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    • 1. 发明专利
    • Electro-optical device and electronic equipment
    • 电光设备和电子设备
    • JP2007047533A
    • 2007-02-22
    • JP2005232872
    • 2005-08-11
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G09F9/30G02F1/1333G02F1/1335G02F1/1343
    • PROBLEM TO BE SOLVED: To provide an electro-optical device capable of operating always stably and normally by preventing short circuit across an electrode and a signal line along a stepped shoulder formed on an insulating film. SOLUTION: The electro-optical device comprises: an inter-layer insulating film 22 which has an irregular pattern on the surface, being laid on a source electrode line 19, having a step difference S in the thickness direction to the flat surface of the substrate 7a; a pixel electrode 24 arranged on the insulating film; and a flat part F which is the surface of the insulating film 22 and an area prepared between an area provided with the irregular pattern and the step difference S. By arranging the flat part F, the step difference S can be prevented from being over-developed up to the area where the electrode 24 should be arranged, namely, over-removal can be prevented when the step difference S is formed for the insulating film 22 by exposure and development processing. Therefore, the source electrode line 19 which should be covered with the insulating film 22 so as to be insulated from the electrode 24 can be prevented from being exposed from the step difference S, and short circuit across the source electrode line 19 and the electrode 24 can be prevented. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供能够通过防止在绝缘膜上形成的沿台阶台阶的电极和信号线的短路而能够始终稳定和正常地运行的电光装置。 解决方案:电光装置包括:在表面上具有不规则图案的层间绝缘膜22,被放置在源电极线19上,在平坦表面的厚度方向上具有台阶差S 的基板7a; 布置在绝缘膜上的像素电极24; 以及作为绝缘膜22的表面的平坦部F以及在设置有不规则图案的区域和台阶差S之间准备的区域。通过配置平坦部F,能够防止台阶差S过大, 发展到电极24应该被布置的区域,即当通过曝光和显影处理为绝缘膜22形成台阶差S时,可以防止过度去除。 因此,可以防止应该被绝缘膜22覆盖以与电极24绝缘的源电极线19暴露于阶梯差S,并且源极电极线19和电极24之间的短路 可以防止。 版权所有(C)2007,JPO&INPIT
    • 2. 发明专利
    • Electrooptical device and its manufacturing method
    • 电子设备及其制造方法
    • JP2007041186A
    • 2007-02-15
    • JP2005223797
    • 2005-08-02
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G09F9/00G02F1/1333G09F9/30
    • PROBLEM TO BE SOLVED: To provide an electrooptical device in which a shape desired to be heat-deformed and a shape not desired to be heat-deformed can be individually heat-deformed when individually forming required shapes at different positions on a resin film by common exposure, development, and baking. SOLUTION: The liquid crystal device includes: a liquid crystal layer 12; a photopolymer film 22a with glass translation temperature G1; and a photopolymer film 22b which is formed on the photopolymer film 22a and whose glass translation temperature G2 is lower than the glass translation temperature G1. By applying exposure treatment and baking treatment, required shapes are formed accurately on the photopolymer film 22a and the photopolymer film 22b respectively. Required shapes are, for example, an irregular pattern for scattering reflection light, a contact hole 25, a recessed part 27 for adjusting the thickness of the liquid crystal layer 12. The irregular pattern on the polymer film 22b is planarized to a comparatively great extent to reduce planarization of the contact hole 25 in the polymer film 22a. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种电光装置,其中在树脂上的不同位置分别形成所需形状时,可以单独地热变形期望热变形的形状和不希望热变形的形状 通过曝光,开发和烘烤的电影。 液晶装置包括:液晶层12; 具有玻璃平移温度G1的光聚合物膜22a; 以及形成在光聚合物膜22a上并且其玻璃化转变温度G2低于玻璃平移温度G1的光聚合物膜22b。 通过施加曝光处理和烘烤处理,分别在光聚合物膜22a和光聚合物膜22b上精确地形成所需的形状。 需要的形状例如是用于散射反射光的不规则图案,接触孔25,用于调节液晶层12的厚度的凹部27.聚合物膜22b上的不规则图案被平坦化到较大程度 以降低聚合物膜22a中的接触孔25的平坦化。 版权所有(C)2007,JPO&INPIT
    • 4. 发明专利
    • Method for manufacturing electro-optical device
    • 制造电光器件的方法
    • JP2007017827A
    • 2007-01-25
    • JP2005201181
    • 2005-07-11
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G02F1/1335G02F1/1362
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device in which a two-dimensionally uniform projecting and recessing pattern is formed on a surface of a resin film formed on a substrate, even when the heat capacity on the substrate is nonuniform two dimensionally. SOLUTION: The method for manufacturing the electro-optical device which has TFD elements 21, formed on a substrate 7a and an interlayer insulating film 22, equipped with the projecting and recessing pattern on its surface and formed on the TFD elements 21 is provided. In a step of forming the TFD elements 21, a plurality of regions, composed of regions in which the TFD elements 21 exist on the substrate 7a and regions in which no TFD element 21 exists thereon, with heat capacity different from each other are formed on the substrate 7a. In a step of forming the interlayer insulating film 22, an exposure mask 56A is used, when the projecting and recessing pattern are formed on the surface of the interlayer insulating film 22. The exposure mask 56A is formed, in such a way that a light-shielding pattern 55, placed on regions KO, K1 with higher heat capacity has a larger shape, has lower distribution density, or has a larger shape and lower distribution density, as compared with a light-shielding pattern 55 placed on a region K2 with lower heat capacity. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:为了提供一种在形成在基板上的树脂膜的表面上形成二维均匀的凹凸图案的电光装置的制造方法,即使在 基板是二维不均匀的。 解决方案:制造具有TFD元件21的电光装置的方法,该TFD元件21形成在其表面上并形成在TFD元件21上的具有突出和凹陷图案的基板7a和层间绝缘膜22上, 提供。 在形成TFD元件21的步骤中,形成由基板7a上存在TFD元件21的区域和不存在TFD元件21的区域构成的多个区域,其中热容量彼此不同,形成在 基板7a。 在形成层间绝缘膜22的步骤中,当在层间绝缘膜22的表面上形成突出和凹陷图案时,使用曝光掩模56A。曝光掩模56A形成为使得光 与设置在区域K2上的遮光图案55相比,放置在具有较高热容量的区域KO,K1具有较大形状,具有较低分布密度或具有较大形状和较低分布密度的屏蔽图案55, 较低的热容量。 版权所有(C)2007,JPO&INPIT
    • 5. 发明专利
    • Method for manufacturing electrooptical device
    • 制造电子器件的方法
    • JP2006220907A
    • 2006-08-24
    • JP2005034168
    • 2005-02-10
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIRO
    • G02F1/1368G02F1/1335G03F1/38G03F1/50G03F7/20G09F9/00G09F9/30
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrooptical device with which a reflective display is realized with desired directivity. SOLUTION: In the method for manufacturing the electrooptical device, a substrate D for the electrooptical device is irradiated with exposure light L via a mask 10 having a mask pattern 11 composed of a light shielding portion and a light transmitting portion formed on a translucent member 10A so as to transfer an exposure pattern corresponding to the mask pattern 11 to the substrate D for the electrooptical device and to expose it, wherein the mask 10 has a lens portion 12 having curved faces C1, C2 arranged on a face of the translucent member 10A opposite to the face where the mask pattern 11 is formed, and the method for manufacturing the electrooptical device is characterized by transferring the exposure pattern corresponding to the mask pattern 11 to the substrate D for the electrooptical device via the lens portion 12 and exposing it. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于制造具有期望方向性的反射显示器的电光装置的方法。 解决方案:在电光装置的制造方法中,通过具有由遮光部构成的掩模图案11的掩模10和形成在光电装置的透光部的光透射部照射用于电光装置的基板D, 半透明构件10A,以将对应于掩模图案11的曝光图案转印到电光装置的基板D上并使其曝光,其中,掩模10具有透镜部分12,透镜部分12具有布置在 半透明构件10A与形成有掩模图案11的面相反,并且电光装置的制造方法的特征在于,经由透镜部12将对应于掩模图案11的曝光图案转印到电光装置的基板D上, 暴露它 版权所有(C)2006,JPO&NCIPI
    • 6. 发明专利
    • Method for manufacturing electrooptical device
    • 制造电子器件的方法
    • JP2007017823A
    • 2007-01-25
    • JP2005201177
    • 2005-07-11
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G02F1/1362G02F1/1335G02F1/1365G09F9/30
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device in which the thickness of a liquid crystal layer can be formed uniformly in a flat surface, even when a TFD element is formed in a partial region on a layer below the liquid crystal layer by improving a resin layer forming method. SOLUTION: The method for manufacturing the electro-optical device which has an element 21 formed on a substrate 7a and a resin film 22', having a projecting and recessing pattern on its surface and formed so as to cover the element 21, has steps: of forming the element 21 on the substrate 7a (a); and of forming the resin film 22' on the substrate 7a so as to cover the element 21 (b, c). In the step of forming the resin film 22', the amounts of exposure to the resin film 22' are made different, between in a region K where the element 21 is mounted and in other regions where it is not mounted, in order to remove the resin film 22' more in the region K, where the element 21 is mounted than in the other regions where the element 21 is not mounted. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:为了提供一种制造能够在平坦表面上均匀地形成液晶层的厚度的电光装置的方法,即使当TFD元件在 通过改善树脂层形成方法在液晶层的下方。 解决方案:制造具有形成在基板7a上的元件21和树脂膜22'的电光装置的制造方法,在其表面上具有突出和凹陷图案并形成为覆盖元件21, 具有在基板7a(a)上形成元件21的步骤。 并且在基板7a上形成树脂膜22'以覆盖元件21(b,c)。 在形成树脂膜22'的步骤中,在安装元件21的区域K和未安装元件21的其他区域之间,使树脂膜22'的暴露量不同,以便去除 树脂膜22'比安装元件21的其它区域的区域K更多地安装在元件21上。 版权所有(C)2007,JPO&INPIT
    • 7. 发明专利
    • Liquid crystal display device and electronic equipment
    • 液晶显示设备和电子设备
    • JP2007079207A
    • 2007-03-29
    • JP2005268096
    • 2005-09-15
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G02F1/1333G02F1/1335G02F1/1368
    • PROBLEM TO BE SOLVED: To provide a liquid crystal display device capable of surely preventing erosion of light reflex film comprised of Al, etc. and maintaining adhesion of the light reflex film provided on a ground film to the base film high. SOLUTION: The liquid crystal display device 1 has a pair of substrates 3, 4 which sandwich a liquid crystal layer 5, the light reflex film 22 provided on one substrate 3, an insulation film 23 provided on the light reflex film 22 and having a rugged pattern on the surface and a pixel electrode 24 provided on the insulation film 23. Since the light refraction index (n1) of the insulation film 23 and the light refraction index (n2) of a liquid crystal layer 5 are mutually different, reflected light L0 can have a desired scattering property even when the reflex film 22 is flat. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决问题的方案:提供一种液晶显示装置,其能够可靠地防止由Al等构成的反光膜的侵蚀,并且将设置在接地膜上的光反射膜与基膜保持粘合性高。 解决方案:液晶显示装置1具有夹着液晶层5的一对基板3,4,设置在一个基板3上的光反射膜22,设置在光反射膜22上的绝缘膜23,以及 在表面上具有凹凸图案和设置在绝缘膜23上的像素电极24.由于绝缘膜23的光折射率(​​n1)和液晶层5的光折射率(​​n2)彼此不同, 即使当反射膜22是平坦的时,反射光L0也可以具有期望的散射特性。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Electro-optical device, and electronic appliance
    • 电光器件和电子器具
    • JP2007017824A
    • 2007-01-25
    • JP2005201178
    • 2005-07-11
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G02F1/1362G02F1/1335G02F1/1365G02F1/1368G09F9/30
    • PROBLEM TO BE SOLVED: To provide an electro-optical device in which occurrence of display unevenness is prevented by making layer thickness of an electro-optical material layer, such as a liquid crystal layer, fixed. SOLUTION: A liquid crystal display device has a TFD element 21 mounted on an element substrate 11; an interlayer insulating film 22 formed on the TFD element 21 and having a contact hole 25 in the inside; a pixel electrode 24a formed on the interlayer insulating film 22 and connected to the TFD element 21 via the contact hole 25; a color filter substrate 12 arranged so as to be face the element substrate 11; and an overcoat layer 33 disposed on a surface of the color filter substrate 12 facing the element substrate 11. The overcoat layer 33 is formed, in such a way that the thickness t1 of a region V0, overlapping with the TFD element 21 in plan view, is made thinner than thickness t2 of a region in its periphery. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种通过使诸如液晶层的电光材料层的层厚度固定来防止出现显示不均的电光装置。 解决方案:液晶显示装置具有安装在元件基板11上的TFD元件21; 形成在TFD元件21上并在其内部具有接触孔25的层间绝缘膜22; 形成在层间绝缘膜22上的像素电极24a,经由接触孔25与TFD元件21连接; 布置成面向元件基板11的滤色器基板12; 以及设置在面向元件基板11的滤色器基板12的表面上的外涂层33.外涂层33以与平面图中的TFD元件21重叠的区域V0的厚度t1形成 比其周边区域的厚度t2薄。 版权所有(C)2007,JPO&INPIT
    • 9. 发明专利
    • Electrooptical device and electronic equipment
    • 电子设备和电子设备
    • JP2007011171A
    • 2007-01-18
    • JP2005194633
    • 2005-07-04
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIROHORIGUCHI MASAHIROIMAI KATSUHIROKAMIJO KIMITAKA
    • G02F1/1362G02F1/1333G09F9/30
    • PROBLEM TO BE SOLVED: To provide an electrooptical device capable of maintaining high display quality by suppressing crosstalk by devising an insulating film which is a component of the electrooptical device. SOLUTION: The electrooptical device has a plurality of switching elements 21 formed on a substrate 7a, data lines 19 formed on the substrate 7a, an insulating film 22 which is formed on the switching elements 21 and data lines 19 and has through holes 27 inside, pixel electrodes 24 which are formed on the insulating film 22 and connected to the switching elements 21 through the through holes 27, a liquid crystal layer 12 formed on the pixel electrodes 24, and recessed portions 41 which are formed in the insulating film 22 between other pixel electrodes 24 adjacent to the pixel electrodes 24 connected to the data lines 19 and the data lines 19. Liquid crystal 12 is put in the recessed portions 41 and the dielectric constant ε of the insulating film 22 and the dielectric constant ε2 of the liquid crystal 12 are so set that ε1>ε2. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种能够通过设计作为电光装置的部件的绝缘膜来抑制串扰来保持高显示质量的电光装置。 解决方案:电光装置具有形成在基板7a上的多个开关元件21,形成在基板7a上的数据线19,形成在开关元件21和数据线19上的绝缘膜22,并且具有通孔 27的内部形成在绝缘膜22上并通过通孔27与开关元件21连接的像素电极24,形成在像素电极24上的液晶层12和形成在绝缘膜中的凹部41 22与与数据线19连接的像素电极24和数据线19相邻的其他像素电极24之间。液晶12放置在凹部41中,绝缘膜22的介电常数ε和介电常数ε2 液晶12被设定为ε1>ε2。 版权所有(C)2007,JPO&INPIT
    • 10. 发明专利
    • Manufacturing method of electooptical device, and electrooptical device
    • 电子装置的制造方法和电子装置
    • JP2006220908A
    • 2006-08-24
    • JP2005034169
    • 2005-02-10
    • Sanyo Epson Imaging Devices Corp三洋エプソンイメージングデバイス株式会社
    • OTAKE TOSHIHIRO
    • G09F9/00G02F1/1335G02F1/1368G03F1/00G03F1/68G09F9/30
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrooptical device with which reflective display is possible at desired directivity, and to provide the electrooptical device manufactured by using the manufacturing method. SOLUTION: The manufacturing method relates to the electrooptical device comprising a 1st substrate and a 2nd substrate faced to each other, and electro-optic elements held between the 1st substrate and the 2nd substrate; either the 1st substrate or the 2nd substrate has a light scattering part consisting of a photo-sensitive member and a reflecting member; a step for forming the light scattering part includes a step for forming a projecting pattern with a plurality of projecting parts distributed therein on the photo-sensitive member by an exposure process using an exposure mask M, and a step for depositing the light reflecting film on the projecting pattern; and the exposure mask M has a discrete pattern P1 for discretely shading or transmitting exposure light L, and a continuous pattern P2 for continuously varying a transmission amount of the exposure light on one and the same optical path. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种电光装置的制造方法,其中可以以期望的方向性进行反射显示,并提供使用该制造方法制造的电光装置。 解决方案:该制造方法涉及包括彼此面对的第一基板和第二基板以及保持在第一基板和第二基板之间的电光元件的电光装置; 第一基板或第二基板具有由感光部件和反射部件构成的光散射部; 用于形成光散射部的步骤包括通过使用曝光掩模M的曝光处理在光敏部件上形成分布在其中的多个突出部分的突出图案的步骤,以及用于将光反射膜放置在 突出图案; 并且曝光掩模M具有用于离散地遮蔽或透射曝光光L的离散图案P1,以及连续地改变曝光光在同一光路上的透射量的连续图案P2。 版权所有(C)2006,JPO&NCIPI