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    • 1. 发明授权
    • Substrate transporting and processing system
    • 基板运输和处理系统
    • US6009890A
    • 2000-01-04
    • US7753
    • 1998-01-15
    • Satoshi KanekoYuji KamikawaAkira KoguchiOsamu KurodaShigenori KitaharaTatsuya Nishida
    • Satoshi KanekoYuji KamikawaAkira KoguchiOsamu KurodaShigenori KitaharaTatsuya Nishida
    • H01L21/00H01L21/677B08B3/04
    • H01L21/67769H01L21/67173H01L21/67178H01L21/67757H01L21/67775H01L21/67778Y10S134/902
    • A substrate transporting and processing system generally comprises: a supply section of a carrier 1 for housing therein wafers W to be processed, in a horizontal state; a discharge section of the carrier 1; a wafer unloading arm 14 for unloading the wafers W from said carrier 1; a wafer loading arm 16 for loading the wafers W into the carrier 1; an attitude changing unit 40 for changing the attitude of the wafers W between a horizontal state and a vertical state; a processing section 3 for suitably processing the wafers W; and a wafer transport arm 56 for delivering the wafers W between the attitude changing unit 40 and the processing section 3 and for transporting the wafers W into and from the processing section. Thus, after the wafers W housed in the carrier 1 in the horizontal state are unloaded and the attitude of the wafers W is changed into the vertical state, suitable processes are carried out, and the attitude of the wafers W is changed in the horizontal state after processing, so that the wafers W can be housed in the carrier 1. Thus, it is possible to decrease the size of the whole system to improve the throughput and to improve the yield of products.
    • 基板输送和处理系统通常包括:载体1的供应部分,用于在水平状态下容纳待处理的晶片W; 载体1的放电部分; 用于从所述载体1卸载晶片W的晶片卸载臂14; 用于将晶片W装载到载体1中的晶片装载臂16; 姿态改变单元40,用于在水平状态和垂直状态之间改变晶片W的姿态; 用于适当地处理晶片W的处理部分3; 以及晶片传送臂56,用于在姿态改变单元40和处理部分3之间传送晶片W,并将晶片W输送到处理部分和从处理部分传送。 因此,在水平状态下容纳在载体1中的晶片W被卸载并且晶片W的姿态变为垂直状态之后,进行合适的处理,并且晶片W的姿态在水平状态下变化 在处理之后,可以将晶片W容纳在载体1中。因此,可以减小整个系统的尺寸以提高生产量并提高产品的产量。
    • 4. 发明授权
    • Image forming apparatus
    • 图像形成装置
    • US09052663B2
    • 2015-06-09
    • US14227169
    • 2014-03-27
    • Shingo SuzukiSatoshi KanekoShuji HiraiKoichi KudoJun YamaneShinji Kato
    • Shingo SuzukiSatoshi KanekoShuji HiraiKoichi KudoJun YamaneShinji Kato
    • G03G15/00G03G15/06
    • G03G15/5025G03G15/065G03G15/5058
    • An image forming apparatus includes an image carrier; an image forming unit; a processor for controlling the image forming unit according to a predetermined image forming condition setting data; an image density sensor to detect an image density of the toner pattern formed on the image carrier; a reference rotary position detector; an image density fluctuation data acquisition unit to obtain an image density fluctuation data of more than one circumferential length of the photoreceptor drum with reference to the reference rotary position detected by the reference rotary position detector based on a result related to the toner pattern formed on the image carrier detected by the image density sensor; and a correction data generator to generate a correction data to correct a reference image forming condition setting data with a correction amount corresponding to each rotary position of the rotary member to thus reduce the image density fluctuation.
    • 图像形成装置包括图像载体; 图像形成单元; 根据预定图像形成条件设置数据控制图像形成单元的处理器; 图像浓度传感器,用于检测形成在图像载体上的调色剂图案的图像浓度; 参考旋转位置检测器; 图像浓度波动数据获取单元,基于与在基准旋转位置检测器上形成的调色剂图案相关的结果,参考由基准旋转位置检测器检测到的参考旋转位置,获得感光鼓的多于一个圆周长度的图像浓度波动数据 由图像密度传感器检测的图像载体; 以及校正数据生成器,用于生成校正数据,以校正与旋转构件的每个旋转位置相对应的校正量的参考图像形成条件设置数据,从而减小图像浓度波动。
    • 5. 发明授权
    • Image forming apparatus and image forming method
    • 图像形成装置及图像形成方法
    • US08977148B2
    • 2015-03-10
    • US13753859
    • 2013-01-30
    • Satoshi KanekoJun YamaneKoichi KudoShinji KatoHitoshi IshibashiShuji HiraiShingo Suzuki
    • Satoshi KanekoJun YamaneKoichi KudoShinji KatoHitoshi IshibashiShuji HiraiShingo Suzuki
    • G03G15/00G03G13/22
    • G03G13/22G03G15/5037G03G15/5041
    • An image forming apparatus includes a rotatable image carrier that carries a toner image having a length corresponding to at least a circumferential length of the carrier; an image density detector that detects a density of the image; a potential detector that detects, over at least the circumferential length, a surface potential of the carrier before toner adheres thereto; a first image forming device that adjusts the density with a first factor, and forms an image based on a first condition of the first factor; a second image forming device that adjusts the density with a second factor, and forms an image based on a second condition of the second factor; a first determining device that determines the first condition based on uneven density; and a second determining device that determines the second condition based on uneven density and a potential distribution of the surface potential.
    • 图像形成装置包括可转动的图像载体,其承载具有对应于载体的至少周长的长度的调色剂图像; 图像浓度检测器,其检测图像的浓度; 在调色剂附着于其之前,至少在圆周长度上检测载体的表面电位的电位检测器; 第一图像形成装置,其以第一因子调整所述浓度,并且基于所述第一因子的第一条件形成图像; 第二图像形成装置,其利用第二因子调整所述浓度,并且基于所述第二因子的第二条件形成图像; 第一确定装置,其基于不均匀密度来确定第一条件; 以及第二确定装置,其基于不均匀密度和表面电位的电位分布来确定第二条件。
    • 7. 发明申请
    • LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
    • 液体加工设备和液体加工方法
    • US20120298147A1
    • 2012-11-29
    • US13478237
    • 2012-05-23
    • Satoshi Kaneko
    • Satoshi Kaneko
    • B08B3/08B08B5/00B08B7/04
    • B08B3/08B08B5/00B08B7/04H01L21/67051
    • Provided are a liquid processing apparatus and a liquid processing method that can optimize the state of air flow at an upper side of a substrate according to each liquid process performed during a substrate liquid processing. A liquid processing apparatus for performing a substrate liquid processing includes a support member configured to horizontally supporting the substrate; a gap forming member configured to form an annular gap between the gap forming member and an outer circumferential part of the support member; an upper liquid supplying member configured to supply a processing liquid to the substrate from an upper side; a cup configured to surround the annular gap and receive the processing liquid swept away from the rotating substrate through the annular gap; and an elevating mechanism configured to elevate the gap forming member.
    • 提供了一种液体处理装置和液体处理方法,其可以根据在基板液体处理期间执行的每个液体处理来优化在基板的上侧的空气流的状态。 用于执行基板液体处理的液体处理装置包括:构造成水平地支撑基板的支撑构件; 间隙形成构件,其构造成在所述间隙形成构件和所述支撑构件的外周部之间形成环状间隙; 上液体供给构件,其构造成从上侧向所述基板供给处理液; 杯子,其构造成围绕所述环形间隙并且接收经由所述环形间隙从所述旋转基板扫过的所述处理液体; 以及升降机构,其构造成使间隙形成构件升高。