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    • 1. 发明授权
    • Probe apparatus for inspecting electrical characteristics of a
microelectronic element
    • 用于检查微电子元件的电气特性的探针装置
    • US5644245A
    • 1997-07-01
    • US347138
    • 1994-11-23
    • Satoshi SaitohAkihiro Terada
    • Satoshi SaitohAkihiro Terada
    • G01R1/067G01R31/28G01R31/02
    • G01R31/2891G01R1/06794G01R31/2887
    • A probe apparatus for inspecting electrical characteristics of a microelectronic element formed on a substrate and having a plurality of pads including a probe card having a plurality of probe needles, an image pick-up device for picking up images of the pads and the probe needles, a registration device which previously stores pad position information indicating pad positions of at least specified of the pads and needle position information indicating needle positions of at least specified of the plurality of probe needles, the needle positions being obtained by an actual measurement based on the images picked up by the image pick-up device, and a control processor for executing a task for detecting imaginary needle marks formed on the pads by imaginarily bringing the specified probe needles and the pads corresponding thereto into contact with each other, by overlapping the first position information and the pad position information of the microelectronic element, a task for detecting positional deviation information indicating a positional deviation between the needle marks and the pads, and a task for correcting a positional deviation between the pads and the probe needles in accordance with the positional deviation information.
    • 一种用于检查形成在基板上的微电子元件的电特性并具有多个焊盘的探针装置,所述多个焊盘包括具有多个探针的探针卡,用于拾取焊盘和探针的图像的图像拾取装置, 预先存储指示至少指定焊盘的焊盘位置的焊盘位置信息和指示至少指定多个探针的针位置的针位置信息的登记装置,通过基于图像的实际测量获得针位置 由图像拾取装置拾取的控制处理器,以及控制处理器,用于通过将指定的探针和与其对应的焊盘相互接触来执行用于检测形成在焊盘上的虚拟针痕的任务,通过将第一位置 信息和微电子元件的焊盘位置信息,用于检测的任务 指示针标与垫之间的位置偏差的位置偏差信息,以及根据位置偏差信息校正垫与探针之间的位置偏差的任务。
    • 3. 发明授权
    • Operation line searching method and robot/sensor system having operation line searching function
    • 具有操作线搜索功能的操作线搜索方法和机器人/传感器系统
    • US06321139B1
    • 2001-11-20
    • US09194610
    • 1998-11-30
    • Akihiro TeradaMitsuhiro Okuda
    • Akihiro TeradaMitsuhiro Okuda
    • G05B19418
    • B25J9/1697G05B2219/37571G05B2219/45104G05B2219/49386
    • An operation line searching method in which an operation start position is automatically approached and a robot/sensor system having such function of detecting the operation line. A robot having a laser sensor and an operation tool attached to a distal end thereof approaches an operation start position Q1 using various searching motion path patterns (a) to (d). Pattern (a) is determined to avoid an obstacle F or an obstructively-shaped portion G. The path thereof, for example, can be determined by specifying a coordinate axis of a coordinate system w. Patterns (b) and (c) are carried out by teaching, to the robot, data for determining the paths thereof in order. Pattern (d) is carried out in the following manner: an initial parameter , an angle of rotation and a norm increase factor are specified as parameters, and at the time when incremental travel quantity of a (i+1)th occurrence (i=0, 1, 2, . . . ) Should be obtained, it is obtained by calculating − , where the vector is obtained from the last obtained vector based on the illustrated relationship (the angle of rotation and the norm growth factor).
    • 自动接近操作开始位置的操作线搜索方法和具有检测操作线的功能的机器人/传感器系统。 具有激光传感器和附接到其远端的操作工具的机器人使用各种搜索运动路径图案(a)至(d)接近操作开始位置Q1。 确定图案(a)以避免障碍物F或阻塞形状部分G.例如,其路径可以通过指定坐标系统w的坐标轴来确定。 模式(b)和(c)通过向机器人教导依次进行确定其路径的数据来进行。 模式(d)以以下方式进行:初始参数,旋转角度和范数增加因子被指定为参数,并且在第(i + 1)次发生的增量行驶量 (i = 0,1,2,...)通过计算 - Vi>获得,其中从最后得到的矢量Vi获得矢量 基于所示的关系(旋转角度和标准生长因子)。
    • 10. 发明授权
    • Double hand for an industrial robot
    • 双手为工业机器人
    • US4565400A
    • 1986-01-21
    • US605027
    • 1984-04-10
    • Seiichiro NakashimaNobutoshi ToriiAkihiro Terada
    • Seiichiro NakashimaNobutoshi ToriiAkihiro Terada
    • B25J15/08B23Q7/04B25J15/00B25J15/02B25J15/04
    • B25J15/04B25J15/0052B25J15/0213
    • A double hand for an industrial robot comprises a hand body, two sets of work clamping units and two sets of actuators to drive the work clamping units, respectively, for opening and closing motions. The hand body has a rear end attachable to the free end of the robot wrist of an industrial robot, a front end and opposite sides extending between the front end and the rear end. Each work clamping unit has a pair of gripping fingers and the pairs of gripping fingers of the two sets of work gripping units are supported pivotally at the roots thereof on the opposite sides of the hand body for turning motion. The paired gripping fingers are turned about the respective roots thereof in opposite directions by the associated actuator.
    • PCT No.PCT / JP83 / 00262 Sec。 371日期1984年4月10日 102(e)日期1984年4月10日PCT提交1983年8月11日PCT公布。 出版物WO84 / 00713 1984年3月1日。工业机器人的双手包括手柄,两套夹紧装置和两套执行器,用于分别驱动夹紧装置,用于打开和关闭运动。 手柄具有可连接到工业机器人的机器人手腕的自由端的后端,前端和在前端和后端之间延伸的相对侧。 每个工件夹紧单元具有一对夹持指状物,并且两组夹紧单元的夹持爪对在其根部处可旋转地支撑在手柄的相对侧上,用于转动。 成对的夹持爪通过相关联的致动器在相反的方向围绕其相应的根部转动。