感器元件设置成 振动单元的振动轴线成直角交叉。 每个振动传感器元件包括一对检测单元和用于调节振动频率的调节单元。 振动传感器元件构成具有用于独立地支撑振动传感器元件的支撑结构的组合传感器,使得振动传感器元件彼此不干涉。
    • 3. 发明申请
    • ACCELERATION SENSOR ELEMENT AND ACCELERATION SENSOR HAVING SAME
    • 加速传感器元件和加速传感器
    • US20100300205A1
    • 2010-12-02
    • US12790136
    • 2010-05-28
    • Atsushi KAZAMAMasakatsu SaitohRyoji OkadaYasuhiro Hamaguchi
    • Atsushi KAZAMAMasakatsu SaitohRyoji OkadaYasuhiro Hamaguchi
    • G01P15/12
    • G01P15/0802G01P1/023G01P15/123G01P15/18
    • A covered acceleration sensor element includes a weight portion, a support frame portion surrounding the weight portion, a plurality of flexible beam portions for connecting the weight portion to the support frame portion to support the weight portion, piezoresistance elements provided on the beam portions, and wirings for connecting them. An upper cover and a lower cover enclosing the periphery of the weight portion together with the support frame portion are joined to the face and back of the support frame portion. Acceleration in the directions of three axes, i.e., a first axis in the joining thickness direction, a second axis in a plane perpendicular to the first axis, and a third axis in the plane and perpendicular to the second axis, or acceleration in the direction of any of the axes, is detected from changes in the resistances of the piezoresistance elements. The support frame portion is separated by separation grooves into an inner frame and an outer frame. The upper cover and the lower cover are joined to the outer frame. The inner frame is connected to the outer frame by a plurality of inner frame support portions having flexibility. The beam portions are connected to both sides of the weight portion along the second axis and the third axis. The inner frame support portions are connected to both sides of the inner frame in a direction in which they are rotated nearly 45 degrees from the second axis and the third axis.
    • 覆盖的加速度传感器元件包括重量部分,围绕重物部分的支撑框架部分,用于将重量部分连接到支撑框架部分以支撑重物部分的多个柔性梁部分,设置在梁部分上的压阻元件,以及 用于连接它们的布线。 与支撑框架部分一起包围重物部分的周边的上盖和下盖接合到支撑框架部分的表面和背面。 在三轴方向上的加速度,即接合厚度方向上的第一轴线,垂直于第一轴线的平面中的第二轴线,以及平面中垂直于第二轴线的第三轴线,或者在方向上的加速度 可以从压电元件的电阻的变化来检测。 支撑框架部分由分隔槽分隔成内框架和外框架。 上盖和下盖连接到外框。 内框架通过具有柔性的多个内框架支撑部分连接到外框架。 梁部分沿着第二轴线和第三轴线连接到配重部分的两侧。 内框架支撑部分沿着与第二轴线和第三轴线旋转大约45度的方向连接到内框架的两侧。