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1. 发明授权

US11773478B2 Mask, method of providing mask, and method of providing display panel using the same 有权
公开(公告)号：US11773478B2
公开(公告)日：2023-10-03
申请号：US17307386
申请日：2021-05-04
申请人： Samsung Display Co., Ltd.
发明人： Duckjung Lee , Ji-Hee Son , Sungsoon Im
IPC分类号： C23C14/04 , H10K71/00 , H10K71/16
CPC分类号： C23C14/042 , H10K71/00 , H10K71/166
摘要： A deposition mask includes a mask film including a polymer, a plurality of first deposition openings defined in the mask film. and a conductive layer which is on the mask film and receives a power. The conductive layer includes a first conductive pattern and a second conductive pattern spaced apart from each other along the mask film and electrically disconnected from each other. The conductive layer receives the power at the first conductive pattern and the second conductive pattern, and receipt of the power at the first conductive pattern and the second conductive pattern provides an electrostatic chuck function of the deposition mask.

2. 发明授权

US11584983B2 Method of manufacturing mask, mask manufactured by the same, and method of manufacturing display apparatus by using the same 有权
公开(公告)号：US11584983B2
公开(公告)日：2023-02-21
申请号：US17025850
申请日：2020-09-18
申请人： Samsung Display Co., Ltd.
发明人： Taesung Kim , Yunjong Yeo , Hyunmin Cho , Jihee Son , Sungsoon Im
IPC分类号： C23C14/04 , H01L51/00 , H01L27/32
摘要： A method of manufacturing a mask, includes forming an organic material layer on a mask substrate and patterning a hard mask on the organic material layer, etching the organic material layer to form a mask sheet including through holes, removing the hard mask on the mask sheet, forming a conductive material layer on the mask sheet, and etching the conductive material layer to form a conductive layer.

3. 发明申请

US20220359853A1 APPARATUS FOR MANUFACTURING DISPLAY DEVICE 有权
公开(公告)号：US20220359853A1
公开(公告)日：2022-11-10
申请号：US17737893
申请日：2022-05-05
申请人： Samsung Display Co., Ltd. , Postech Research And Business Development Foundation
发明人： Sungsoon Im , Jongkyu Kim , Seokho Moon , Jeonghyeon Park , Heemin Park , Seungyong Song , Duckjung Lee , Heonwoong Hwang
IPC分类号： H01L51/56 , H01L51/00 , C23C14/12 , C23C14/04
摘要： An apparatus for manufacturing a display device includes: a support to mount a display substrate having a pixel area; a multi-layered film disposed above the display substrate and including a light-transmissive base layer and a source layer disposed on the base layer facing the pixel area and including an organic material; and a laser device spaced apart from the multi-layered film to radiate a laser beam toward the multi-layered film. The source layer is capable of absorbing the laser beam.

4. 发明申请

US20190027687A1 MASK FOR THIN FILM DEPOSITION, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING A DISPLAY APPARATUS USING THE SAME 审中-公开
公开(公告)号：US20190027687A1
公开(公告)日：2019-01-24
申请号：US15865141
申请日：2018-01-08
申请人： Samsung Display Co., Ltd.
发明人： Youngmin Moon , Sungsoon Im , Jeongkuk Kim , Minho Moon , Kyuhwan Hwang
IPC分类号： H01L51/00 , H01L27/32 , H01L51/56 , C25D1/20 , C25D1/10 , C23C16/04 , C23C14/04 , B23K26/50 , G03F7/16 , G03F7/20 , G03F7/26
摘要： A mask for thin film deposition of a display apparatus having both end portions coupleable to a frame in a state of tension in a lengthwise direction thereof, the mask including: a first portion having a first thickness and a plurality of pattern holes through which a deposition material may pass; a second portion comprising a welding portion having a second thickness configured to be coupled to a frame; and a third portion connecting the first portion and the third portion, wherein the first thickness is less than the second thickness, and the third portion includes an inclined surface connecting the first portion and the second portion.

5. 发明授权

US09972810B2 Method of manufacturing mask assembly using electroforming and laser processes and method of manufacturing display apparatus using mask assembly 有权
公开(公告)号：US09972810B2
公开(公告)日：2018-05-15
申请号：US15196055
申请日：2016-06-29
申请人： Samsung Display Co., Ltd.
发明人： Youngmin Moon , Sungsoon Im , Kyuhwan Hwang , Minho Moon
IPC分类号： H01L21/00 , H01L51/56 , B23K26/382 , C25D1/10 , C25D1/20 , G03F7/20 , H01L51/00 , B23K101/36
CPC分类号： H01L51/56 , B23K26/382 , B23K2101/36 , C25D1/08 , C25D1/10 , C25D1/20 , C25D3/562 , G03F7/20 , H01L27/3244 , H01L51/0011 , H01L2227/323
摘要： A method of manufacturing a mask assembly includes forming, via an electroforming process, a base material including at least one opening on an electrode plate; and reprocessing the at least one opening using a laser to form at least one reprocessed opening.

6. 发明公开

US20240102145A1 METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE 审中-公开
公开(公告)号：US20240102145A1
公开(公告)日：2024-03-28
申请号：US18347104
申请日：2023-07-05
申请人： Samsung Display Co., Ltd.
发明人： Heemin Park , Arong Kim , Youngmin Moon , Youngho Park , Areum Lee , Sungsoon Im , Junho Jo
IPC分类号： C23C14/04 , H10K59/12 , H10K71/16
CPC分类号： C23C14/042 , H10K59/1201 , H10K71/166
摘要： An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.

7. 发明授权

US11825727B2 Mask, method of providing mask, and method of providing display panel using the same 有权
公开(公告)号：US11825727B2
公开(公告)日：2023-11-21
申请号：US17396874
申请日：2021-08-09
申请人： Samsung Display Co., Ltd.
发明人： Seul Lee , Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im
IPC分类号： H10K71/00 , G03F7/00 , C23C16/04 , C23C14/04 , H10K59/12
CPC分类号： H10K71/00 , C23C14/042 , C23C16/042 , G03F7/0015 , H10K59/12
摘要： A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.

8. 发明授权

US11319508B2 Cleaning composition for removing oxide and method of cleaning using the cleaning composition 有权
公开(公告)号：US11319508B2
公开(公告)日：2022-05-03
申请号：US14808128
申请日：2015-07-24
申请人： Samsung Display Co., Ltd.
发明人： Sungsoon Im , Kyuhwan Hwang , Inho Kong , Changsub Kim , Hotae Kim , Jaehwan Jin , Donguk Hwang
IPC分类号： C11D3/20 , C11D3/04 , C11D11/00
摘要： The present disclosure relates to a cleaning composition for removing an oxide including an acid selected from an organic acid, an inorganic acid, and a combination thereof; a salt selected from an organic salt, an inorganic salt, and a combination thereof; a surfactant; and water, and a method of cleaning using the cleaning composition.

9. 发明授权

US09999943B2 Method of manufacturing a mask 有权
公开(公告)号：US09999943B2
公开(公告)日：2018-06-19
申请号：US15091913
申请日：2016-04-06
申请人： Samsung Display Co., Ltd.
发明人： Youngmin Moon , Sungsoon Im , Minho Moon , Soonchul Chang
IPC分类号： H01L21/302 , H01L21/461 , C25F3/00 , B23P15/00 , C03C25/00 , C23F1/00 , C03C15/00 , C03C25/68 , B44C1/22 , B23K26/384 , B23K26/00 , B23K26/40 , C23C14/04 , H01L51/00 , B23K103/18
CPC分类号： B23K26/384 , B23K26/0093 , B23K26/40 , B23K2103/26 , C23C14/042 , G03F7/004 , H01L21/02063 , H01L21/76804 , H01L51/0011
摘要： A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.

10. 发明申请

US20160049587A1 DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS 有权
标题翻译：沉积装置和制造有机发光显示装置的方法
公开(公告)号：US20160049587A1
公开(公告)日：2016-02-18
申请号：US14596653
申请日：2015-01-14
申请人： Samsung Display Co., Ltd.
发明人： Sungsoon Im , Taewook Kang , Duckjung Lee
IPC分类号： H01L51/00 , H01L51/56
CPC分类号： H01L51/0013 , H01L27/3211 , H01L51/56 , H01L2227/323
摘要： Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.
摘要翻译：提供了能够减少OLED装置的制造时间和制造成本的有机发光显示（OLED）装置的制造装置和制造方法。该方法包括：使基板转动使得基板的沉积表面朝向上方; 在第一供体掩模的沉积表面面向下时，将第一沉积层沉积在第一施主掩模的沉积表面上; 将第一施主掩模和衬底布置成使得第一施主掩模在衬底上方，同时第一沉积层面向下并且衬底的沉积表面朝上; 在所述衬底的沉积表面上沉积所述第一施主掩模的沉积表面的第一沉积层的一部分; 并转动基板使得基板的沉积表面朝下。

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