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    • 3. 发明申请
    • SEMICONDUCTOR CHIP
    • 半导体芯片
    • US20170062293A1
    • 2017-03-02
    • US15219457
    • 2016-07-26
    • Samsung Electronics Co., Ltd.
    • Yun-Rae ChoSun-Dae KimNam-Gyu BaekHyung-Gil Baek
    • H01L21/66G01R31/28H01L23/58
    • H01L22/34G01R31/2856G01R31/2884H01L21/67288H01L23/585
    • A semiconductor chip may include a semiconductor substrate and a crack detection circuit. The semiconductor substrate may include a circuit structure. The crack detection circuit may include main lines and a chamfer lines. The main lines may be formed in the semiconductor substrate to surround the circuit structure. The chamfer lines may be formed in corners of the semiconductor substrate. The chamfer lines may be connected between the main lines. A first angle may be formed between each of the chamfer lines and any one of the two main lines perpendicular to each other. A second angle wider than the first angle may be formed between each of the chamfer lines and the other main line. Thus, although a crack may be generated in the corner of the semiconductor substrate by twice cutting processes of a wafer, the crack detection circuit may not detect the crack.
    • 半导体芯片可以包括半导体衬底和裂纹检测电路。 半导体衬底可以包括电路结构。 裂纹检测电路可以包括主线和倒角线。 主线可以形成在半导体衬底中以包围电路结构。 倒角线可以形成在半导体衬底的角部。 倒角线可以连接在主线之间。 可以在每个倒角线和彼此垂直的两个主线中的任一个之间形成第一角度。 可以在每个倒角线和另一个主线之间形成比第一角宽的第二角度。 因此,尽管通过两次切割晶片的过程可能在半导体基板的拐角处产生裂纹,但是裂纹检测电路可能不会检测到裂纹。