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    • 8. 发明申请
    • PHOTOVOLTAIC ELEMENT AND METHOD FOR MANUFACTURING SAME
    • 光伏元件及其制造方法
    • US20110197967A1
    • 2011-08-18
    • US13124902
    • 2009-10-19
    • Akira KaijoMasashi Oyama
    • Akira KaijoMasashi Oyama
    • H01L31/0224H01L31/18
    • H01L31/1884H01L31/022466H01L31/022483H01L31/03923H01L31/046H01L31/0463Y02E10/541
    • On a p-type conductive light absorption layer provided by a chalcopyrite structure compound that is layered bridging a pair of backside electrode layers provided on a side of a glass substrate, a light-transmissive n-type buffer layer that forms a p-n junction with the light absorption layer is layered. A light-transmissive transparent electrode layer is layered on the buffer layer to extend from a side of the light absorption layer and the buffer layer to one of the pair of backside electrode layers. The transparent electrode layer is formed in an amorphous film containing indium oxide and zinc oxide as primary components, the transparent electrode layer exhibiting a film stress of ±1×109 Pa or less. A photovoltaic element can be favorably processed without causing cracking and damage even by an easily processable mechanical scribing, so that productivity can be enhanced and yield rate can be improved.
    • 在由布置在玻璃基板一侧的一对背面电极层上层叠的黄铜矿结构化合物提供的p型导电性光吸收层上,形成与该玻璃基板的pn结形成的透光性n型缓冲层 光吸收层分层。 透光透明电极层层叠在缓冲层上,从光吸收层和缓冲层的一侧延伸到一对背面电极层之一。 透明电极层以含有氧化铟和氧化锌为主成分的非晶体膜形成,透明电极层的膜应力为±1×10 9 Pa以下。 即使通过容易加工的机械划线也能够有利地进行光电元件的加工而不产生开裂和损伤,从而可以提高生产率,并且可以提高成品率。