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    • 9. 发明申请
    • ARRAY SUBSTRATE AND DISPLAY PANEL
    • 阵列基板和显示面板
    • US20070264735A1
    • 2007-11-15
    • US11737626
    • 2007-04-19
    • Jae-Seong ByunHo-Min KangBae-Hyoun Jung
    • Jae-Seong ByunHo-Min KangBae-Hyoun Jung
    • H01L21/84
    • H01L27/124H01L27/1288
    • A manufacturing method for an array substrate, comprising forming a gate metal on a base substrate, patterning the gate metal to form a gate part having a gate electrode, a gate line and a gate pad. Then, a gate insulating layer, an active layer and a data metal are sequentially formed on the base substrate to cover the gate part. The data metal is patterned to form a data part having a data electrode, a data pad and a pixel electrode. Then, the exposed portion of the active layer is removed, and the exposed portion of the gate insulation layer is removed. When the data electrode is divided into a source electrode and a drain electrode, a switching device is completed.
    • 一种阵列基板的制造方法,包括在基底基板上形成栅极金属,构图所述栅极金属,形成具有栅极电极,栅极线和栅极焊盘的栅极部分。 然后,在基底基板上依次形成栅极绝缘层,有源层和数据金属,以覆盖栅极部分。 数据金属被图案化以形成具有数据电极,数据焊盘和像素电极的数据部分。 然后,去除有源层的暴露部分,并去除栅极绝缘层的暴露部分。 当数据电极被分成源电极和漏极时,完成开关装置。
    • 10. 发明授权
    • Cleaning unit, slit coating apparatus having the same and method of coating substrate
    • 清洗单元,具有相同的狭缝涂布装置和涂布基材的方法
    • US07473318B2
    • 2009-01-06
    • US10789330
    • 2004-02-26
    • Sung-Ki JungHo-Min Kang
    • Sung-Ki JungHo-Min Kang
    • B05B15/02
    • B05C5/0254B05B15/555
    • A cleaning unit of this invention includes a body and a cleaning member. The body includes an upper face. The upper face subsides to form a receiving recession for receiving a slit nozzle of the slit coater. The receiving recession includes a sidewall and a bottom face. The sidewall includes a first injection hole. A cleaning material is sprayed via the injection hole. The cleaning member eliminates dregs of the material attached on the slit nozzle of the slit coater. The cleaning member is attached on the bottom face of the receiving recession. According to the present invention, the slit nozzle is effectively cleared, so that the substrate is uniformly coated with the photosensitive layer, and the photosensitive layer is not scratched.
    • 本发明的清洁单元包括主体和清洁构件。 身体包括一个上脸。 上表面消失以形成用于接收狭缝涂布机的狭缝喷嘴的接收凹部。 接收凹部包括侧壁和底面。 侧壁包括第一注入孔。 通过注射孔喷射清洁材料。 清洁构件消除了附着在狭缝涂布机的狭缝喷嘴上的材料的残渣。 清洁构件附接在接收凹部的底面上。 根据本发明,狭缝喷嘴被有效地清除,使得基板均匀地涂覆有感光层,并且感光层不被划伤。