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1. 发明申请

US20080190367A1 CHUCK ASSEMBLY AND HIGH DENSITY PLASMA EQUIPMENT HAVING THE SAME 审中-公开
标题翻译：柴油机组和高密度等离子体设备
公开(公告)号：US20080190367A1
公开(公告)日：2008-08-14
申请号：US12022477
申请日：2008-01-30
申请人： Sang-Geun Lee , Min-Ho Choi , Sung-Uk Park , Jin-Sung Kim , Jong-Suk Park , Dae-Hyun Kim
发明人： Sang-Geun Lee , Min-Ho Choi , Sung-Uk Park , Jin-Sung Kim , Jong-Suk Park , Dae-Hyun Kim
IPC分类号： B05C13/00
CPC分类号： H01L21/68735 , H01L21/68742
摘要： A chuck assembly for high density plasma equipment includes: a chuck having an upper surface and a plurality of pin holes formed in an outer peripheral portion, wherein the chuck upper surface is configured to receive a semiconductor substrate thereon; a substrate guide disposed on an outer surface of the chuck, wherein the substrate guide is configured to prevent a semiconductor substrate positioned on the upper surface of the chuck from being separated from the chuck; a fixing plate disposed at a lower portion of the chuck; a plurality of lift pins secured to the fixing plate and extending in an upward direction from the fixing plate so that each lift pin is inserted into a respective one of the pin holes, wherein each lift pin has an upper surface that extends to a position adjacent to the upper surface of the chuck; and a chuck lifter penetrating the fixing plate and engaged with a lower portion of the chuck, wherein the chuck lifter is configured to move the chuck upward and downward.
摘要翻译：一种用于高密度等离子体设备的卡盘组件，包括：卡盘，其具有形成在外周部分中的上表面和多个销孔，其中卡盘上表面构造成在其上容纳半导体基板; 设置在所述卡盘的外表面上的基板引导件，其中，所述基板引导件构造成防止位于所述卡盘的上表面上的半导体基板与所述卡盘分离; 设置在所述卡盘的下部的固定板; 多个提升销固定在固定板上并从固定板沿向上的方向延伸，使得每个提升销插入相应的一个销孔中，其中每个提升销的上表面延伸到相邻的位置到卡盘的上表面; 以及卡盘升降器，其穿过所述固定板并与所述卡盘的下部卡合，其中所述卡盘升降器构造成使所述卡盘向上和向下移动。

2. 发明授权

US5825321A Apparatus for detecting output load 失效
标题翻译：用于检测输出负载的装置
公开(公告)号：US5825321A
公开(公告)日：1998-10-20
申请号：US700777
申请日：1996-08-22
申请人： Sung-Uk Park
发明人： Sung-Uk Park
IPC分类号： H03M1/66 , G01R27/00 , H03M1/06 , H03M1/70
CPC分类号： H03M1/70
摘要： An apparatus for detecting when an output load of a digital-to-analog converter is changed to another value, automatically sensing the converted output load, and supplying a stable current to the output terminal of the digital-to-analog converter. Normally a digital-to-analog converter operated for processing a digital video signal, has two kinds of output loads, 75.OMEGA. and 37.5.OMEGA.. The apparatus detects whether the output load of the digital analog converter is 75.OMEGA. or 37.5.OMEGA., varies output current according to the detected output load, and therefore actively adjusts the video output voltage to be constantly in the range of 1V.sub.P--P.
摘要翻译：一种用于检测数模转换器的输出负载何时改变为另一值的装置，自动检测转换后的输出负载，并将稳定电流提供给数/模转换器的输出端。通常用于处理数字视频信号的数模转换器具有两种输出负载：75欧米茄和37.5欧米茄。该装置检测数字模拟转换器的输出负载是否为75欧姆或37.5欧姆，根据检测到的输出负载改变输出电流，因此主动将视频输出电压调整在1VP-P范围内。

3. 发明授权

US07079237B2 Apparatus for inspecting a wafer 有权
标题翻译：用于检查晶片的装置
公开(公告)号：US07079237B2
公开(公告)日：2006-07-18
申请号：US10680342
申请日：2003-10-08
申请人： Jai-Young Woo , Kyung-Ho Kim , Yun-Chang Choi , Hye-Jung Choi , Sung-Uk Park
发明人： Jai-Young Woo , Kyung-Ho Kim , Yun-Chang Choi , Hye-Jung Choi , Sung-Uk Park
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/9503
摘要： An apparatus for inspecting a wafer includes a handling unit for supporting, rotating and moving the wafer in horizontal and vertical directions, a first image acquisition unit for acquiring a first image corresponding to an upper surface of the wafer supported by the handling unit, a second image acquisition unit for acquiring a second image, a third image and a fourth image corresponding to a peripheral portion of the upper surface, a side surface and a lower surface of the wafer supported by the handling unit, respectively, a first driving unit for rotating the second image acquisition unit about a peripheral portion of the wafer supported by the handling unit in order to acquiring the second, third and fourth images, and an image processing unit for inspecting defects of the wafer supported by the handling unit from the first to fourth images.
摘要翻译：用于检查晶片的装置包括：用于在水平和垂直方向上支撑，旋转和移动晶片的处理单元，用于获取与由处理单元支撑的晶片的上表面相对应的第一图像的第一图像获取单元; 用于获取第二图像的图像获取单元，对应于由所述处理单元支撑的所述晶片的上表面的周边部分，侧表面和下表面的第三图像和第四图像，用于旋转的第一驱动单元所述第二图像获取单元围绕由所述处理单元支撑的晶片的周边部分，以获取所述第二，第三和第四图像;以及图像处理单元，用于检查由所述处理单元支撑的所述晶片的缺陷，所述图像处理单元从第一至第四图片。

4. 发明授权

US06870576B2 Automatic beam limiter circuit 失效
标题翻译：自动光束限制电路
公开(公告)号：US06870576B2
公开(公告)日：2005-03-22
申请号：US09996231
申请日：2001-11-28
申请人： Sung-Uk Park
发明人： Sung-Uk Park
IPC分类号： H04N3/18 , H04N5/57 , H04N5/59 , H04N5/68 , H04N5/14
CPC分类号： H04N5/59 , H04N5/57 , H04N5/68
摘要： An automatic beam limiter circuit (ABL circuit) calculating an average of a video signal at least a portion of the video signal is provided. After a converter circuit converts an analog signal, which is generated from the video signal, to a digital signal, a horizontal and a vertical average circuits calculate a horizontal and vertical averages of the digital signal at least a portion of the digital signal. The portion of the digital signal is a scanned line of the digital signal on a CRT. A comparison circuit compares a first calculation value calculated between a reference value and the vertical average with a second calculation value calculated between the reference value and the horizontal average, and outputs a first comparison signal and a second comparison signal based on the comparison results. A gain control circuit produces a gain control signal for adjusting the brightness/contrast in response to the first comparison and second comparison signals. Advantageously, the automatic beam limiter circuit is capable of efficiently preventing a frame delay in controlling the brightness/contrast of the video signal and the rapid increase of beam current when a black field is rapidly changed into a white field.
摘要翻译：提供了一种自动光束限制器电路（ABL电路），其计算视频信号的至少一部分的视频信号的平均值。在转换器电路将从视频信号产生的模拟信号转换为数字信号之后，水平和垂直平均电路在数字信号的至少一部分上计算数字信号的水平和垂直平均。数字信号的一部分是CRT上的数字信号的扫描线。比较电路将在参考值和垂直平均值之间计算的第一计算值与在参考值和水平平均值之间计算的第二计算值进行比较，并且基于比较结果输出第一比较信号和第二比较信号。增益控制电路产生用于响应于第一比较和第二比较信号来调整亮度/对比度的增益控制信号。有利地，自动光束限制器电路能够有效地防止当黑场迅速变为白场时控制视频信号的亮度/对比度和光束电流的快速增加时的帧延迟。

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