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    • 2. 发明申请
    • HYBRID METAL BONDED VERTICAL CAVITY SURFACE EMITTING LASER AND FABRICATING METHOD THEREOF
    • 混合金属粘结垂直孔表面发射激光及其制造方法
    • US20090155942A1
    • 2009-06-18
    • US12355836
    • 2009-01-19
    • O Kyun KWONMi Ran PARKWon Seok HANJong Hee KIMHyun Woo SONG
    • O Kyun KWONMi Ran PARKWon Seok HANJong Hee KIMHyun Woo SONG
    • H01L21/02
    • H01S5/18316H01S5/0215H01S5/0217H01S5/18369H01S5/18375H01S5/18377
    • Provided is a method of fabricating a vertical cavity surface emitting laser among semiconductor optical devices, comprising: bonding a dielectric mirror layer to an epi-structure having a mirror layer and an active layer; bonding these on a new substrate using a metal bonded method; removing the existing substrate; and fabricating a vertical cavity surface emitting laser on the new substrate. The method of fabricating the vertical cavity surface emitting laser is performed by moving and attaching a vertical cavity surface emitting laser to a new substrate using an external metallic bonding method, without electrically and optically affecting upper and lower mirrors and an active layer that constitutes the vertical cavity surface emitting laser. While using the existing method of fabricating the vertical cavity surface emitting laser, the VCSEL is fabricated by moving to a new substrate having good thermal characteristics so that good heat emission characteristics are accomplished, thus facilitating manufacture of the vertical cavity surface emitting laser having high reliability and good characteristics.
    • 提供了一种在半导体光学器件中制造垂直腔表面发射激光器的方法,包括:将介质镜层结合到具有镜层和有源层的外延结构; 使用金属键合方法将它们结合在新的基板上; 去除现有的基板; 并在新基板上制造垂直腔表面发射激光器。 垂直腔表面发射激光器的制造方法是通过使用外部金属接合方法将垂直空腔表面发射激光器移动并附着到新的衬底而进行的,而不会电和影响上镜和下反射镜以及构成垂直腔的表面发射激光的有源层 腔表面发射激光。 在使用制造垂直腔表面发射激光器的现有方法的同时,通过移动到具有良好热特性的新衬底来制造VCSEL,从而实现良好的发热特性,从而有助于制造具有高可靠性的垂直腔表面发射激光器 和良好的特点。