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    • 2. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20090045521A1
    • 2009-02-19
    • US12188881
    • 2008-08-08
    • Satoshi ABE
    • Satoshi ABE
    • H01L23/48
    • H01L23/5226H01L23/528H01L2924/0002H01L2924/00
    • A semiconductor device includes: an interlayer insulation film; a lower interconnection layer; an upper interconnection layer; and a via hole extending through the interlayer insulation film to establish electric connection between the lower and upper interconnections; wherein a plurality of interconnection lines is provided in the lower interconnection layer, and a contact region is formed for contact with the via hole by partially joining at least two interconnection lines, and a void exists in a first region of the interlayer insulation film located between adjacent interconnection lines, and no void exists in a second region of the interlayer insulation film located between a contacting portion of the via hole in the contact region and an interconnection line adjacent to the contact region, whereby reliably preventing any contact between a via hole and a void formed in an interlayer insulation film even when the via hole is greatly displaced.
    • 半导体器件包括:层间绝缘膜; 下互连层; 上互连层; 以及延伸穿过层间绝缘膜的通孔,以在下互连和上互连之间建立电连接; 其中在所述下互连层中设置多个互连线,并且通过部分地接合至少两个互连线而形成与所述通孔相接触的接触区域,并且位于所述层间绝缘膜的位于 相邻的互连线,并且位于接触区域中的通孔的接触部分和与接触区域相邻的互连线之间的层间绝缘膜的第二区域中不存在空隙,从而可靠地防止通孔和 即使当通孔大大移位时也形成在层间绝缘膜中的空隙。