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1. 发明授权

US06504287B2 Multilayered piezoelectric/electrostrictive ceramic actuator 失效
标题翻译：多层压电/电致伸缩陶瓷致动器
公开(公告)号：US06504287B2
公开(公告)日：2003-01-07
申请号：US10021095
申请日：2001-12-12
申请人： Sang Kyeong Yun , Dong Hoon Kim , Jong-Myeon Lee
发明人： Sang Kyeong Yun , Dong Hoon Kim , Jong-Myeon Lee
IPC分类号： H01L4100
CPC分类号： H01L41/0973 , B41J2/14274 , B41J2/1612 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/27 , H01L41/314 , H04R17/00 , Y10S310/80 , Y10T29/42 , Y10T29/49155
摘要： The present invention relates a manufacturing method for a multilayered piezoelectric/electrostrictive ceramic actuator by a sintering process at low temperature. The present invention makes feasible a high quality image and high speed printing, as large displacement and high speed actuation are feasible because it can get greater displacement and driving speed, even with small variation in driving voltage, because of piezoelectric/electrostrictive layer and upper electrode being alternately heaped to produce a multilayer structure.
摘要翻译：本发明涉及一种通过低温烧结工艺制造多层压电/电致伸缩陶瓷致动器的方法。由于压电/电致伸缩层和上电极，即使驱动电压的变化小，因此能够获得更大的位移和驱动速度，因此大容量和高速驱动是可行的。交替堆叠以产生多层结构。

2. 发明授权

US06347441B1 Manufacturing method of multilayered piezoelectric/electrostrictive ceramic actuator 失效
标题翻译：通过低温烧结制造多层压电/电致伸缩陶瓷致动器的方法
公开(公告)号：US06347441B1
公开(公告)日：2002-02-19
申请号：US09429829
申请日：1999-10-29
申请人： Sang Kyeong Yun , Dong Hoon Kim , Jong-Myeon Lee
发明人： Sang Kyeong Yun , Dong Hoon Kim , Jong-Myeon Lee
IPC分类号： H01L4100
CPC分类号： H01L41/0973 , B41J2/14274 , B41J2/1612 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/27 , H01L41/314 , H04R17/00 , Y10S310/80 , Y10T29/42 , Y10T29/49155
摘要： A manufacturing method for a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, making feasible a high quality image and high speed printing, as large displacement and high speed actuation are feasible because it can get greater displacement and driving speed, even with small variation in driving voltage, because of piezoelectric/electrostrictive layer and upper electrode being alternately heaped to produce a multilayer structure.
摘要翻译：一种多层压电/电致伸缩陶瓷致动器的制造方法，通过低温烧结工艺，可以实现高质量的图像和高速印刷，因为大的位移和高速致动是可行的，因为它可以获得更大的位移和驱动速度，即使由于压电/电致伸缩层和上电极交替堆积以产生多层结构，驱动电压的变化小。

3. 发明授权

US07096547B2 Manufacturing method of ceramic device using mixture with photosensitive resin 失效
标题翻译：陶瓷器件与感光树脂混合使用的制造方法
公开(公告)号：US07096547B2
公开(公告)日：2006-08-29
申请号：US10688281
申请日：2003-10-17
申请人： Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
发明人： Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
IPC分类号： H04R17/00 , H01L41/083 , G03C5/00
CPC分类号： H01L41/33 , H01L41/1876 , H04R17/00 , Y10S29/016 , Y10T29/42 , Y10T29/49128 , Y10T29/49155 , Y10T29/49156
摘要： A manufacturing method for a ceramic device using a mixture with a photosensitive resin includes: providing a ceramic substrate, forming a lower electrode on the substrate using a mixture of a photosensitive resin and metal, masking and exposing the lower electrode to pattern the lower electrode, forming a piezoelectric/electrostrictive layer on the lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic, masking and exposing the piezoelectric/electrostrictive layer to pattern the piezoelectric/electrostrictive layer, forming an upper electrode on the piezoelectric/electrostrictive layer using the mixture of photosensitive resin and metal, and exposing the upper electrode to pattern the upper electrode.
摘要翻译：使用与感光性树脂的混合物的陶瓷器件的制造方法包括：提供陶瓷基板，使用感光性树脂和金属的混合物在基板上形成下部电极，对下部电极进行掩模和曝光以对下部电极进行图案化，使用感光性树脂和压电/电致伸缩陶瓷的混合物在下部电极上形成压电/电致伸缩层，对压电/电致伸缩层进行掩模和曝光以对压电/电致伸缩层进行图案化，在压电/电致伸缩层上形成上电极，使用感光树脂和金属的混合物，并暴露上电极以对上电极进行图案化。

4. 发明授权

US06662418B1 Manufacturing method of ceramic device using mixture with photosensitive resin 失效
标题翻译：陶瓷器件与感光树脂混合使用的制造方法
公开(公告)号：US06662418B1
公开(公告)日：2003-12-16
申请号：US09444128
申请日：1999-11-19
申请人： Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
发明人： Sang Kyeong Yun , Dong Hoon Kim , Sung June Park
IPC分类号： H04R1700
CPC分类号： H01L41/33 , H01L41/1876 , H04R17/00 , Y10S29/016 , Y10T29/42 , Y10T29/49128 , Y10T29/49155 , Y10T29/49156
摘要： A manufacturing method of ceramic device comprising the steps of forming by layer accumulation of a lower electrode, a piezoelectric/electrostrictive layer, and an upper electrode on a substrate using a mixture of photosensitive resin and metal or piezoelectric/electrostrictive ceramic; and patterning by light exposure at a single time, thereby, producing a ceramic device of high shape ratio can be produced and precision degree is very high so as to produce a ceramic device very precise in arrangement between layers or with infrastructure so that another effect may be made to systematically prevent the short between upper and lower electrodes.
摘要翻译：一种陶瓷器件的制造方法，包括以下步骤：使用感光性树脂和金属或压电/电致伸缩陶瓷的混合物在基板上形成下层电极，压电/电致伸缩层和上电极的层积累; 并且通过单次曝光进行图案化，从而可以制造高形状比的陶瓷器件，并且精度非常高，以便在层之间或与基础设施之间布置非常精确地制造陶瓷器件，使得另一种效果可以系统地防止上下电极之间的短路。

5. 发明授权

US06594875B2 Method for producing a piezoelectric/electrostrictive actuator 失效
标题翻译：压电/电致伸缩致动器的制造方法
公开(公告)号：US06594875B2
公开(公告)日：2003-07-22
申请号：US09776652
申请日：2001-02-05
申请人： Kwang Kyun Chang , Sang Kyeong Yun , Dong-Hoon Kim
发明人： Kwang Kyun Chang , Sang Kyeong Yun , Dong-Hoon Kim
IPC分类号： H04R1700
CPC分类号： C04B35/6264 , C01G25/006 , C01G33/006 , C01P2004/80 , C04B2235/3206 , C04B2235/3232 , C04B2235/3244 , C04B2235/3251 , C04B2235/3296 , H01L41/1875 , H01L41/317 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/49155
摘要： A method for forming a piezoelectric/electrostrictive actuator in which a piezoelectric/electrostrictive file is formed on a vibrating plate or lower electrode by applying a layer of a ceramic paste theron and baking the paste layer at a low temperature in a range below 300° C. to form the film to its final thickness all in one step.
摘要翻译：一种用于形成压电/电致伸缩致动器的方法，其中通过在低于300℃的低温下施加一层陶瓷浆料，并在低温下烘烤该糊料层，在振动板或下电极上形成压电/电致伸缩文件在一个步骤中将薄膜形成其最终厚度。

6. 发明授权

US06327760B1 Method of manufacturing a piezoelectric/electrostrictive microactuator 失效
标题翻译：制造压电/电致伸缩微致动器的方法
公开(公告)号：US06327760B1
公开(公告)日：2001-12-11
申请号：US09429830
申请日：1999-10-29
申请人： Sang Kyeong Yun , Dong Hoon Kim , Yeon Kyoung Jung
发明人： Sang Kyeong Yun , Dong Hoon Kim , Yeon Kyoung Jung
IPC分类号： H01L4100
CPC分类号： H01L41/0973 , B41J2/161 , B41J2/1623 , B41J2/1637 , B41J2/1646 , B41J2202/03 , C01G23/003 , C01G25/006 , C01P2004/61 , C01P2004/62 , C04B35/491 , H01L41/314 , H01L41/37 , Y10S310/80 , Y10T29/42
摘要： A piezoelectric/electrostrictive microactuator is made by forming piezoelectric/electrostrictive film using a mixture of the polyvinylidene fluoride, excellent in moldability and a ceramic powder, excellent in piezoelectricity. The powder has basic composition elements of lead titanium with a particle size below 5 &mgr;m, made by a nonexplosive oxidative-reductive combustion reaction at a relatively low temperature of 100-500° C. The piezoelectric/electrostrictive microactuator may be modulated in mechanical strength and linkability between particles by using an improved colloid process which can achieve low energy consumption and low cost, because the low temperature process is simplified by using ceramic powder calcined at low temperatures.
摘要翻译：通过使用成型性优异的聚偏二氟乙烯和陶瓷粉末的混合物形成压电/电致伸缩膜来制造压电/电致伸缩微致动器，压电性优异。该粉末具有粒径低于5μm的铅钛的基本组成元素，通过在100-500℃的较低温度下的非爆炸氧化还原性燃烧反应制成。压电/电致伸缩微致动器可以以机械强度和通过使用可以实现低能耗和低成本的改进的胶体工艺，因为通过使用在低温下煅烧的陶瓷粉末来简化低温工艺，所以颗粒之间的可连接性。

7. 发明授权

US06319421B1 Ceramic oxide powder, method for producing the ceramic oxide powder, ceramic paste produced using the ceramic oxide powder, and method for producing the ceramic paste 失效
标题翻译：陶瓷氧化物粉末，陶瓷氧化物粉末的制造方法，使用陶瓷氧化物粉末制造的陶瓷糊料，以及陶瓷膏的制造方法
公开(公告)号：US06319421B1
公开(公告)日：2001-11-20
申请号：US09332689
申请日：1999-06-14
申请人： Sang Kyeong Yun , Dong-Hoon Kim , Yeon Kyoung Jung
发明人： Sang Kyeong Yun , Dong-Hoon Kim , Yeon Kyoung Jung
IPC分类号： C04B3501
CPC分类号： C04B35/493 , B82Y30/00 , C01G25/006 , C01G33/006 , C01P2002/60 , C01P2004/50 , C01P2004/52 , C01P2004/61 , C01P2004/80 , C04B35/491 , C04B35/6264 , C04B35/6267 , C04B2235/3206 , C04B2235/3232 , C04B2235/3244 , C04B2235/3249 , C04B2235/3251 , C04B2235/3296 , C04B2235/449 , C04B2235/5454 , C04B2235/549
摘要： A method for producing ceramic oxide powder having a grain size of 5 &mgr;m or less and exhibiting a uniform grain size distribution is disclosed. The method includes the steps of sufficiently dissolving or uniformly dispersing a raw material of constituent ceramic elements in a solvent or dispersion medium, thereby preparing a solution or dispersed mixture containing the constituent ceramic elements, adding citric acid in the solution or dispersed mixture, in which the constituent ceramic elements are dissolved or dispersed, at least in an amount required to generate an oxidative-reductive combustion reaction with anions of the constituent ceramic elements, thereby preparing a mixed solution, and thermally treating the mixed solution at a temperature of 100 to 500° C., thereby evaporating the solvent or dispersed medium while causing the citric acid to act as a reductive combustion aid, thereby generating a non-explosive oxidative-reductive combustion reaction with the anions of the constituent ceramic elements, so that ceramic oxide is produced without any scattering by virtue of heat generated during the combustion reaction. Using the ceramic oxide powder, ceramic paste having a micro grain size and exhibiting a superior reaction property can be produced using a single combustion process at a low temperature.
摘要翻译：公开了一种具有5μm或更小的颗粒尺寸并具有均匀粒度分布的陶瓷氧化物粉末的方法。该方法包括将构成陶瓷元素的原料充分溶解或均匀分散在溶剂或分散介质中的步骤，从而制备含有组成陶瓷元素的溶液或分散混合物，在溶液或分散混合物中加入柠檬酸，其中构成的陶瓷元素溶解或分散，至少以与构成陶瓷元素的阴离子产生氧化还原燃烧反应所需的量，从而制备混合溶液，并在100至500℃的温度下热处理该混合溶液 ℃，从而蒸发溶剂或分散介质，同时使柠檬酸充当还原助燃剂，从而与构成的陶瓷元素的阴离子产生非爆炸性的氧化还原性燃烧反应，从而产生陶瓷氧化物由于在燃烧反应期间产生的热而没有任何散射。使用陶瓷氧化物粉末，可以使用低温下的单一燃烧工艺来制造具有微观尺寸并且表现出优异的反应性能的陶瓷浆料。

8. 发明授权

US06432238B1 Method for fabricating piezoelectric/electrostrictive thick film using seeding layer 失效
标题翻译：使用接种层制造压电/电致伸缩厚膜的方法
公开(公告)号：US06432238B1
公开(公告)日：2002-08-13
申请号：US09330557
申请日：1999-06-11
申请人： Sang Kyeong Yun , Dong-Hoon Kim
发明人： Sang Kyeong Yun , Dong-Hoon Kim
IPC分类号： B32B3126
CPC分类号： H01L41/314 , H01L41/318 , H01L41/319
摘要： Disclosed is a method for fabricating a piezoelectric/electrostrictive thick film, using a seeding layer. On a substrate is formed the seeding layer which is prepared from a ceramic sol solution or a ceramic paste, both identical or similar in composition to the piezoelectric/electrostrictive film. The ceramic paste is prepared from a mixture of a ceramic oxide powder, which has a particle size of 5 &mgr;m or less and is prepared from Pb and Ti-based piezoelectric/electrostrictive elements by a non-explosive oxidation-reduction combustion reaction at 100-500° C., and a ceramic sol solution in water or an organic solvent, identical or similar in composition to the ceramic oxide powder. Then, the seeding layer is subjected to an after-treatment. A piezoelectric/electrostrictive film is directly formed on the seeding layer. Alternatively, a piezoelectric/electrostrictive film, separately formed and sintered, is attached on the seeding layer.
摘要翻译：公开了使用接种层制造压电/电致伸缩厚膜的方法。在基板上形成由陶瓷溶胶溶液或陶瓷膏制成的接合层，其组成与压电/电致伸缩膜相同或相似。陶瓷浆料由粒径为5μm以下的陶瓷氧化物粉末的混合物制成，通过在100℃的非爆炸性氧化还原燃烧反应中由Pb和Ti系压电/电致伸缩元素制备， 500℃，和在水或有机溶剂中的陶瓷溶胶溶液，其组成与陶瓷氧化物粉末相同或相似。然后，对接种层进行后处理。在接种层上直接形成压电/电致伸缩膜。或者，分别形成和烧结的压电/电致伸缩膜附着在接种层上。

9. 发明授权

US06584708B2 Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof 失效
标题翻译：无膜压电/电致伸缩微致动器及其制造方法
公开(公告)号：US06584708B2
公开(公告)日：2003-07-01
申请号：US09845484
申请日：2001-04-30
申请人： Sang Kyeong Yun , Sung June Park , Dong Hoon Kim
发明人： Sang Kyeong Yun , Sung June Park , Dong Hoon Kim
IPC分类号： B41J2045
CPC分类号： H01L41/0973 , H01L41/313 , H01L41/332
摘要： The present invention relates to a membraneless piezoelectric/electrostrictive microactuator comprising: a chamber; a chamber plate in which the chamber is formed; a lower electrode formed on the chamber plate and covering the chamber; a bonding layer formed between the chamber plate and the lower electrode and bonding the chamber plate and the lower electrode; a piezoelectric/electrostrictive film formed on the lower electrode and vibrating when electrified; and an upper electrode formed on the piezoelectric/electrostrictive film, and a manufacturing method thereof, which is membraneless so that structure is simple so that manufacturing method is simple and production cost is reduced to effect eventually the productivity improvement, so also which produces effect of reliability and yield ratio improvement as it is membraneless so that there occur no deformation, crack or void at the bonding part of vibration plate and piezoelectric/electrostrictive film.
摘要翻译：无膜压电/电致伸缩微致动器技术领域本发明涉及一种无膜压电/电致伸缩微致动器，包括：腔室; 形成腔室的室板; 形成在所述室板上并覆盖所述室的下电极; 形成在所述室板和所述下电极之间并且接合所述室板和所述下电极的接合层; 形成在下电极上并在通电时振动的压电/电致伸缩膜; 以及形成在压电/电致伸缩膜上的上电极及其制造方法，其结构简单，制造方法简单，生产成本降低，生产效率提高，因此也是无膜的，因此也产生效果可靠性和屈服比提高，因为它是无膜的，使得在振动板和压电/电致伸缩膜的接合部分处不发生变形，裂纹或空隙。

10. 发明授权

US06349455B1 Method for forming piezoelectric/electrostrictive film element at low temperature using electrophoretric deposition 失效
标题翻译：使用电泳沉积在低温下形成压电/电致伸缩膜元件的方法
公开(公告)号：US06349455B1
公开(公告)日：2002-02-26
申请号：US09417415
申请日：1999-10-13
申请人： Sang Kyeong Yun , Dong Hoon Kim
发明人： Sang Kyeong Yun , Dong Hoon Kim
IPC分类号： H01L4100
CPC分类号： B82Y30/00 , C01G25/006 , C01G33/006 , C01P2004/52 , C01P2004/62 , C01P2004/64 , C04B35/6264 , C04B2235/3206 , C04B2235/3232 , C04B2235/3244 , C04B2235/3251 , C04B2235/3296 , H01L41/1876 , H01L41/317 , Y10T29/42
摘要： A method for forming piezoelectric/electrostrictive film element at low temperature using electrophoretic deposition includes the steps of: dissolving or dispersing the raw material of constituent ceramic elements in a solvent or a dispersion medium; adding citric acid into the solution or the dispersed mixture; obtaining ultrafine ceramic oxide powder of particle size less than 1 &mgr;m with uniform particle diameter size distribution by forming ceramic oxide by a nonexplosive oxidative-reductive combustion reaction by thermally treating the mixed solution at 100-500° C.; preparing a suspension by dispersing the ultrafine ceramic oxide powder in an organic dispersant; preparing ceramic sol solution by dissolving constituent ceramic elements of the same or similar constituent as the ultrafine ceramic oxide powder in water or an organic solvent; mixing the suspension with the ceramic sol solution; forming a piezoelectric/electrostrictive film element by submerging a substrate into this mixture and then by performing electrophoretic deposition; and thermally treating the piezoelectric/electrostrictive film element at 100-600° C.
摘要翻译：使用电泳沉积法在低温下形成压电/电致伸缩膜元件的方法包括以下步骤：将构成陶瓷元件的原料溶解或分散在溶剂或分散介质中; 在溶液或分散的混合物中加入柠檬酸; 通过在100-500℃下热处理混合溶液，通过非爆炸性氧化还原性燃烧反应形成陶瓷氧化物，获得粒度小于1μm的超细陶瓷氧化物粉末，具有均匀的粒径分布。通过将超细陶瓷氧化物粉末分散在有机分散剂中制备悬浮液; 通过将与超细陶瓷氧化物粉末相同或相似的组分的组分陶瓷元素溶解在水或有机溶剂中来制备陶瓷溶胶溶液; 将悬浮液与陶瓷溶胶溶液混合; 通过将衬底浸入该混合物中，然后通过进行电泳沉积来形成压电/电致伸缩膜元件; 并在100-600℃下对压电/电致伸缩膜元件进行热处理。

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