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    • 1. 发明申请
    • Micro-column electron beam apparatus
    • 微柱电子束装置
    • US20060151716A1
    • 2006-07-13
    • US11257244
    • 2005-10-24
    • Sang ChoiDae KimJin JeongDae Kim
    • Sang ChoiDae KimJin JeongDae Kim
    • G21G5/00
    • H01J37/067B82Y10/00B82Y40/00H01J37/3177H01J2237/1205H01J2237/1502H01J2237/2818
    • Provided is a micro-column electron beam apparatus including: a base; an electron lens bracket on which an electron lens modulate can be fixed, mounted in a central portion of the base; an electron beam source tip module vertically disposed on the electron lens module; a pan spring plate stage module that is mounted over the base, supports the electron beam source tip module at a central portion thereof, and includes a three-coupling pan spring plate portion including first through third spring units that are coupled to the electron beam source tip module in three directions on a plane perpendicular to the vertical axis, which vertically passes the center of the electron beam source tip module, to elastically support the electron beam source tip module in three directions; a first piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a first axis perpendicular to the vertical axis; and a second piezoelectric actuator coupled to the pan spring plate stage module to move the electron beam source tip module along a second axis perpendicular to the vertical axis and the first axis.
    • 本发明提供一种微柱电子束装置,包括:基底; 可以固定电子透镜调制的电子透镜支架,安装在基座的中心部分; 垂直设置在电子透镜模块上的电子束源头模块; 安装在基座上方的平板弹簧板台模块在其中心部分处支撑电子束源头模块,并且包括三联盘盘弹簧板部分,其包括耦合到电子束源的第一至第三弹簧单元 尖端模块在垂直于垂直轴线的平面上垂直通过电子束源头模块的中心,在三个方向弹性支撑电子束源头模块; 第一压电致动器,其联接到所述盘簧板模块以沿着垂直于所述垂直轴线的第一轴线移动所述电子束源尖端模块; 以及耦合到盘簧级模块的第二压电致动器,用于沿垂直于垂直轴线和第一轴线的第二轴线移动电子束源尖端模块。
    • 2. 发明申请
    • Micro stage using piezoelectric element
    • 微电极采用压电元件
    • US20060131996A1
    • 2006-06-22
    • US11231471
    • 2005-09-20
    • Sang ChoiDae KimJin JeongDae Kim
    • Sang ChoiDae KimJin JeongDae Kim
    • H02N2/00
    • H02N2/028H01J2237/20264
    • Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoelectric element. Accordingly, the emission tip can be exactly and stably positioned using only the movable piezoelectric elements.
    • 提供了一种微型台,包括:主体,其具有穿过其中心部分的垂直穿孔的通孔; 线轴,其包括具有嵌入其中心的电子发射尖端的尖端部分,并沿着垂直于垂直方向的第一轴线穿过所述通孔的待通孔; 第一压电元件,其设置在所述主体上,并且当施加电压时被延长以沿着所述第一轴线沿一个方向推动所述线轴; 第二压电元件,其设置在所述主体上并且当施加电压时被延长以沿着所述第一轴线沿另一方向推动所述线轴; 以及上盖,其联接到所述主体的上部并且具有通孔,所述筒管通过所述通孔,所述通孔与所述主体的所述通孔连通,其中所述线轴可根据需要沿着所述第一轴由 调整施加到第一压电元件和第二压电元件的电压。 因此,可以仅使用可动压电元件来精确且稳定地定位发射尖端。