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    • 5. 发明授权
    • Coaxial charged particle energy analyzer
    • 同轴带电粒子能量分析仪
    • US07928381B1
    • 2011-04-19
    • US11437986
    • 2006-05-19
    • Michael A. KellyCharles E. Bryson, IIIWarren Wu
    • Michael A. KellyCharles E. Bryson, IIIWarren Wu
    • H01J37/28
    • H01J37/05H01J2237/053H01J2237/057H01J2237/24485H01J2237/2449H01J2237/24585
    • A non-dispersive electrostatic energy analyzer for electrons and other charged particles having a generally coaxial structure of a sequentially arranged sections of an electrostatic lens to focus the beam through an iris and preferably including an ellipsoidally shaped input grid for collimating a wide acceptance beam from a charged-particle source, an electrostatic high-pass filter including a planar exit grid, and an electrostatic low-pass filter. The low-pass filter is configured to reflect low-energy particles back towards a charged particle detector located within the low-pass filter. Each section comprises multiple tubular or conical electrodes arranged about the central axis. The voltages on the lens are scanned to place a selected energy band of the accepted beam at a selected energy at the iris. Voltages on the high-pass and low-pass filters remain substantially fixed during the scan.
    • 一种用于电子和其他带电粒子的非分散静电能量分析器,具有静电透镜的顺序布置部分的大致同轴结构,以将光束聚焦通过虹膜,并且优选地包括椭圆形输入栅格,用于使来自 带电粒子源,包括平面出射格栅的静电高通滤波器和静电低通滤波器。 低通滤波器被配置为将低能粒子反射回位于低通滤波器内的带电粒子探测器。 每个部分包括围绕中心轴布置的多个管状或圆锥形电极。 扫描透镜上的电压,将所接受光束的选定能带放置在虹膜处的选定能量处。 高通滤波器和低通滤波器的电压在扫描期间保持基本固定。