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1. 发明授权

US4254368A Apparatus for driving a motor 失效
标题翻译：用于驱动电机的装置
公开(公告)号：US4254368A
公开(公告)日：1981-03-03
申请号：US112747
申请日：1980-01-17
申请人： Satoshi Ido , Nobuo Hamamoto , Kazuo Ichino
发明人： Satoshi Ido , Nobuo Hamamoto , Kazuo Ichino
IPC分类号： H02P8/14 , G05B19/416 , H02P5/16
CPC分类号： G05B19/416 , Y10S388/904 , Y10S388/908 , Y10S388/912 , Y10S388/916
摘要： In an apparatus for driving a motor wherein a carrier or stage carrying a sample thereon is located and moved to a predetermined position by controlling the slow-up and slow-down speed of the motor at the start and prior to the stopping thereof, respectively, this invention provides for speed control of the motor in accordance with a function of arbitrary characteristic slope, the function being stored in the form of a succession of digital values which may be sequentially accessed by a counter control circuit responsive to a control command signal representing the on-off condition for the motor.
摘要翻译：在用于驱动电动机的装置中，其中通过控制电动机起动和停止之前的电动机的缓慢和减速的速度，分别在其上定位并移动到其上的载体或载物台移动到预定位置，本发明提供了根据任意特征斜率的功能的马达的速度控制，该功能以一系列数字值的形式存储，数字值可以由计数器控制电路依次表示该控制命令信号的顺序访问马达的开关条件。

2. 发明授权

US4286154A Method of detecting a mark by an electron beam and an apparatus therefor 失效
标题翻译：通过电子束检测标记的方法及其装置
公开(公告)号：US4286154A
公开(公告)日：1981-08-25
申请号：US97125
申请日：1979-11-26
申请人： Tsuneo Okubo , Nobuo Hamamoto , Kazuo Ichino
发明人： Tsuneo Okubo , Nobuo Hamamoto , Kazuo Ichino
IPC分类号： H01L21/027 , H01J37/304 , G01N23/00
CPC分类号： H01J37/3045
摘要： This invention relates to a method of detecting a mark by an electron beam, the mark being provided on a sample, which includes the steps of scanning the electron beam over an area of the mark in such a manner that the electron beam is subjected to chopping by sampling pulses having a higher frequency than the scanning frequency, eliminating a component of noise from a detected signal representative of the mark, synchronously rectifying the detected mark signal, binary-coding the detected mark signal as compared with a suitable threshold value, and detecting a position of the mark by using the binary-coded signal.
摘要翻译：本发明涉及一种通过电子束检测标记的方法，该标记设在样本上，该方法包括以下步骤：以电子束切割的方式在标记区域上扫描电子束通过对具有比扫描频率更高的频率的脉冲进行采样，从表示标记的检测信号中消除噪声成分，同步整流检测出的标记信号，与检测出的标记信号进行二值化编码，与适当的阈值进行比较，通过使用二进制编码信号的标记的位置。

3. 发明授权

US4297676A Mark signal amplifier 失效
标题翻译：标记信号放大器
公开(公告)号：US4297676A
公开(公告)日：1981-10-27
申请号：US107087
申请日：1979-12-26
申请人： Shigeru Moriya , Nobuo Hamamto , Kazuo Ichino , Kanji Ozawa
发明人： Shigeru Moriya , Nobuo Hamamto , Kazuo Ichino , Kanji Ozawa
IPC分类号： H01L21/027 , G06K7/10 , H01J37/304 , G06K9/32
CPC分类号： G06K7/10851 , H01J37/3045
摘要： In electron-beam lithography, and similar operations, to achieve good drawing accuracy on a sample, it is necessary to detect the position of a mark on the sample with high accuracy. To accomplish this, a mark signal amplifier is provided including a first circuit for taking maximum and minimum values out of a mark signal detected by causing an electron beam to scan a mark area provided on a sample. A second circuit determines a peak-to-peak value of an amplitude of the detected mark signal in accordance with the maximum and minimum values, and a third circuit produces an output signal of a constant amplitude level as an input to a binary-coding circuit in accordance with the peak-to-peak value. The output signal of the third circuit remains constant in spite of fluctuations of the detected mark signal, so that a higher accuracy is obtained in detecting the mark for positioning. An alternative arrangement adds the maximum and minimum values, and establishes a mean value of the maximum and minimum values from the resultant sum.
摘要翻译：在电子束光刻和类似的操作中，为了在样品上获得良好的绘图精度，有必要高精度地检测样品上标记的位置。为了实现这一点，提供了一种标记信号放大器，其包括用于从通过使电子束扫描样品上提供的标记区域而检测的标记信号中获取最大值和最小值的第一电路。第二电路根据最大值和最小值确定检测到的标记信号的幅度的峰 - 峰值，并且第三电路产生恒定幅度电平的输出信号作为二进制编码电路的输入按照峰峰值。尽管检测到的标记信号的波动，第三电路的输出信号保持恒定，从而在检测定位标记时获得较高的精度。一个替代方案是添加最大值和最小值，并从所得到的和建立最大值和最小值的平均值。

4. 发明授权

US4748611A Information recording medium and method for reproducing the same 失效
标题翻译：信息记录介质及其再现方法
公开(公告)号：US4748611A
公开(公告)日：1988-05-31
申请号：US857088
申请日：1986-04-29
申请人： Toshiaki Tsuyoshi , Masatoshi Otake , Sachio Kumagai , Kazuo Ichino , Wasao Takasugi , Seiji Yonezawa
发明人： Toshiaki Tsuyoshi , Masatoshi Otake , Sachio Kumagai , Kazuo Ichino , Wasao Takasugi , Seiji Yonezawa
IPC分类号： G11B7/007 , G11B7/013 , G11B20/12 , G11B20/14 , G11B27/19 , G11B27/30 , H04N5/76 , G11B5/09
CPC分类号： G11B7/24085 , G11B20/1252 , G11B20/1403 , G11B27/19 , G11B27/3027 , G11B7/013 , G11B2020/1087 , G11B2020/10888 , G11B2220/20 , G11B2220/2525 , G11B2220/2537
摘要： In an optical disk, one turn of a recording track is divided into a number of sectors. Each of these sectors is composed of a servo field, which is stored in advance with servo information for tracking, and a data recording area which is to be written with data. A predetermined number of these sectors are joined together to form a plurality of blocks. Each of these blocks is recorded at the data recording areas of its predetermined sectors with identification information for identifying the blocks and phase synchronization loop pull-in information for read out clocks.
摘要翻译：在光盘中，记录轨道的一圈被分成多个扇区。这些扇区中的每一个由伺服字段组成，该伺服字段预先存储有用于跟踪的伺服信息，以及将被写入数据的数据记录区域。这些扇区的预定数量连接在一起以形成多个块。这些块中的每一个被记录在其预定扇区的数据记录区，其中具有用于识别块的识别信息和用于读出时钟的相位同步环插入信息。

5. 发明授权

US4132939A Driving signal control circuit 失效
标题翻译：驱动信号控制电路
公开(公告)号：US4132939A
公开(公告)日：1979-01-02
申请号：US817746
申请日：1977-07-21
申请人： Masayoshi Kameyama , Hiroshi Horiguchi , Kazuo Ichino
发明人： Masayoshi Kameyama , Hiroshi Horiguchi , Kazuo Ichino
IPC分类号： H02P1/16 , B23Q5/28 , B23Q15/007 , B23Q15/013 , G05B19/02 , G05D3/00 , G05D3/12 , G05G5/00
CPC分类号： B23Q5/28 , B23Q15/0075
摘要： This invention relates to a driving signal control circuit, in which at least four detecting points (or detectors) are arranged for detecting the position of the working table, which is repeatedly reciprocated between the detecting points. The control circuit includes a clock generator for generating a clock signal in accordance with a start signal, a gate circuit operative in response to detecting signals derived from the detectors when the working table has reached the detecting points, for selectively applying the clock signal as an Up output signal or a Down output signal and for providing a switching signal, a counter circuit for adding the Up output signal or for subtracting the Down output signal, a digital-to-analog converter for converting a digital output signal of the counter circuit into an analog signal, and a switching circuit operative for generating a driving signal with negative polarity or positive polarity in accordance with the switching signal and corresponding to the analog signal in value, whereby the working table can be smoothly moved by the driving signal without generating mechanical vibration in the working table.

6. 发明授权

US4866688A Composite tracking servo system for optical disc apparatus with track offset correction 失效
标题翻译：具有轨道偏移校正的光盘装置的复合跟踪伺服系统
公开(公告)号：US4866688A
公开(公告)日：1989-09-12
申请号：US942712
申请日：1986-12-17
申请人： Masatoshi Ohtake , Seiji Yonezawa , Toshiaki Tsuyoshi , Kazuo Ichino , Yukio Fukui , Takashi Takeuchi , Takeshi Maeda , Toshimitsu Kaku
发明人： Masatoshi Ohtake , Seiji Yonezawa , Toshiaki Tsuyoshi , Kazuo Ichino , Yukio Fukui , Takashi Takeuchi , Takeshi Maeda , Toshimitsu Kaku
IPC分类号： G11B7/007 , G11B7/09 , G11B7/095
CPC分类号： G11B7/0956 , G11B7/0901 , G11B7/0938 , G11B7/094 , G11B7/0953 , G11B7/00718 , G11B7/00745
摘要： A tracking servo system includes in addition to a composite servo system composed of a push-pull track deviation detecting loop operative with pregrooves formed in an optical disc and a wobbling track deviation detecting loop operative with intermittently provided wobbled tracking marks, an offset correcting loop for detecting offset component possibly produced due to tilt, deformation and eccentricity of a recording medium or change in optical and mechanical parameters in the course of time lapse to drive forcibly a light spot by applying an electrical offset to cancel out the offset component. In the offset correcting loop, light reflected by wobbled tracking marks provided intermittently or mirror areas formed by interrupting intermittently the pregroove is utilized for detecting the offset component.
摘要翻译：跟踪伺服系统除了包括与在光盘中形成的预槽相结合的推挽轨迹偏差检测回路和与间歇地提供的摆动跟踪标记一起工作的摆动轨迹偏差检测环路之外的复合伺服系统之外，检测由于记录介质的倾斜，变形和偏心可能产生的偏移分量或在时间过程中改变光学和机械参数，以通过施加电偏移来抵消偏移分量来驱动光斑。在偏移校正回路中，通过间歇地提供的摆动的跟踪标记反射的光或通过间歇地间歇地形成的反射镜区被用于检测偏移分量。

7. 发明授权

US4707816A Method and apparatus for composite wobbled and push-pull tracking servo system 失效
标题翻译：复合摆动和推挽跟踪伺服系统的方法和装置
公开(公告)号：US4707816A
公开(公告)日：1987-11-17
申请号：US938961
申请日：1986-12-08
申请人： Seiji Yonezawa , Masatoshi Ohtake , Masaru Ito , Toshiaki Tsuyoshi , Kazuo Ichino , Harushige Nakagaki
发明人： Seiji Yonezawa , Masatoshi Ohtake , Masaru Ito , Toshiaki Tsuyoshi , Kazuo Ichino , Harushige Nakagaki
IPC分类号： G11B7/013 , G11B7/09 , G11B7/095
CPC分类号： G11B7/0956 , G11B7/0904 , G11B7/0938 , G11B7/094 , G11B7/0948 , G11B7/24085 , G11B7/0901
摘要： A composite wobbled tracking servo system uses a rotary optical disc which has a header field and a data field alternately arranged along the direction of rotation, and which includes pregrooves formed in at least the data field and at least one pair of wobbled track marks disposed in each of the header fields in a relation wobbled relative to the center of a track. A light spot is directed toward and onto the optical disc to detect a push-pull tracking error signal from the reflection of the light spot diffracted from the pregroove, and a wobbled tracking error signal is detected from the reflection of the light spot passing the wobbled track marks. After attenuating the gain of the wobbled tracking error signal by a low-pass filter so that the gain of the wobbled tracking error signal becomes equal to that of the push-pull tracking error signal at a frequency fe satisfying the relation1/50.multidot.N.multidot.fd
摘要翻译：复合摆动跟踪伺服系统使用旋转光盘，该旋转光盘具有沿着旋转方向交替布置的头部场和数据场，并且包括形成在至少数据场中的预槽和至少一对摆动轨迹一个关系中的每个头字段相对于轨道的中心摆动。光点被指向光盘上并且到达光盘上以从从预制槽衍射的光点的反射中检测推挽跟踪误差信号，并且从通过摆动的光斑的光点的反射检测摆动的跟踪误差信号轨迹在通过低通滤波器对摆动跟踪误差信号的增益进行衰减之后，使摆动跟踪误差信号的增益等于推挽跟踪误差信号的频率fe满足关系1 / 50xNxfd

8. 发明授权

US4005396A Digital displacement sensor with zigzag coils 失效
标题翻译：具有锯齿形线圈的数字位移传感器
公开(公告)号：US4005396A
公开(公告)日：1977-01-25
申请号：US524867
申请日：1974-11-18
申请人： Hideo Fujiwara , Yukio Ichinose , Kazuo Ichino , Isamu Orita , Yasutaro Uesaka , Michiyasu Itoh , Hisashi Thuruoka
发明人： Hideo Fujiwara , Yukio Ichinose , Kazuo Ichino , Isamu Orita , Yasutaro Uesaka , Michiyasu Itoh , Hisashi Thuruoka
IPC分类号： G01D5/20 , H03M1/00 , G08C9/04 , G08C19/28
CPC分类号： G01D5/2073 , H03M1/26
摘要： A digital displacement sensor includes a plurality of zigzag coils provided with projecting or convex portions having different pitches and arranged on the surface of a flat plate. A magnetic head consisting of a magnetic body and a coil is wound around part of the magnetic body, the magnetic head being supported so as to be moved, while maintaining a given gap from the surface of the flat plate, whereby a digital signal corresponding to the displacement of the magnetic head is sensed by means of a plurality of zigzag coils.
摘要翻译：数字位移传感器包括设置有具有不同间距的凸起部分并且布置在平板的表面上的多个Z字形线圈。由磁体和线圈构成的磁头缠绕在磁体的一部分上，磁头被支撑以便移动，同时保持与平板的表面给定的间隙，由此对应于通过多个之字形线圈来检测磁头的位移。

9. 发明授权

US4748609A Method and apparatus for composite tracking servo system with track offset correction and rotary optical disc having at least one correction mark for correcting track offset 失效
标题翻译：具有轨道偏移校正和旋转光盘的复合跟踪伺服系统的方法和装置，其具有用于校正轨道偏移的至少一个校正标记
公开(公告)号：US4748609A
公开(公告)日：1988-05-31
申请号：US845340
申请日：1986-03-28
申请人： Seiji Yonezawa , Masatoshi Ohtake , Masaru Ito , Toshiaki Tsuyoshi , Kazuo Ichino , Harushige Nakagaki
发明人： Seiji Yonezawa , Masatoshi Ohtake , Masaru Ito , Toshiaki Tsuyoshi , Kazuo Ichino , Harushige Nakagaki
IPC分类号： G11B7/013 , G11B7/09 , G11B7/095 , G11B7/24
CPC分类号： G11B7/24085 , G11B7/094 , G11B7/0948 , G11B7/0956 , G11B7/0901 , G11B7/0904
摘要： A composite wobbled tracking servo system uses a rotary optical disc which has a header field and a data field alternately arranged along the direction of rotation to provide a sector, and which includes pregrooves formed in at least the data field and at least one pair of wobbled track marks disposed in the header field in a relation wobbled relative to the center of a track. A light spot is directed toward and onto the optical disc to detect a push-pull tracking error signal from the reflection of the light spot diffracted by the pregroove, and a wobbled tracking error signal is detected from the reflection of the light spot traversing the wobbled track marks. The push-pull tracking error signal is corrected on the basis of the wobbled tracking error signal to attain the tracking control with higher accuracy, thereby eliminating an undesirable track offset attributable to tilting or eccentricity of the optical disc.
摘要翻译：复合摆动跟踪伺服系统使用旋转光盘，其具有沿着旋转方向交替布置的报头字段和数据字段以提供扇区，并且其包括形成在至少数据字段中的预槽和至少一对摆动的轨道标记以相对于轨道的中心摆动的关系设置在头部区域中。光点指向光盘，以从由预制槽衍射的光点的反射检测推挽跟踪误差信号，并且从穿过波动的光点的反射中检测摆动的跟踪误差信号轨迹基于摆动的跟踪误差信号校正推挽跟踪误差信号，以更高的精度实现跟踪控制，从而消除由于光盘的倾斜或偏心引起的不期望的轨迹偏移。

10. 发明授权

US4031496A Variable inductor 失效
标题翻译：可变电感
公开(公告)号：US4031496A
公开(公告)日：1977-06-21
申请号：US485626
申请日：1974-07-03
申请人： Hideo Fujiwara , Yukio Ichinose , Satoshi Taniguchi , Tsutomu Kobayashi , Kazuo Ichino , Michiyasu Itoh , Yasutaro Uesaka , Fumiyuki Inose , Sadayasu Ueno
发明人： Hideo Fujiwara , Yukio Ichinose , Satoshi Taniguchi , Tsutomu Kobayashi , Kazuo Ichino , Michiyasu Itoh , Yasutaro Uesaka , Fumiyuki Inose , Sadayasu Ueno
IPC分类号： G01D5/20 , G01D5/22 , H01F21/06 , H01F29/10
CPC分类号： H01F21/06 , G01D5/2046 , G01D5/2258 , H01F29/10
摘要： A variable inductor wherein two closed magnetic circuits each having a predetermined gap in one place are constructed of a movable magnetic core and a fixed magnetic core. When the movable magnetic core is moved, the opposite area between both the magnetic cores in one of the closed magnetic circuits increases, while the opposite area between both the magnetic cores in the other closed magnetic circuit decreases. Thus, the inductances of coils wound around parts of the respective closed magnetic circuits vary complementarily.
摘要翻译：一种可变电感器，其中在一个位置具有预定间隙的两个闭合磁路由可移动磁芯和固定磁芯构成。当可移动磁芯移动时，一个闭合磁路中的两个磁芯之间的相对区域增加，而另一个闭合磁路中的两个磁芯之间的相对区域减小。因此，缠绕在各个闭合磁路的一部分上的线圈的电感互补地变化。

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