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    • 3. 发明授权
    • Non-contacting conveyance equipment
    • 非接触式输送设备
    • US07360322B2
    • 2008-04-22
    • US09930159
    • 2001-08-16
    • Hitoshi IwasakaHideyuki Tokunaga
    • Hitoshi IwasakaHideyuki Tokunaga
    • F26B17/10
    • H01L21/67784
    • A non-contacting conveyance equipment comprises: a body having an end face that opposes an object to be conveyed, and a concave opening formed in the end face and surrounded by a cylindrical inner side wall; and a fluid passageway having a plurality of pairs of spouts to introduce fluid into an inner space of the concave opening in a circumferential direction of the cylindrical inner side wall so as to cause a swirl of fluid within the concave opening, each of the plurality of pairs of spouts being formed on the cylindrical inner side wall symmetrically to a central axis of the concave opening. A plurality of the non-contacting conveyance equipments may be provided on a base.
    • 非接触式输送设备包括:具有与待传送物体相对的端面的主体和形成在端面中并被圆柱形内侧壁包围的凹入开口; 以及具有多对喷嘴的流体通道,用于在所述圆筒形内侧壁的圆周方向上将流体引入所述凹入开口的内部空间,以使所述凹入开口内的流体旋转, 成对的喷口形成在与凹入开口的中心轴对称的圆筒形内侧壁上。 多个非接触输送设备可以设置在基座上。