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    • 2. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US5496999A
    • 1996-03-05
    • US320490
    • 1994-10-11
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. SmithPeter R. Swift
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. SmithPeter R. Swift
    • G01Q10/02G01Q10/04G01Q10/06G01Q20/00G01Q30/02G01Q30/06G01Q60/10G01Q60/24G01Q70/02G02B21/00H01J37/26
    • G01Q10/04B82Y35/00G01Q10/06G01Q20/02G01Q30/025G01Q70/02G02B21/002Y10S977/851Y10S977/86Y10S977/873
    • A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
    • 公开了具有许多优点的扫描探针显微镜。 使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中,使得它们可以彼此替代,而不需要调整悬臂偏转传感器。 偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。 机动的,非堆叠的x,y粗移动台相对于基座运动地定位,并具有最小化的机械回路,以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位,并且包括允许调节探头的高度,倾斜和俯仰的电动驱动装置。 扫描器包括x,y和z采样位置检测器,其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜,可用作扫描探针显微镜的输出。 x,y和z位置检测器的输出也可以与控制器连接在反馈回路中,以提高扫描探针显微镜的性能。
    • 3. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US5376790A
    • 1994-12-27
    • US850669
    • 1992-03-13
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. Smith
    • Frederick I. LinkerMichael D. KirkJohn D. AlexanderSang-il ParkSung-il ParkIan R. Smith
    • G01Q10/02G01Q10/04G01Q10/06G01Q20/00G01Q30/02G01Q30/06G01Q60/10G01Q60/24G01Q70/02G02B21/00H01J37/00
    • G01Q10/04B82Y35/00G01Q10/06G01Q20/02G01Q30/025G01Q70/02G02B21/002Y10S977/851Y10S977/86Y10S977/873
    • A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
    • 公开了具有许多优点的扫描探针显微镜。 使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中,使得它们可以彼此替代,而不需要调整悬臂偏转传感器。 偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。 机动的,非堆叠的x,y粗移动台相对于基座运动地定位,并具有最小化的机械回路,以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位,并且包括允许调节探头的高度,倾斜和俯仰的电动驱动装置。 扫描器包括x,y和z采样位置检测器,其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜,可用作扫描探针显微镜的输出。 x,y和z位置检测器的输出也可以与控制器连接在反馈回路中,以提高扫描探针显微镜的性能。
    • 7. 发明授权
    • Method and apparatus for reading or measuring magneto-optical storage
media using pinhole aperture
    • 使用针孔进行读取或测量磁光存储介质的方法和装置
    • US4847823A
    • 1989-07-11
    • US63668
    • 1987-06-19
    • James T. LindowSimon D. BennettIan R. Smith
    • James T. LindowSimon D. BennettIan R. Smith
    • G11B11/105
    • G11B11/10515G11B11/10543
    • A scanning confocal optical imaging system is utilized to read or measure data magnetically recorded on a magneto-optic disk. The system includes a laser for producing a linearly polarized beam and a beam splitter for directing the transmitted beam to the disk and for deflecting a portion of the reflected return beam from the disk to a photodetector. A pinhole plate is placed between the beam splitter and the disk for restricting the size of the transmitted and reflected beams, and a polarizer is positioned between the beam splitter and the photodetector to receive the deflected return beam and provide an output that discriminates between the differing directions of rotation of the polarization plane of the transmitted beam by the magnetized area on the disk so that the direction of magnetization of the magnetized area can be read by the photodetector.
    • 扫描共焦光学成像系统用于读取或测量磁记录在磁光盘上的数据。 该系统包括用于产生线性偏振光束的激光器和用于将透射光束引导到光盘并将反射回波束的一部分从光盘偏转到光电检测器的分束器。 针孔板放置在分束器和盘之间,用于限制透射和反射光束的尺寸,并且偏振器位于分束器和光电检测器之间,以接收偏转的返回光束并提供输出,其区分不同的 通过磁盘上的磁化区域的透射光束的偏振面的旋转方向,从而可以由光电检测器读取磁化区域的磁化方向。
    • 10. 发明授权
    • Method and apparatus for measuring the dimensions of patterned features
on a lithographic photomask
    • 用于测量光刻光掩模上的图案特征的尺寸的方法和装置
    • US5184021A
    • 1993-02-02
    • US719519
    • 1991-06-24
    • Ian R. Smith
    • Ian R. Smith
    • G01B9/04G01B11/02G01C3/06G03F7/20
    • G03F7/70625G01B11/02G03F7/70633
    • A system for inspecting and measuring the dimensions of patterned features on lithographic photomasks includes a confocal scanning microscope beneath which is mounted the photomask to be inspected. The photomask is moved to permit the imaging beam from the microscope to record reflectivity information at closely spaced points along a scan line at the metal-substrate interface within the photomask, and the unpatterned side of the mask is positioned facing the microscope so that the imaging beam passes through the transparent substrate material of the mask to the desired measurement plane. An objective lens specially corrected for imaging through transparent materials is used in the optical system, and compensating glass plates may be selectively placed between the objective lens and the photomask when the substrate of the mask is thinner than the thickness of transparent material for which the objective lens was corrected.
    • 用于检查和测量光刻光掩模上的图案特征的尺寸的系统包括共焦扫描显微镜,其下安装有待检查的光掩模。 移动光掩模以允许来自显微镜的成像光束沿着光掩模内的金属 - 衬底界面处的扫描线的紧密间隔的点记录反射率信息,并且掩模的未图案化侧面朝向显微镜定位,使得成像 光束通过掩模的透明基板材料到期望的测量平面。 在光学系统中使用专门用于通过透明材料进行成像的物镜校正的物镜,并且当掩模的基底比目标的透明材料的厚度薄时,可以将补偿玻璃板选择性地放置在物镜和光掩模之间 镜头被纠正。