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    • 4. 发明授权
    • Electron beam proximity correction method for hierarchical design data
    • 用于层次设计数据的电子束接近校正方法
    • US6035113A
    • 2000-03-07
    • US002841
    • 1998-01-05
    • Porter Dean GerberSamuel Jonas Wind
    • Porter Dean GerberSamuel Jonas Wind
    • H01J37/302G06F17/50
    • H01J37/3023H01J2237/31769
    • A method for formulating an exposure dose for an electron beam on a resist film for a pattern of geometric shapes which compensates for electron scattering effects utilizing hierarchial design data which is preserved to as great as an extent as possible in the computation of the exposure dose. The exposure dose is corrected for both the forward scatter and backscatter effects of the electron beam in which the design data is modified for interactions of shapes which are affected only over the forward scatter range. In another version of the method, a multiple Gaussian approximation is used where the short term Gaussian terms are treated as the forward scatter terms and the long term Gaussian terms are treated as the back scatter terms.
    • 用于在抗蚀剂膜上形成用于几何形状图案的电子束的曝光剂量的方法,其利用在计算曝光剂量时尽可能地保持尽可能大的程度的层次设计数据来补偿电子散射效应。 电子束的前向散射和反向散射效应的曝光剂量被校正,其中设计数据被修改用于仅在前向散射范围内影响的形状的相互作用。 在该方法的另一个版本中,使用多高斯近似,其中短期高斯项被视为前向散射项,长期高斯项被视为后向散射项。