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    • 8. 发明授权
    • Manufacturing method of transistor structure having a recessed channel
    • 具有凹陷通道的晶体管结构的制造方法
    • US08658491B2
    • 2014-02-25
    • US12890926
    • 2010-09-27
    • Gyu Seog Cho
    • Gyu Seog Cho
    • H01L21/8234
    • H01L29/66621H01L21/823437H01L29/66606H01L29/7834
    • A semiconductor device and a method for manufacturing the same are disclosed. The disclosed semiconductor device includes a semiconductor substrate having a device isolation structure for delimiting an active region, the active region being recessed and grooves being defined in channel forming areas of the active region; gates formed in and over the grooves; gate spacers formed on both sidewalls of the gates over portions of the recessed active region which are positioned on both sides of the gates; an LDD region formed in the active region under the gate spacers; junction areas formed in the active region on both sides of the gates including the gate spacers; and landing plugs formed on the junction areas.
    • 公开了一种半导体器件及其制造方法。 所公开的半导体器件包括具有用于限定有源区的器件隔离结构的半导体衬底,有源区是凹陷的,并且沟槽限定在有源区的沟道形成区中; 形成在槽内和上面的门; 栅极隔离物在位于栅极两侧的凹入有源区的部分上形成在栅极的两个侧壁上; 形成在栅极间隔下的有源区中的LDD区; 形成在包括栅极间隔物的栅极两侧的有源区域中的接合区域; 并在接合区域上形成着陆塞。
    • 9. 发明授权
    • Semiconductor device with recessed active region and gate in a groove
    • 半导体器件具有凹入的有源区和栅极在沟槽中
    • US07825464B2
    • 2010-11-02
    • US12020651
    • 2008-01-28
    • Gyu Seog Cho
    • Gyu Seog Cho
    • H01L29/78
    • H01L29/66621H01L21/823437H01L29/66606H01L29/7834
    • A semiconductor device and a method for manufacturing the same are disclosed. The disclosed semiconductor device includes a semiconductor substrate having a device isolation structure for delimiting an active region, the active region being recessed and grooves being defined in channel forming areas of the active region; gates formed in and over the grooves; gate spacers formed on both sidewalls of the gates over portions of the recessed active region which are positioned on both sides of the gates; an LDD region formed in the active region under the gate spacers; junction areas formed in the active region on both sides of the gates including the gate spacers; and landing plugs formed on the junction areas.
    • 公开了一种半导体器件及其制造方法。 所公开的半导体器件包括具有用于限定有源区的器件隔离结构的半导体衬底,有源区是凹陷的,并且沟槽限定在有源区的沟道形成区中; 形成在槽内和上面的门; 栅极隔离物在位于栅极两侧的凹入有源区的部分上形成在栅极的两个侧壁上; 形成在栅极间隔下的有源区中的LDD区; 形成在包括栅极间隔物的栅极两侧的有源区域中的接合区域; 和在连接区域上形成的着陆塞。